• 한국정밀공학회지
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• 제22권11호
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• pp.165-172
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• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• 대한기계학회논문집A
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• 제27권11호
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• pp.1840-1848
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• 2003

This paper presents the structural analysis and optimum design of a vertical micro-gyroscope with decoupled 2 degrees of freedom (DOF), driven by electrostatic force. Simplified beam models were presented to derive the structural stiffness of the driving spring of the U shape and the sensing spring of I shape. A finite element analysis (FEA) was performed to validate each derivation. A total mass and a polar mass moment of inertia were also obtained and used in calculating the resonance frequency at each mode of the 2 DOF. The resonance frequencies of the total system were calculated using the proposed models and it has been found that they were in excellent agreement with those of the FEA. Finally, the developed analysis program was then linked to an optimum design module, and an optimum design of the micro-gyroscope was successfully performed.

• 한국통신학회논문지
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• 제40권2호
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• pp.397-407
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• 2015

본 논문에서는 최근 스마트폰이나 웨어러블 디바이스처럼 IoT/M2M 을 위한 여러 종류의 모바일 기기에 사용되는 센서 중에서 각속도를 검출하는데 사용되는 3축 자이로스코프 센서 IC와 가속도를 검출하는데 사용되는 3축 가속도 센서IC를 1 chip으로 하는 6축 관성센서 IC를 설계하였다. 특히 본 논문에는 자이로스코프 센서의 잡음을 분석하고 이를 효과적으로 제거하기 위한 구조를 제안하였다. 자이로스코프 센서는 가속도 센서, 지자기 센서와 더불어 사용자의 동작을 인식하고, 상대적 위치를 추정하기 위한 용도로 사용되는 센서이다. 위치를 추정할 때 사용되는 센서는 아주 작은 잡음이라도 오차로 누적되기 때문에, 정확도를 높이기 위해서 저잡음 IC 설계가 아주 중요한 요소이다. 본 논문에서는 자이로스코프 센서를 모델링하고 MEMS(micro-electro-mechanical system)와 회로에서 발생하는 잡음의 주파수 특성을 분석하여 이를 효과적으로 제거하기 위한 회로 구조를 제안하였으며, 초소형, 저전력 환경에서 사용 가능하면서 잡음 수준이 아주 낮은 3축 자이로스코프 센서와 3축 가속도 센서를 포함하는 6축 1 chip IC를 제작하였다. 제작된 IC는 자이로스코프 센서 잡음의 주요 원인이 되는 quadrature error를 효과적으로 제거하기 위한 회로 구조를 사용하였고, 0.18um CMOS공정을 이용하여 0.01dps/${\sqrt{Hz}}$의 자이로스코프 센서 잡음밀도를 가지는 IC를 제작하였다.

• 제어로봇시스템학회논문지
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• 제15권3호
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• pp.258-264
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• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• 대한기계학회논문집A
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• 제28권8호
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• pp.1065-1074
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• 2004

A robust optimal design considering fabrication influence has been performed for the decoupled vibratory microgyroscope fabricated by the bulk micromachining. For the analysis of the gyroscope, a design tool has been developed, by which user can perform the system level design considering electric signal process and the fabrication influence as well as mechanical characteristics. An initial design of the gyroscope is performed satisfying the performances of scale factor (or sensitivity) and phase delay, which depend on the frequency difference between driving and sensing resonant frequencies. The objective functions are formulated in order to reduce the variances of the frequency difference and the frequency in itself by fabrication error. To certify the results, the standard deviations are calculated through the Monte Caries Simulation (MCS) and compared initial deviation that is measured fabricated gyroscope chip.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1987년도 정기총회 및 창립40주년기념 학술대회 학회본부
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• pp.53-56
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• 1987

Gyroscope is a key sensor for inertial navigation system (INS) which is a navigational instrument necessary to guide and control a free vehicle, and an important instrument for defense, aeronautical, and space industries that is and will be actively involved. In this study, design parameters, scale factor and linearity, of torquer which is one of the components of two degree of freedom dynamically tuned gyroscope (DTG) are presented. The magnetic circuit of torquer is so complicated that it is difficult to analyze it with analytic method. Thus these parameters are calculated by using finite element method with analysis of magnetic vector potential for axisymmetric 3-dimension magnetic field.

• 한국정밀공학회지
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• 제14권2호
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• pp.13-22
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• 1997

Strapdown inertial navigation system(SDINS) is a navigational instruments necessary to guide and con- trol a free vehicle. In this study, an error analysis of mechanical parts is carried out for manufacturing a dynamically tuned gyroscope. The errors usually come from the tolerance in machining and assembly. In the error analysis, a criterion to be considered during designing and manufacturing is proposed by quanti- tatively analyzing the effect of DTG performance by tolerances. The theory of dynamic balancing is deduced and unbalance is reduced through experiment.

• 한국항해학회지
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• 제18권4호
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• pp.171-178
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• 1994

Fiber optic gyroscopes must be a promising technology that can replace conventional mechanical ones based on the principle of inertia of spinning masses. The advantages of fiber optic gyroscopes over mechanical ones include low cost, light weight, compact size and fast turn-on time. We will apply them to fiber optic gyrocompass for ships. Fiber optic gyrocompass for ships requires the north-seeking accuracy of $15^{\circ}$/hr, earth rotation rate, or better. This article introduces the fiber optic gyroscope as rotation sensor in the fiber optic gyrocompass system for ships that is planed to develop in our laboratory.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.272-273
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• 2003

링레이저 자이로스코프(Ring Laser Gyroscope-이하 RLG)는 비행기, 유도무기, 선박, 지상무기 등의 관성항법장치(Inertial Navigation System)에 사용되는 각속도 센서로서 항체의 위치와 자세 정보를 제공하는 핵심 구성품 중의 하나이다. 각속도 검출 원리는 삼각형 또는 사각형의 공진기에 He과 Ne을 혼합한 이득매질을 사용하여 서로 반대방향으로 회전하는 두 개의 레이저 빔을 발생시켜서 Sagnac 효과에 의해 외부의 회전 입력을 받을 때 서로 다른 광 경로의 차이로 인한 두 빔의 간섭으로 회전각을 검출한다. (중략)

• 제어로봇시스템학회논문지
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• 제16권8호
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• pp.810-815
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• 2010

This paper proposes a vision/DR integrated navigation system using distance between wheels of the vehicle and a gyroscope. In order to show the validity of the proposed vision/DR integrated navigation system, experiments were performed for a trajectory of a mobile robot. Experimental results show that the proposed vision/DR integrated navigation system gives better navigation performance than a vision/DR integrated navigation system using only distance between wheels of the vehicle.