• JSTS:Journal of Semiconductor Technology and Science
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• v.12 no.1
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• pp.34-40
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• 2012

We have developed a highly sensitive inspection technique based on an electron beam inspection for detecting the contact failure of a poly-Si plugged layer. It was difficult to distinguish the contact failure from normal landing plugs with high impedance. Normally, the thermal annealing method has been used to decrease the impedance of poly-Si plugs and this method increases the difference of charged characteristics and voltage contrast. However, the additional process made the loss of time and broke down the device characteristics. Here, the interval scanning method without thermal annealing was effectively applied to enhance the difference of surface voltage between well-contacted poly-Si plugs and incomplete contact plugs. It is extremely useful to detect the contact failures of non-annealed plug contacts with high impedance.

• Journal of the Korean Society for Railway
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• v.10 no.4
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• pp.414-419
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• 2007

The contact characteristics of the current collection system are investigated by analyzing data collected during a test run of the Korean high speed rail vehicle. For the analysis, the signals from accelerometers and load cells attached to the various parts of the pantograph are analyzed in both the time and frequency domains. In the frequency domain, the pantograph response consists of low frequency components related to the rigid-body motion of the panhead assembly and high frequency components due to the structural vibration modes of the pantograph. The analysis shows that the inclusion of the high frequency structural vibration modes of the pantograph in the contact force calculation has a negligible effect on the predicted mean value of the contact force but significantly affects the magnitude of its fluctuations. This finding implies that numerical simulations using lumped element models of the pantograph may accurately predict the mean contact force but is limited in its capacity for predicting the fluctuation about the mean. Since the ratio of the fluctuation to the mean in the contact force increases with increased train speed, the limitation of the predictions based on numerical simulation results becomes more pronounced at higher train speed.

• Proceedings of the Korea Society of Information Technology Applications Conference
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• 2005.11a
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• pp.233-235
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• 2005

Non-contact power supply (NCPS), as a clean and safe energy supply concept has been applying wildly. Comparing with the conventional transformer the non-contact transformer has a large air gap between the long primary winding and the secondary winding. Due to it, the non-contact transformer has increased leakage inductance and reduced magnetizing inductance. So the high frequency series resonant converter has been widly used on the non-contact power supply system for transferring the primary power to the secondary one, from what a high influence voltage can be gained on the secondry coil even though the large air gap exists. However, it still has the disadvantages of the load sensitive voltage gain characteristics when load is changing. In this paper, we propose a fuzzy logic controller to adjust the frequency of the inverter to track the resonat which is changing when the load is change.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.338-341
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• 1997

According to reports, it is impossible to make Ohmic Contact with high resistivity p type CdTe or CdZnTe semiconductor theoretically. But it is in need of making Ohmic Contact to fabricate semiconductor radiation detector By electroless deposition method using gold chloride solution, we made Ohmic Contact of Au and p-Cd$_{80}$Zn$_{20}$Te which grown by High Presure Bridgman Method in Aurora Technologies Corporation. We investigated the interface with Rutherford Backscattering Spectrometry and Auger electron spectroscopy. And we evaluated the degree of Ohmic Contact for the Au/CdZnTe interface by the I/V characteristic curve. As a result, we concluded that it showed excellent Ohmic Contact property by tunneling mechanism through the interface.e.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.5
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• pp.541-549
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• 2008

The dynamic contact between a high-speed wheel and an elastic beam is numerically analyzed by solving the whole equations of motion of the wheel and the beam subjected to the contact condition. For the stability of the numerical solution, the velocity and acceleration constraints as well as the displacement constraint are imposed on the contact point. Through the numerical examples, it is shown that the acceleration contact constraint including the Coriolis and centripetal accelerations are crucial for the numerical stability.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.6
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• pp.662-667
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• 2013

The effect of fluorine ions, which can be reacted with boron in high-doped BPSG, is investigated on the contact sidewall wiggling profile in semiconductor process. In the semiconductor device, there are many contacts on $p^+/n^+$ source and drain region. However these types of wiggling profile is only observed at the $n^+$ contact region. As a result, we find that the type of plug implantation dopant can affect the sidewall wiggling profile of contact. By optimizing the proper fluorine gas flow rate, both the straight sidewall profile and the desired electrical characteristics can be obtained. In this paper, we propose a fundamental approach to improve the contact sidewall wiggling profile phenomena, which mostly appear in high-doped BPSG on next-generation DRAM products.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.6 s.111
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• pp.634-642
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• 2006

For the analysis of dynamic contact between a catenary and a pantograph of high-speed electrical train, the numerical solution of the equations of motion of the vehicle pantograph and the catenary system subjected to the contact condition is obtained. The whole equations of motion of the catenary and the pantograph are simultaneously time integrated with the strict application of the contact condition. For the stability of the numerical solution, with the cubic spline interpolation of the catenary displacement, the velocity and acceleration constraints as well as the displacement constraint are imposed on the contact point. Especially it is shown that the Coriolis and centripetal accelerations are critical for the accuracy and stability of the computation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.788-791
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• 2004

This paper presents a general description of single and dual contact tooling systems, finite element analysis, and discussions on the application of the system to the 5-head router machine which is in particular for aerospace components. This study has been performed as part of the development of the new generation 5-head router machine which is designed for high productivity. Such high productivity in essence requires high speed rotation and multiple spindles in one machine. The high speed rotation may exceed a range in a conventional single contact tooling system. The conventional tooling system is reevaluated in comparison with the dual-contact system. Finite element analysis using simplified spindle models compares major differences in the two systems. Some problems in the application to the 5-head router machine are discussed.

• Journal of the Korean Society for Railway
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• v.8 no.5
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• pp.398-404
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• 2005

In this paper, we introduce the on-line test of the current collection characteristics for HSR 350x(Korea High Speed Train project) that have been performed in the Kyoung-bu high-speed line since 2002. Through the analysis of measured data during on-line test, the variation trend of contact force between pantograph and contact wire of catenary according to the span type, the track conditions and driving patterns is reviewed. In order to analyze the variation trend of contact force, we have checked the span type of catenary in KP 24 - 125 out of Kyoung-bu high speed line and obtained the statistical processing result per each span type. This study shows that the track conditions do not affect on the dynamic performance between pantograph and contact wire catenary, and the span type and the driving pattern are important factors in determining the good interaction between them.

• JSTS:Journal of Semiconductor Technology and Science
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• v.16 no.2
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• pp.210-214
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• 2016

In this paper, the decrease in the contact resistance of Ni germanide/Ge contact was studied as a function of the thickness of the antimony (Sb) interlayer for high performance Ge MOSFETs. Sb layers with various thickness of 2, 5, 8 and 12 nm were deposited by RF-Magnetron sputter on n-type Ge on Si wafers, followed by in situ deposition of 15nm-thick Ni film. The contact resistance of samples with the Sb interlayer was lower than that of the reference sample without the Sb interlayer. We found that the Sb interlayer can lower the contact resistance of Ni germanide/Ge contact but the reduction of contact resistance becomes saturated as the Sb interlayer thickness increases. The proposed method is useful for high performance n-channel Ge MOSFETs.