A Study on Contact Resistance Reduction in Ni Germanide/Ge using Sb Interlayer |
Kim, Jeyoung
(Dep. Electronics Engineering, Chungnam National Univ.)
Li, Meng (Dep. Electronics Engineering, Chungnam National Univ.) Lee, Ga-Won (Dep. Electronics Engineering, Chungnam National Univ.) Oh, Jungwoo (Dep. School of Integrated Technology, Yonsei Univ.) Lee, Hi-Deok (Dep. Electronics Engineering, Chungnam National Univ.) |
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