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http://dx.doi.org/10.3795/KSME-A.2003.27.6.997

Fabrication of Polymeric Optical Waveguide by LIGA  

Kim, Jin-Tae (한국전자통신연구원 광접속모듈팀)
Kim, Byeong-Cheol (한국전자통신연구원 광접속모듈팀)
Choi, Choon-Gi (한국전자통신연구원 광접속모듈팀)
Yoon, Keun-Byoung (한국전자통신연구원 광접속모듈팀)
Jeong, Myung-Yung (한국전자통신연구원 광접속모듈팀)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.6, 2003 , pp. 997-1006 More about this Journal
Abstract
LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.
Keywords
LIGA; Deep X-ray Lithography; Hot Embossing; Polymeric Optical Waveguide;
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