A Research on DLC Thin Film Coating of a SiC Core for Aspheric Glass Lens Molding

비구면 유리렌즈 성형용 SiC 코어의 DLC 코팅에 관한 연구

  • Park, Soon-Sub (Honam Technology Division, Korea Institute of Industrial Technology) ;
  • Won, Jong-Ho (Department of Mechanical Engineering, Chungnam National University)
  • 박순섭 (한국생산기술연구원 호남권기술지원본부) ;
  • 원종호 (충남대학교 기계공학과)
  • Received : 2010.09.20
  • Accepted : 2010.10.22
  • Published : 2010.12.01

Abstract

Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

Keywords

References

  1. Lee, K. R. and Eun, K. Y., "Diamond- like Carbon Film," Bull of the Korean Inst. of Mat. & Mater., Vol. 6, No. 4, pp. 345-361, 1993.
  2. Cui, F. Z. and Li, D. J., "A review of investigations on biocompatibility of diamondlike carbon and carbon nitride films," Surf. Coat. Technol., Vol. 131, No. 1-3, pp. 481-487, 2000. https://doi.org/10.1016/S0257-8972(00)00809-4
  3. Baldwin, D. A. and Fallabella, S., "Deposition processes utilizing a new filtered cathodic arc source," Proc. of the 38th Annual Techn. Conf., Society of Vacuum Coaters, pp. 309-316, 1995.
  4. Anders, A., Anders, S. and Brown, I. G, "Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters," J. Appl. Phys., Vol. 75, No. 10, pp. 4900-4905, 1994. https://doi.org/10.1063/1.355777
  5. Aksenov, I. I., Belous, V. A., Padalka, V. G. and Khoroshikh, V. M., "Transport of plasma streams in a curvilinear plasma-optics system," Sov. J. Plasma Phys., Vol. 4, No. 4, pp. 425-428, 1978.
  6. Anders, S., Diaz, J., Ager, J. W. III, Lo, R. Y. and Bogy, D. B., "Thermal stability of amorphous hard carbon films produced by cathodic arc deposition," Appl. Phys. Lett., Vol. 71, No. 23, pp. 3367-3369, 1997. https://doi.org/10.1063/1.120339
  7. Anders, S., Ager, J. W. III, Pharr, G. M., Tsui, T. Y. and Brown, I. G, "Heat treatment of cathodic arc deposited amorphous hard carbon films," Thin Solid Films, Vol. 308-309, pp. 186-190, 1997. https://doi.org/10.1016/S0040-6090(97)00385-4
  8. Yoshikawa, M., Katagiri, G., Ishida, H. and Akamatsu, T., "Raman spectra of diamondlike amorphous carbon films," J. Appl. Phys, Vol. 64, No. 11, pp. 6464-6468, 1988. https://doi.org/10.1063/1.342063
  9. Savvides, N. and Bell, T. J., "Microhardness and Young's modulus of diamond and diamondlike carbon films," J. Appl. Phys. Vol. 72, No. 7, pp. 2791, 1992. https://doi.org/10.1063/1.351530
  10. Lee, C., Shin, J., Kim, J., Lee, K. and Yoon, K., "The control of the structure and properties of tetrahedral amorphous carbon films prepared by Filters Vacuum Arc," Journal of the Korean Vacuum Society, Vol. 11, No. 1, pp. 8-15, 2002.
  11. McKenzie, D. R., Yin, Y., Marks, N. A., Davis, C. A., Kravtchinskaia, E., Pailthorpe, B. A. and Amaratunga, G. A. J., "Tetrahedral amorphous carbon properties and applications," J. Non-cryst. Solids, Vol. 164-166, Part 2, pp. 1101-1106, 1993. https://doi.org/10.1016/0022-3093(93)91191-5
  12. Neuville, S. and Matthews, A., "Hard Carbon Coatings: The Way Forward," Materials Research Society Bulletin, pp. 22-26, 1997.
  13. Park, S. S. and Won, J. H., "Research on ultra-precision Grinding Work of silicon carbide," Journal of Korean Society for Precision Engineering, Vol. 26, No. 9, pp. 58-63, 2009.