Fabrication of Polymeric Optical Waveguide by LIGA
![]() |
Kim, Jin-Tae
(한국전자통신연구원 광접속모듈팀)
Kim, Byeong-Cheol (한국전자통신연구원 광접속모듈팀) Choi, Choon-Gi (한국전자통신연구원 광접속모듈팀) Yoon, Keun-Byoung (한국전자통신연구원 광접속모듈팀) Jeong, Myung-Yung (한국전자통신연구원 광접속모듈팀) |
1 | Schroder, H., Bauer, J., Ebling, F., and Scheel, W., 2001, 'Polymer Optical Interconnects for PCB,' First International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics, pp. 337 - 343 DOI |
2 | Meyer, P., El-Kholi, A., and Schulz, J., 2002, 'Investigations of the Development Rate of Irradiated PMMA Microstructures in Deep X-ray Lithography,' Microelectronic Engineering, Vol. 63, pp. 319-328 DOI ScienceOn |
3 | Ehrfeld, W. and Lehr, H., 1995, 'Deep X-ray Lithography for the Production of Three-Dimensional Microstructures from Metals, Polymers and Ceramics,' Radiat. Phys. Chem. Vol. 45, pp. 349-365 DOI ScienceOn |
4 | Bustillo, J. M., Howe, R. T., and Muller, R. S., 1998, 'Surface Micromachining for Micro-Electromechanical Systems,' Proceedings of the IEEE, Vol. 86, pp. 1552 -1574 DOI ScienceOn |
5 | Becker, H. and Heim, U., 1995, 'Hot Embossing as a Method for the Fabrication of Polymer High Aspect Ratio Structure,' Sensors and Actuators, Vol. 83, pp. 130-135 DOI ScienceOn |
6 | Bauer, H. D., Ehrfeld, W., Harder, M., Paatzsch, T., Popp, M., and Smaglinski, I., 2000, 'Polymer Waveguide Devices with Passive Pigtailing: an Application of LIGA Technology,' Synthetic Metals, Vol. 115, pp. 13 - 20 DOI ScienceOn |
7 | Margaritondo, G., 1998, Introduction to Synchrotron Radiation, Oxford |
8 | Ruprecht, R., Bacher, W., Hausselt, H. J., and Piotter, V., 1995, 'Injection Molding of LIGA and LIGA-Similar Microstructures using filled and unfilled Thermoplastics,' Micromachining and Microfabrication Process Technology (Proceeding of the SPIE), Austin, TX, pp. 146-157 DOI |
9 | Mohr, J., Ehrfeld, W., Munchmeyer, D., and Stutz, A., 1989, 'Resist Technology for Deep-Etch Synchrotron Radiation Lithography,' Makromol. Chem. Marcromol. Symp., Vol. 24, pp. 231-251 DOI |
10 | Guckel, H., Christenson., T. R., and Skrobis, K., 1993, 'Formation of Microstructures using a Preformed Photoresist Sheet,' US Patent 5,378,583 |
11 | Pantenburg, F. J., Achenbach, S., and Mohr, J., 1998, 'Characterisation of Defects in Very High Deep-Etch X-ray Lithography Microstructures,' Microsystem Technologies, Vol. 4, pp. 89-93 DOI |
12 | Lehockey, E. M., Reid, I., and Hill, I., 1988, 'The Radiation Chemistry of Poly(methylmethacrylate) Polymer Resists,' J. Vac. Sci. Technol. A, Vol. 6, pp. 2221-2225 DOI |
13 | Tan, M. X., Bankert, M. A., Griffiths, S. K., Ting, A., Boehme, D. R., Wilson, S., and Balser, L. M., 1998, 'PMMA Development Studies using Various Synchrotron Sources and Exposure Condistions,' SPIE Vol. 3512, pp. 262-270 DOI |
14 | Madou, M. J., 1997, Fundamentals of Microfabricatin, Cahp. 6., Boca Taton, FL, CRC Press |
15 | EI-Kholi, A., Bade, K., Mohr, J., Pantenburg, F. J., and Tang, X. M., 2000, 'Alternative Resist Adhesion and Electroplating Layer for LIGA Process,' Microsystem Technologies, Vol. 6, pp. 161-164 DOI |
16 | Progelhof, R. C. and Throne, J. L., 1993, Polymer Engineering Principles, pp. 471, Hanser, Munich |
17 | Kim, J. T., Kim, B. C., Yoon, K. B., Jeong, M. Y., and Jung, S. W., 2002, 'Fabrication of Polymer Micro Structures by Hot Embossing,' J. Korean Industrial and Engineering chemistry, Vol. 13, pp. 832-835 |
![]() |