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http://dx.doi.org/10.3795/KSME-A.2004.28.8.1065

Robust Optimal Design of a Decoupled Vibratory Microgyroscope Considering Fabrication Influence  

Jeong Hee-Moon (삼성종합기술원 전문연구원)
Ha Sung Kyu (한양대학교 기계정보경영공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.28, no.8, 2004 , pp. 1065-1074 More about this Journal
Abstract
A robust optimal design considering fabrication influence has been performed for the decoupled vibratory microgyroscope fabricated by the bulk micromachining. For the analysis of the gyroscope, a design tool has been developed, by which user can perform the system level design considering electric signal process and the fabrication influence as well as mechanical characteristics. An initial design of the gyroscope is performed satisfying the performances of scale factor (or sensitivity) and phase delay, which depend on the frequency difference between driving and sensing resonant frequencies. The objective functions are formulated in order to reduce the variances of the frequency difference and the frequency in itself by fabrication error. To certify the results, the standard deviations are calculated through the Monte Caries Simulation (MCS) and compared initial deviation that is measured fabricated gyroscope chip.
Keywords
MEMS Fabrication Influence; Microgyroscope; Robust Design;
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Times Cited By KSCI : 1  (Citation Analysis)
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