• 분석과학
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• 제12권6호
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• pp.484-489
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• 1999

화산암중의 미량의 Se을 정량하기 위하여 수소화물발생법에 의한 원자 흡수 분광광도법을 이용하여 Se을 정량하였다. 암석시료를 가압형 시료분해 용기에서 $HNO_3$, $HClO_4$, HF로 분해한 후 테프론 증발접시에 옮겨 가열 농축하였다. 그 후에 KBr과 HCl용액을 가하여 가열해서 시료중의 미량 Se을 4가로 환원시킨후 강환원제인 3% $NaBH_4$용액을 첨가하여 생성된 $H_2Se$를 일정류량의 질소로 gas 추출하여 $KMnO_4$용액중에 2회 반복 흡수시키고 이것을 환원기와 원자 흡수 분광광도법에 의하여 정량하였다. 그 결과 2회 gas 추출함으로써 종래에 측정이 곤란하였던 암석중의 극미량의 Se을 정확하게 정량분석할 수 있었다. 예로 화산암중 류문암석을 선택하여 Se을 6회 정량한 결과 확률수준 95%에 있어서 $19.5{\pm}1.3ng/g$의 정도로 정량되었다.

• 한국대기환경학회지
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• 제29권2호
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• pp.163-170
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• 2013

The fine-particles, moisture and variety of hazardous gases are produced during electronic manufacture process. Most of the fine-particles are 0.1~10 ${\mu}m$ in size and the hazardous gases such as HF, $SiH_4$, CO, $NH_3$, etc. seriously affect environment, human's body and manufacturing process. To remove these characterized gases and fine-particles, Water-Cyclone designed and tested for removal efficiency on fine-particles and $NH_3$ under -980Pa negative pressure condition. As a result, under 0.1~1.0 $m^3/min$ flow condition, the efficiency on 5 ${\mu}m$ particles was 80~96%, 10 ${\mu}m$ particles was 86~96%, and 20 ${\mu}m$ particles was 91~99%. Besides, the removal efficiency on soluble gas $NH_3$ was 56.5% at 0.5m3/min and 79.1% at 1.0m3/min under 500 ppm flow concentration and 70.0% at 1.0 $m^3/min$ under 1,000 ppm flow concentration. Therefore, on particles, as the flow rate and particle size increased, the collection efficiency rate was increased. On soluble gas, as the flow rate increased, the removal efficiency was increased under the same concentration.

• Bulletin of the Korean Chemical Society
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• 제34권6호
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• pp.1625-1631
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• 2013

We report a facile synthetic approach of high-quality chromium(III) terephthalate [MIL-101(Cr)] by acetate-assisted method in the absence of toxic HF. Results indicate that the morphology and surface area of the MIL-101(Cr) can be tuned by modifying the molar ratio of acetate/$Cr(NO_3)_3$. The Brunauer-Emmett-Teller (BET) surface area of MIL-101(Cr) synthesized at the optimized condition can exceed 3300 $m^2/g$. It is confirmed that acetate could promote the dissolution of di-carboxylic linker and accelerate the nucleation ratio. So the pure and small size of MIL-101(Cr) with clean pores can be obtained. $CO_2$, $CH_4$ and $N_2$ adsorption isotherms of the samples are studied at 298 K and 313 K. Compared with the traditional method, MIL-101(Cr) synthesized by acetate-assisted method possess enhanced $CO_2$ selective adsorption capacity. At 1.0 bar 298 K, it exhibits 47% enhanced $CO_2$ adsorption capacity. This may be attributed to the high surface area together with clean pores of MIL-101(Cr).

• 한국세라믹학회지
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• 제40권6호
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• pp.519-524
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• 2003

Porous carbon with high surface area and pore volume was prepared by a reverse replication process and its toluene equilibrium adsorption behavior was investigated. The preparation process of the porous carbon was composed of fellowing sub-processes in series: synthesis and template preparation of silica gel, impregnation and polymerization of DVB monomer in silica template, carbonization of DVB polymer in a silica-polymer composite, and HF-assisted selective etching of silica in carbon-silica composite. The prepared porous carbon was nano porous and had ultrahigh specific surface area (2007 ㎡/g) and large pore volume (3.07 ㎤/g). The nanoporous carbon showed rapid toluene adsorption rate and good toluene adsorption capacity, compared with a commercial Y-type zeolite. In the present study, a reverse replication process to prepare nanoporous carbons will be introduced and its application potential as a gas adsorbent will be discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.293-293
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• 2010

Carbon nanotubes (CNTs) have attracted considerable attention as possible routes to device miniaturization due to their excellent mechanical, thermal, and electronic properties. These properties show great potential for devices such as field emission displays, CNT based transistors, and bio-sensors. The metals such as nickel, cobalt, gold, iron, platinum, and palladium are used as the catalysts for the CNT growth. In this study, diamond-like carbon (DLC) was used for CNT growth as a nonmetallic catalyst layer. DLC films were deposited by a radio frequency (RF) plasma-enhanced chemical vapor deposition (RF-PECVD) method with a mixture of methane and hydrogen gases. CNTs were synthesized by a hot filament plasma-enhanced chemical vapor deposition (HF-PECVD) method with ammonia (NH3) as a pretreatment gas and acetylene (C2H2) as a carbon source gas. The grown CNTs and the pretreated DLC filmswere observed using field emission scanning electron microscopy (FE-SEM) measurement, and the structure of the grown CNTs was analyzed by high resolution transmission scanning electron microscopy (HR-TEM). Also, using energy dispersive spectroscopy (EDS) measurement, we confirmed that only the carbon component remained on the substrate.

• Bulletin of the Korean Chemical Society
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• 제35권2호
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• pp.377-382
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• 2014

Micro-/macroporous carbons (MMCs) were prepared using a hollow mesoporous silica capsule (HMSC) as a sacrificial hard template. The carbonization process after the infiltration of furfuryl alcohol into the template-free HMSC material afforded MMC materials in high yield. The hard template HMSC could be removed by HF etching without deteriorating the structure of MMC. The MMC materials were fully characterized by SEM, TEM, PXRD, XPS, and Raman spectroscopy. The replication processes were so successful that MMCs exhibited a hollow capsular structure with multimodal microporosity. Detailed textural properties of MMC materials were investigated by volumetric $N_2$ adsorption-desorption analysis at 77 K. To explore the gas sorption abilities of MMCs for other gases, $H_2$ and $CO_2$ sorption analyses were also performed at various temperatures. The multimodal MMC materials were found to be good sorbents for both $H_2$ and $CO_2$ at low pressure.

• 한국환경과학회지
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• 제22권7호
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• pp.837-845
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• 2013

This study was designed to synthesize mesoporous carbon, porous carbonic material and to characterize its surface in an attempt to adsorption methane gas($CH_4$). Synthesis of mesoporous carbon was carried out under two steps ; 1. forming a RF-silica complex with a mold using CTMABr, a surfactant, and TEOS, raw material of silica, and 2. eliminating silica through carbonization and HF treatment. The mesoporous carbon was synthesized under various conditions of synthesis time and calcination. Eight different types of mesoporous carbon, which were designated as MC1, MC2, MC3, MC4, MCT1, MCT2, MCT3, and MCT4, were prepared depending upon preparation conditions. The analysis of mesoporous carbon characteristics showed that the calcination of silica stabilized the mixed structure of silica and carbonic complex, and made the particle uniform. The results also showed that hydrothermal synthesis time did not have a strong influence on the size of pore. The bigger specific surface area was obtained as the hydrothermal synthesis time was extended. However, the specific surface area was getting smaller again after a certain period of time. In adsorption experiments, $CH_4$ was used as adsorbate. For the case of $CH_4$, MCT3 showed the highest adsorption efficiency.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.247-248
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• 2008

The etching characteristics of Titanium Nitride (TiN) and etch selectivity of TiN to $SiO_2$ and $HfO_2$ in $CH_4$/Ar plasma were investigated. It was found that TiN etch rate shows a non-monotonic behavior with increasing both Ar fraction in $CH_4$ plasma, RF power, and gas pressure. The maximum TiN etch rate of nm/min was obtained for $CH_4$ (80%)/Ar(20%) gas mixture. The plasmas were characterized using optical emission spectroscopy (OES) analysis measurements. From these data, the suggestions on the TiN etch characteristics were made.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권12호
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• pp.649-653
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• 2000

We have grown carbon nanotubes by thermal chemical vapor deposition of $C_{2}H_{2}$ on catalytic metal deposited on silicon oxide substrates. Highly purified carbon nanotubes are uniformly grown on a large area of the silicon oxide substrates. It is observed that surface modification of catalytic metals deposited on substrates by either etching with dipping in a HF solution and/or $NH_{3}$ pretreatment is a crucial step for the nanotube growth prior to the reaction of $C_{2}H_{2}$ gas. The diameters of carbon naotubes could be controlled by applying the different catalytic metals.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.139.1-139.1
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• 2015

열플라즈마 토치 및 자유연소아크 시스템 개발이 증가함에 따라 실험을 통해 얻기 어려운 물리적 특성들을 파악하기 위해 전산유체역학을 이용한 해석방법이 널리 이용되어 왔다. 대부분의 경우에 해석의 용이성을 위하여 2차원 축대칭으로 가정하여 계산을 수행하지만, 2차원 해석만으로는 실제 물리적인 현상을 정확하게 반영하기 힘들다. 따라서 보다 실질적인 결과를 얻기 위해서는 기존의 2차원 해석방법을 3차원 해석방법으로 변환할 필요성이 있다. 본 논문에서는 3차원 열플라즈마 해석을 위한 첫 단계로써 상용 CFD 프로그램인 ANSYS CFX를 사용하여 동일한 해석모델에 관하여 2차원 해석과 3차원 해석을 수행하였다. 해석방법 및 결과의 타당성을 평가하기 위하여 Schnick-Fuessel 모델 (SF 모델)과 Haddad-Farmer 모델 (HF 모델)을 선정하여 각각의 모델에 대한 해석결과를 문헌에서 발췌한 실험결과 등과 비교하였다. 이러한 결과 비교를 통해서 본 연구에서 적용한 열플라즈마 해석에 관한 수치해석 방법이 충분히 3차원 해석으로 확장 가능함을 확인할 수 있었다.