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http://dx.doi.org/10.7840/kics.2015.40.2.397

Design of a Low Noise 6-Axis Inertial Sensor IC for Mobile Devices  

Kim, Chang Hyun (School of Electrical & Electronic Engineering Yonsei University)
Chung, Jong-Moon (School of Electrical & Electronic Engineering Yonsei University)
Publication Information
The Journal of Korean Institute of Communications and Information Sciences / v.40, no.2, 2015 , pp. 397-407 More about this Journal
Abstract
In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.
Keywords
inertial sensor IC; gyroscope; low noise; quadrature error; modeling;
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