• 제목/요약/키워드: High vacuum pressure

검색결과 639건 처리시간 0.025초

Electrical Properties of Metal-Oxide Quantum dot Hybrid Resistance Memory after 0.2-MeV-electron Beam Irradiation

  • Lee, Dong Uk;Kim, Dongwook;Kim, Eun Kyu;Pak, Hyung Dal;Lee, Byung Cheol
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.311-311
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    • 2013
  • The resistance switching memory devices have several advantages to take breakthrough for the limitation of operation speed, retention, and device scale. Especially, the metal-oxide materials such as ZnO are able to fabricate on the flexible and visible transparent plastic substrate. Also, the quantum dots (QDs) embedded in dielectric layer could be improve the ratio between the low and the high resistance becauseof their Coulomb blockade, carrier trap and induced filament path formation. In this study, we irradiated 0.2-MeV-electron beam on the ZnO/QDs/ZnO structure to control the defect and oxygen vacancy of ZnO layer. The metal-oxide QDs embedded in ZnO layer on Pt/glass substrate were fabricated for a memory device and evaluated electrical properties after 0.2-MeV-electron beam irradiations. To formation bottom electrode, the Pt layer (200 nm) was deposited on the glass substrate by direct current sputter. The ZnO layer (100 nm) was deposited by ultra-high vacuum radio frequency sputter at base pressure $1{\times}10^{-10}$ Torr. And then, the metal-oxide QDs on the ZnO layer were created by thermal annealing. Finally, the ZnO layer (100 nm) also was deposited by ultra-high vacuum sputter. Before the formation top electrode, 0.2 MeV liner accelerated electron beams with flux of $1{\times}10^{13}$ and $10^{14}$ electrons/$cm^2$ were irradiated. We will discuss the electrical properties and the physical relationships among the irradiation condition, the dislocation density and mechanism of resistive switching in the hybrid memory device.

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LCD-Backlight의 고휘도 특성에 관한 연구 (A Study on the Characteristics of High Brightness of LCD-Backlight)

  • 김수용;지석근
    • 한국정보통신학회논문지
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    • 제10권10호
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    • pp.1810-1814
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    • 2006
  • 이 논문은 가스압력으로부터 휘도, 인가된 전압과 구동 주파수 상태를 측정하였고, 평판형광램프의 방전특성을 측정하고 논의하였다. 진공 여기($350^{\circ}C$, 1시간)후 수명과 휘도는 놀랍게 향상되었다. 램프내에 가스 압력이 높을 때 또한 휘도는 자동적으로 증가했다. 그러나 구동전압과 동작의 안정화를 위하여 약 1000(V), 300(Torr), 640[Hz]에서 휘도의 최고 값이 측정되며, 그 결과는 FFL을 위한 최적화된 구동 조건으로써 보여 진다.

Transformation of Wheat Immature Embryos by Particle Bombardment

  • Wu Li-Min;Wei Yu-Ming;Zheng You-Liang
    • Journal of Plant Biotechnology
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    • 제7권2호
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    • pp.113-121
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    • 2005
  • The objective of this study was to identify the major parameters controlling DNA delivery by particle bombardment to immature embryos of Chinese spring wheat (Triticum aestivum L.). Efficiency of DNA (uidA gene) delivery was assessed by transient GUS (${\beta}$-glucuronidase) expression in bombarded tissues. Of the parameters analyzed, acceleration pressure, bombardment distance, chamber vacuum pressure, bombardment times, osmotic conditioning of culture had a remarkable influence on transient gene expression. A bombardment procedure suitable for Chinese spring wheat cultivars was developed which allowed high-efficiency DNA delivery combined with reduced damage to target tissues. The high efficiency made the system practical for wheat genetic transformation research and accelerating wheat breeding programs.

Flexible Plasma Sheets

  • Cho, Guangsup;Kim, Yunjung
    • Applied Science and Convergence Technology
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    • 제27권2호
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    • pp.23-25
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    • 2018
  • With respect to the electrode structure and the discharge characteristics, the atmospheric pressure plasma sheet of a thin polyimide film is introduced in this study; here, the flexible plasma device of a dielectric-barrier discharge with the ground electrode and the high-voltage electrode formulated on each surface of a polyimide film whose thickness is approximately $100{\mu}m$, that is operated with a sinusoidal voltage at a frequency of 25 kHz and a low voltage from 1 kV to 2 kV is used. The streamer discharge is appeared along the cross-sectional boundary line between two electrodes at the ignition stage, and the plasma is diffused on the dielectric-layer surface over the high-voltage electrode. In the development of a plasma sheet with thin dielectric films, the avoidance of the insulation breakdown and the reduction of the leakage current have a direct influence on the low-voltage operation.

대기압 플라즈마를 이용한 산화물 박막 트랜지스터 표면처리에 관한 연구 (The Study of Improvement in the Characteristics of Oxide Thin Film Transistor by using Atmospheric Pressure Plasma)

  • 김가영;김경남;염근영
    • 한국표면공학회지
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    • 제48권1호
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    • pp.7-10
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    • 2015
  • Recently, oxide TFTs has attracted a lot of interests due to their outstanding properties such as excellent environmental stability, high mobility, wide-band gap energy and high transparency, and investigated through the method using vacuum system and wet solution. In the case of the method using wet solution, process is very simple, however, annealing process should be included. In this study, to overcome the problem of annealing process, atmospheric pressure plasma was used for annealing, and the electrical characteristics such as on/off ration and mobility of device were investigated.

Layer Controlled Synthesis of Graphene using Two-Step Growth Process

  • Han, Jaehyun;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.221.2-221.2
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    • 2015
  • Graphene is very interesting 2 dimensional material providing unique properties. Especially, graphene has been investigated as a stretchable and transparent conductor due to its high mobility, high optical transmittance, and outstanding mechanical properties. On the contrary, high sheet resistance of extremely thin monolayer graphene limits its application. Artificially stacked multilayer graphene is used to decrease its sheet resistance and has shown improved results. However, stacked multilayer graphene requires repetitive and unnecessary transfer processes. Recently, growth of multilayer graphene has been investigated using a chemical vapor deposition (CVD) method but the layer controlled synthesis of multilayer graphene has shown challenges. In this paper, we demonstrate controlled growth of multilayer graphene using a two-step process with multi heating zone low pressure CVD. The produced graphene samples are characterized by optical microscope (OM) and scanning electron microscopy (SEM). Raman spectroscopy is used to distinguish a number of layers in the multilayer graphene. Its optical and electrical properties are also analyzed by UV-Vis spectrophotometer and probe station, respectively. Atomic resolution images of graphene layers are observed by high resolution transmission electron microscopy (HRTEM).

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비구면 유리렌즈 성형용 SiC 코어의 DLC 코팅에 관한 연구 (A Research on DLC Thin Film Coating of a SiC Core for Aspheric Glass Lens Molding)

  • 박순섭;원종호
    • 한국정밀공학회지
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    • 제27권12호
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    • pp.28-32
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    • 2010
  • Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

Evaluation of Mechanical Properties and Microstructural Behavior of Sintered WC-7.5wt%Co and WC-12wt%Co Cemented Carbides

  • ;송준우;탁병진;홍현선;홍순직
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.58.1-58.1
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    • 2011
  • WC-Co and other similar cemented carbides have been widely used as hard materials in industrial cutting tools and as mould metals; and a number of techniques have been applied to improve its microstructural characteristics, hardness and ear resistance. Cobalt is used primarily to facilitate liquid phase sintering and acts as a matrix, i.e. a cementing phase between WC grains. A uniform distribution of metal phase in a ceramic is beneficial for improved mechanical properties of the composite. WC-Co, starting from initial powders, is vastly used for a variety of machining, cutting, drilling, and other applications because of its unique combination of high strength, high hardness, high toughness, and moderate modulus of elasticity, especially with fine grained WC and finely distributed cobalt. In this study, that started with two different compositions of initial powders, WC-7.5wt%Co and WC-12wt%Co with initial powder size being 1~3 ${\mu}m$, magnetic pulsed compaction followed by subsequent vacuum sintering were carried out to produce consolidated preforms. Magnetic Pulsed Compaction (MPC), a very short duration (~600 ${\mu}s$), high pressure (~4 Gpa), high-density preform molding method was used with varied pressure between 0.5 and 3.0 Gpa, in order to reach an initial high density that would help improve the sintering behavior. For both compositions and varied MPC pressure, before and after sintering, changes in microstructural behavior and mechanical properties were analyzed. With proper combination of MPC pressure and sintering, samples were obtained with better mechanical properties, densification and microstructural behavior, and considerably improved than other conventional processes.

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증착조건에 따른 undoped ZnO 박막의 특성 변화 (Property variations of undoped ZnO thin films with deposition conditions)

  • 남형진;이규항;조남인
    • 반도체디스플레이기술학회지
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    • 제7권3호
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    • pp.51-54
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    • 2008
  • In this study, we investigated variations in undoped ZnO thin film properties with working pressure, $O_2$/Ar ratio, and annealing ambient. Higher vacuum pressure during deposition was observed to bring about slower growth rate resulting in samples with better crystallinity as well as hole generation efficiency through formation of shallower oxygen interstitial. Given that $O_2$/Ar ratio is greater than unity, O provided from the ambient to ZnO during annealing was found to preferably situate at interstitial sites. When He was used for the second annealing, significant changes were not observed. On the other hand, O ambient caused increased density of oxygen interstitial, thereby making the film more intrinsic-like high resistivity ZnO.

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섬유부피분율 증가와 공극 감소를 위한 VARTM 공정의 대기압 제어에 관한 연구 (A Study on the Atmospheric Pressure Control of the VARTM Process for Increasing the Fiber Volume Fraction and Reducing Void)

  • 곽성훈;김태준;탁윤학;권성일;이재현;김상용;이종천
    • Composites Research
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    • 제34권2호
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    • pp.88-95
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    • 2021
  • VARTM(Vacuum-assisted resin transfer molding) 공정은 OoA(Out of Autoclave)에 속하는 저가형 공정기술로 다양한 분야에 널리 사용되어 왔다. 그러나 오토클레이브 공정보다 품질이 낮아 고신뢰성이 요구되는 항공산업에는 적용하기 어려웠다. VARTM 공정의 주요 문제는 오토클레이브 대비 낮은 섬유부피분율과 높은 Void 함량에 의한 기계적 물성의 손실이었다. 따라서 많은 연구자들이 Void를 줄이고 섬유부피분율을 높일 수 있는 연구를 수행해 왔다. 이러한 연구의 흐름에 따라 본 연구에서는 수지 주입 과정 중 대기압을 제어하는 방법이 섬유부피분율을 높이고 Void를 감소시킬 수 있는지 검토하였다. 신뢰성 평가는 Void와 연관성이 있는 압축강도시험, 섬유부피분율 분석, 광학현미경 촬영을 통해 확인하였다. 결과적으로 VARTM 공정에서 수지 주입과정 중 대기압을 단계별로 높이는 방법이 섬유부피분율 증가와 Void 감소에 직접적인 효과가 있음을 확인하였다.