Interval Scan Inspection Technique for Contact Failure of Advanced DRAM Process using Electron Beam-Inspection System
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Oh, J.H.
(Hynix semiconductor Inc.)
Kwon, G. (Hynix semiconductor Inc.) Mun, D.Y. (Hynix semiconductor Inc.) Kim, D.J. (Hynix semiconductor Inc.) Han, I.K. (Hynix semiconductor Inc.) Yoo, H.W. (Hynix semiconductor Inc.) Jo, J.C. (Hitachi High-Technologies Corp., Central Research Laboratory) Ominami, Y. (Hitachi High-Technologies Corp., Central Research Laboratory) Ninomiya, T. (Hitachi High-Technologies Corp., Central Research Laboratory) Nozoe, M. (Hitachi High-Technologies Corp., Central Research Laboratory) |
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