• Title/Summary/Keyword: High pitch

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Preliminary Research of CZT Based PET System Development in KAERI

  • Jo, Woo Jin;Jeong, Manhee;Kim, Han Soo;Kim, Sang Yeol;Ha, Jang Ho
    • Journal of Radiation Protection and Research
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    • v.41 no.2
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    • pp.81-86
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    • 2016
  • Background: For positron emission tomography (PET) application, cadmium zinc telluride (CZT) has been investigated by several institutes to replace detectors from a conventional system using photomultipliers or Silicon-photomultipliers (SiPMs). The spatial and energy resolution in using CZT can be superior to current scintillator-based state-of-the-art PET detectors. CZT has been under development for several years at the Korea Atomic Energy Research Institute (KAERI) to provide a high performance gamma ray detection, which needs a single crystallinity, a good uniformity, a high stopping power, and a wide band gap. Materials and Methods: Before applying our own grown CZT detectors in the prototype PET system, we investigated preliminary research with a developed discrete type data acquisition (DAQ) system for coincident events at 128 anode pixels and two common cathodes of two CZT detectors from Redlen. Each detector has a $19.4{\times}19.4{\times}6mm^3$ volume size with a 2.2 mm anode pixel pitch. Discrete amplifiers consist of a preamplifier with a gain of $8mV{\cdot}fC^{-1}$ and noise of 55 equivalent noise charge (ENC), a $CR-RC^4$ shaping amplifier with a $5{\mu}s$ peak time, and an analog-to-digital converter (ADC) driver. The DAQ system has 65 mega-sample per second flash ADC, a self and external trigger, and a USB 3.0 interface. Results and Discussion: Characteristics such as the current-to-voltage curve, energy resolution, and electron mobility life-time products for CZT detectors are investigated. In addition, preliminary results of gamma ray imaging using 511 keV of a $^{22}Na$ gamma ray source were obtained. Conclusion: In this study, the DAQ system with a CZT radiation sensor was successfully developed and a PET image was acquired by two sets of the developed DAQ system.

Fabrication of the Micromachined Transformer using High Permeability NiFe Core (투자율이 높은 NiFe 코어를 이용한 마이크로 트랜스포머 제작)

  • Cho, Se-Jun;Cha, Doo-Yeol;Lee, Jai-Hyuk;Lee, Soo-Jin;Chang, Sung-Pil
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.3
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    • pp.194-198
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    • 2010
  • Recently as the electronic devices are getting to be more and more smaller, transformers are needed to be micro fabricated using MEMS technology. In this paper transformers have been fabricated and measured by depositing insulation layer to reduce the loss of eddy current and in the middle core a high permeability permalloy was designed based on the turns ratio between primary coil and secondary coil which are 1:1 transformers. (the number of turns of primary coil and secondary coil: 3/3, 5/5, 7/7). The size of the transformers including ground shield are $1mm{\times}1.5mm$, $1mm{\times}1.95mm$, $1mm{\times}2.35mm$ respectively. The line width, pitch and the height of post are 50um. Based on the measured data from the micro fabricated transformers, the 3/3 turns in the primary coil and secondary coil showed the lowest insertion loss with 1.5 dB at 480 MHz and the 7/7 turns in the primary coil and secondary coil showed the highest insertion loss with 2.5 dB at 280 MHz. Also confirmed that the bandwidth goes up as the number of turns goes down. There was some difference between the actual measured data and the HFSS simulation result. It looks as if it is an error of the difference between oxidation of copper or the permeability of SU-8.

An Accuracy Improvement Method for the Analysis of Process Variation Effect on CNTFET-based Circuit Performance (CNTFET 기반 회로 성능의 공정 편차 영향 분석을 위한 정확도 향상 방법)

  • Cho, Geunho
    • Journal of IKEEE
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    • v.22 no.2
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    • pp.420-426
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    • 2018
  • In the near future, CNTFET(Carbon NanoTube Field Effect Transistor) is considered as one of the most promising candidate for the replacement of modern silicon-based transistors by utilizing the ballistic or near-ballistic transport capability of CNT(Carbon NanoTube). For the large-scale fabrication of high performance CNTFET, semiconducting CNTs have to be well-aligned with a fixed pitch and high densities in the each CNTFET. However, due to the immaturity of the CNTFET fabrication process, CNTs can be unevenly positioned in a CNTFET and existing HSPICE library file cannot support the circuit level evaluation of performance variation caused by the unevenly positioned CNTs. To evaluate the performance variation, linear programming methodology was suggested previously, but the errors can be made during the calculation of the current and the gate capacitance of a CNTFET. In this paper, the reasons causing errors will be discussed in detail and the new methodology to reduce the errors will be also suggested. Simulation results shows that the errors can be reduced from 7.096% to 3.15%.

Aeroacoustic Characteristics and Noise Reduction of a Centrifugal Fan for a Vacuum Cleaner

  • Jeon, Wan-Ho;Rew, Ho-Seon;Kim, Chang-Joon
    • Journal of Mechanical Science and Technology
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    • v.18 no.2
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    • pp.185-192
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    • 2004
  • The aeroacoustic characteristics of a centrifugal fan for a vacuum cleaner and its noise reduction method are studied in this paper. The major noise source of a vacuum cleaner is the centrifugal fan. The impeller of the fan rotates at over 30000 rpm, and generates very high-level noise. It was revealed that the dominant noise source is the aerodynamic interaction between the rotating impeller and stationary diffuser. The directivity of acoustic pressure showed that most of the noise propagates backward direction of the fan-motor assembly. In order to reduce the high tonal sound generated from the aerodynamic interaction, unevenly pitched impeller and diffuser, and tapered impeller designs were proposed and experiments were performed. Uneven pitch design of the impeller changes the sound quality while the overall sound power level (SPL) and the performance remains similar. The effect of the tapered design of impeller was evaluated. The trailing edge of the tapered fan is inclined. This reduces the flow interaction between the rotating impeller and the stationary diffuser because of some phase shifts. The static efficiency of the new impeller design is slightly lower than the previous design. However, the overall SPL is reduced by about 4 dB(A). The SPL of the fundamental blade passing frequency (BPF) is reduced by about 6 dB (A) and the 2$\^$nd/ BPF is reduced about 20 dB (A). The vacuum cleaner with the tapered impeller design produces lower noise level than the previous one, and the strong tonal sound was dramatically reduced.

Approximate Friction and Gravity Compensation in Haptic Laparoscopic Surgery Simulator (햅틱 복강경 수술 시뮬레이터의 마찰력 및 중력 보상)

  • Kim, Sang-Hyun;Lee, Chang-Gyu;Kim, Ji-Suk;Ryu, Je-Ha
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.8
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    • pp.883-888
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    • 2011
  • Laparoscopic surgery is being used in various surgical fields because it minimizes scarring. Laparoscopic operations require practical hand skills, so surgeons train on animals and via surgery training tool sets. However, these tool sets do not give the surgeon the sensation of touching real organs. A recently developed laparoscope simulator has a high friction force along the translational axis and a high gravity force along the pitch axis, and therefore it does not permit the operator to control his or her hands delecately. In the paper, the friction force along the axes is auumed to depend on the veolcity, and the gravity force on the angle and distance. We develop a compensation model that combines the gravity and friction force models.

A New Manufacturing Technology and Characteristics of Trench Gate MOSFET (새로운 트렌치 게이트 MOSFET 제조 공정기술 및 특성)

  • Baek, Jong-Mu;Cho, Moon-Taek;Na, Seung-Kwon
    • Journal of Advanced Navigation Technology
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    • v.18 no.4
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    • pp.364-370
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    • 2014
  • In this paper, high reliable trench formation technique and a novel fabrication techniques for trench gate MOSFET is proposed which is a key to expend application of power MOSFET in the future. Trench structure has been employed device to improve Ron characteristics by shrinkage cell pitch size in DMOSFET and to isolate power device part from another CMOS device part in some power integrated circuit. A new process method for fabricating very high density trench MOSFETs using mask layers with oxide spacers and self-align technique is realized. This technique reduces the process steps, trench width and source and p=body region with a resulting increase in cell density and current driving capability and decrease in on resistance.

Effect of Duct Aspect Ratios on Pressure Drop in a Rotating Two-Pass Duct (덕트 종횡비가 회전덕트 내 압력강하에 미치는 영향)

  • Kim Kyung-Min;Lee Dong-Hyun;Cho Hyung-Hee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.30 no.6 s.249
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    • pp.505-513
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    • 2006
  • The pressure drop characteristics in a rotating two-pass duct with rib turbulators are investigated in the present study. Three ducts of different aspect ratios (W/H=0.5, 1.0 and 2.0) are employed with a fixed hydraulic diameter ($D_h$) of 26.7 mm. $90^{\circ}$-rib turbulators with $1.5mm{\times}1.5mm$ cross-section are attached on the leading and trailing surfaces. The pitch-to-rib height ratio (p/e) is 1.0. The distance between the tip of the divider and the outer wall of the duct is 1.0 W. The thickness of divider wall is 6.0 mm o. 0.225 $D_h$. The Reynolds number (Re) based on the hydraulic diameter is kept constant at 10,000 and the .elation number (Ro) is varied from 0.0 to 0.2. As duct aspect ratio increases, high friction factor ratios show in overall regions. The reason is that the rib height-to-duct height ratio (e/H) increases, but the divider wall thickness-to-duct width ($t_d/W$) decreases. The rotation of duct produces pressure drop discrepancy between the leading and trailing surfaces. However, the pressure drop discrepancy of the high duct aspect ratio (AR=2.0) is smaller than that of the low duct aspect ratio (AR=0.5) due to the decrement of duct hight (H).

Analysis and Experiments on the Thread Rolling Process for Micro-Sized Screws Part I: Process Parameter Analysis by Finite-Element Simulation (마이크로 체결부품 전조성형공정에 관한 해석 및 실험적 고찰(Part I: 유한요소 해석기반 공정변수 영향분석))

  • Song, J.H.;Lee, J.;Lee, H.J.;Lee, G.A.;Park, K.D.;Ra, S.W.;Lee, H.W.
    • Transactions of Materials Processing
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    • v.20 no.8
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    • pp.581-587
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    • 2011
  • The production of high-precision micro-sized screws, used to fasten parts of micro devices, generally utilizes a cold thread-rolling process and two flat dies to create the teeth. The process is fairly complex, involving parameters such as die shape, die alignment, and other process variables. Thus, up-front finite-element(FE) simulation is often used in the system design procedure. The final goal of this paper is to produce high-precision screw with a diameter of $800{\mu}m$ and a thread pitch of $200{\mu}m$ (M0.8${\times}$P0.2) by a cold thread rolling process. Part I is a first-stage effort, in which FE simulation is used to establish process parameters for thread rolling to produce micro-sized screws with M1.4${\times}$P0.3, which is larger than the ultimate target screw. The material hardening model was first determined through mechanical testing. Numerical simulations were then performed to find the effects of such process parameters as friction between work piece and dies, alignment between dies and material. The final shape and dimensions predicted by simulation were compared with experimental observation.

Non-restraint Master Interface of Minimally Invasive Surgical Robot Using Hand Motion Capture (손동작 영상획득을 이용한 최소침습수술로봇 무구속 마스터 인터페이스)

  • Jang, Ik-Gyu
    • Journal of Biomedical Engineering Research
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    • v.37 no.3
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    • pp.105-111
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    • 2016
  • Introduction: Surgical robot is the alternative instrument that substitutes the difficult and precise surgical operation; should have intuitiveness operationally to transfer natural motions. There are limitations of hand motion derived from contacting mechanical handle in the surgical robot master interface such as mechanical singularity, isotropy, coupling problems. In this paper, we will confirm and verify the feasibility of intuitive Non-restraint master interface which tracking the hand motion using infra-red camera and only 3 reflective markers without the hardware handle for the surgical robot master interface. Materials & methods: We configured S/W and H/W system; arranged 6 infra-red cameras and attached 3 reflective markers on hands for measuring 3 dimensional coordinate then we find the 7 motions of grasp, yaw, pitch, roll, px, py, pz. And we connected Virtual-Master to the slave surgical robot(Laparobot) and observed the feasibility. To verify the result of motion, we compare the result of Non-restraint master and that of clinometer (and protractor) through measuring 0~180 degree, 10degree interval, 1000 samples and recorded standard deviation stands for error rate of the value. Results: We confirmed that the average angle values of Non-restraint master interface is accurately corresponds to the result of clinometer (and protractor) and have low error rates during motion. Investigation & Conclusion: In this paper, we confirmed the feasibility and accuracy of 3D Non-restraint master interface that can offer the intuitive motion of non-contact hardware handle. As a result, we can expect the high intuitiveness, dexterousness of surgical robot.

자화 유도 결합 플라즈마의 산화물 건식 식각 특성에 관한 연구

  • Jeong, Hui-Un;Kim, Hyeok;Lee, U-Hyeon;Kim, Ji-Won;Hwang, Gi-Ung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.230-230
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    • 2013
  • 플라즈마를 활용한 미세 패턴의 건식 식각은 반도체 소자 공정에 있어서 가장 중요한 기술 중 하나이다. 한편, 매년 발행되는 ITRS Roadmap 에 따르면 DRAM 의 1/2 pitch 는 감소하는 동시에 Contact A/R (Aspect Ratio) 는 증가하고 있다. 이러한 추세 속에서 기존의 공정을 그대로 활용할 경우 식각물의 프로파일 왜곡 혹은 휨 현상이 발생하고 식각 속도가 저하되며 이러한 특성들이 결과적으로는 생산성의 저하로 이어질 수 있다. 이러한 현상을 최소화하기 위해서는 무엇보다 독립된 plasma parameter 들이 식각물의 프로파일 혹은 식각 속도 등에 어떠한 영향을 주는 지에 대한 학문적 이해가 필요하다. 본 논문에서는 최소 CD (Critical Dimenstion) 100nm, 최대 A/R 30 인 HARC (High Aspect Ration Contact hole) 의 식각 특성이 plasma parameter 에 따라 어떻게 변하는지 확인해 보고자 한다. 산화물의 식각은 대표적인 high density plasma source 중의 하나인 ICP에서 진행하였으며 기존에 알려진 plasma parameter 에 더하여 자장의 인가가 산화물의 식각 특성에 어떠한 영향을 주는지 살펴보고자 전자석을 ICP 에 추가로 설치하여 실험을 진행하였다. 결과적으로, plasma parameter 에 따른 혹은 자장의 세기 변화에 따른 산화물의 식각 실험을 플라즈마 진단 실험과 병행하여 진행함으로써 다양한 인자에 따른 산화물의 식각 메커니즘을 정확하게 이해하고자 하였다. 실험 내용을 요약하면 다음과 같다. 먼저, 전자석의 전류 인가 조건에 따라 축 방향 혹은 반경 방향으로의 자장의 분포가 달라질 수 있음을 확인하였고 플라즈마 진단 결과 축 방향 혹은 반경 방향으로의 자장이 증가하였을 때 고밀도의 플라즈마가 형성될 수 있음은 물론 반경 방향으로의 플라즈마 밀도의 균일도가 향상됨을 확인할 수 있었다. 또한 ICP 조건에서 바이어스 주파수, 압력, 바이어스 파워, 소스 파워, 가스 유량 등의 plasma parameter 가 산화물의 식각 특성에 미치는 영향 및 메커니즘을 규명하였고 이 과정을 통해 최적화된 프로파일을 바탕으로 축 방향 혹은 반경 방향으로 증가하는 자장을 인가하였을 때 (M-ICP 혹은 자화 유도 결합 플라즈마) ICP 대비 산화물의 식각 속도가 증가함은 물론 PR-to-oxide 의 선택비가 개선될 수 있음을 확인할 수 있었다. 자장의 인가에 따른 산화물의 정확한 식각 메커니즘은 향후의 실험 진행을 통해 이해하고 이를 통해 궁극적으로는 산화물의 식각 공정이 나아가야 할 올바른 방향을 제시하고자 한다.

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