• Transactions on Electrical and Electronic Materials
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• 제4권2호
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• pp.29-34
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• 2003

Ferroelectric YMnO$_3$ thin films were etched with Ar/C1$_2$ and CF$_4$/C1$_2$ Plasma. The maximum etch rate of YMnO$_3$ thin film was 300 $\AA$/min at a Cl$_2$/Ar gas mixing ratio of 8/2, an RF power of 800 W, a do bias of-200 V, a chamber pressure of 15 mTorr, and a substrate temperature of 3$0^{\circ}C$. From the X-ray photoelectron spectroscopy (XPS) analysis, yttrium was not only etched by chemical reactions with Cl atoms, but also assisted by Ar ion bombardments in Ar/C1$_2$ plasma. In CF$_4$/C1$_2$ plasma, yttrium formed nonvolatile YF$_{x}$ compounds and remained on and the etched surface of YMnO$_3$. Manganese etched effectively by forming volatile MnCl$_{x}$ and MnF$_{y}$. From the X-ray diffraction (XRD) analysis, the (0004) diffraction peak intensity of the YMnO$_3$ thin film etched in Ar/Cl$_2$ plasma shows lower than that in CF$_4$/Cl$_2$ plasma. It indicates that the crystallinty of the YMnO$_3$ thin film is more easily damaged by the Af ion bombardment than the changes of stoichiometry due to nonvolatile etch by-products.cts.s.

• 대한기계학회논문집B
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• 제31권6호
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• pp.547-557
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• 2007

This study was conducted to investigate the flow and combustion characteristic of the experimental burner which was manufactured for the reflection of the oven and broil burner features. As slot shape, spacing between slots, and slot arrangement of the exit area which emits the mixing gas are different in case of oven burners and broil turners, the purpose of this study is to know the affection of the flame interaction and combustion characteristic according to the change of shape factors such as slot shape, slot arrangement, and slot-to-slot spacing. With no relation of the slot shape, as the spacing between slots became narrow, the occurrence of a lift-flame was delayed. So the combustion was possible in the leaner region, but the appearance of yellow-tip became a little fast. Slit slot port had the broadest operating range among the other slot shapes. Specially, from the side of lift-flame, as the jet that spreads downstream in the longitudinal slot was nearly circular just a few slot lengths away from the orifice, slot-to-slot spacing of the Slit port was closer than the other ports. These results could be expected through the computer numerical method and had a good agreement. As the spacing between slots increased, in case of Slit and Mix port, NOx emission rate was constant or decreased, but the NOx emission of Hole port was increased. CO emission rate of Slit and Hole port was increased as the slot-to-slot spacing was broadened.

• 한국추진공학회지
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• 제3권3호
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• pp.31-39
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• 1999

OFO, FOF 삼중 충돌형 및 FOOF 이중 분리 충돌형 분무연소장의 3차원 수치해석을 통한 연소성능 예측 및 성능설계 방법에 대하여 고찰하였다. 예조건화 압축성 유동 지배방정식과 저 레이놀즈수 $\kappa$-$\varepsilon$ 2 방정식 난류모델을 바탕으로 LU-SGS 기법을 사용하여 시간적분 하였으며 분무과정은 DSF 방법을 사용하여 모사하였다. n-heptane 액적과 공기를 연료와 산화제로 하는 액체 추진기관 내에서의 분무 연소장을 계산하였으며 연소에서의 난류의 영향은 eddy 소산모델을 사용하여 모사하였다. 분무연소장의 특성과 연소성능이 비교되었으며, 계산 결과 FOF 삼중 충돌형 분사기의 성능이 가장 우수한 반면, OFO 삼중 충돌형 분사기의 성능이 가장 저조한 것으로 나타났다. 연소효율에 중대한 영향을 미치는 파라미터로는 운동량비에 따른 초기 분무 액적의 평균직경과 혼합효율임을 확인하였다. 연소효율은 초기 분무 액적의 평균직경과 반비례, 혼합효율에 비례하여 증가되며, 산화제/연료 혼합비도 비례하여 상승하나, 일정 운동량비 이상에서는 감소되는 것으로 나타났다. 각 분사기 형태에서 운동량비에 따른 연소효율의 변화는 혼합효율의 변화와 동일한 경향을 보이며 그 크기는 분무 액적의 평균직경에 밀접한 관계가 있음을 알 수 있었다.

• 한국광학회지
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• 제5권3호
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• pp.386-393
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• 1994

XeCl 엑시머 레이저를 횡방향의 전자빔으로 여기하여 이의 출력특성을 조사하였다. 전자빔의 출력은 880kV, 21kA(70ns, FWHM)이며 전자빔의 전류밀도는 다이오드(A-K) 간격과 공진기 외부에 설치한 펄스자계코일(4.7kG)로 제어하였다. 레이저 매질에 주입되는 전자빔의 축적에너지는 35J(4기압)이다. 축적에너지는 Radcolor film의 감광면적과 압력상승법에 의해 측정한 가스매질의 상승압력으로부터 환산된 수치이며, 이 때의 여기체적은 $320cm^{3}$이었다. 레이저 가스의 혼합비율은 HCl/Xe/Ar=0.2/6.3/93.5%이고 총압력이 3기압일 때, 최대효율 1.7%를 얻었다. 이 때의 출력에너지, 특성에너지는 각각 0.52J, 1.7J/l이었다. 실험결과의 분석을 위해 컴퓨터 시뮬레이션코드를 완성하였다. 시뮬레이션 결과는 실험결과와 잘 부합하고 있음을 확인하였고 그 결과를 이용하여 XeCl의 형성채널, 완화채널, 308nm의 흡수채널을 이론적으로 설명하였다.

• 한국안전학회지
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• 제32권5호
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• pp.149-156
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• 2017

This study investigates fire-retardant performances and combustion/thermal characteristics of fire-retardant treated wood by comparing them with those of fire-retardant untreated wood from the expreimental resutls of cone calorimeter and thermo-gravimetric(TG) analyzer. Hazardousness of combustion product gases for fire-retardant treated wood and untreasted wood were also observed from the results of internal finish material incombustibility test according to the Korea standard code of KS F 2271. In this study, we also tried to improve the fire retardant performance of wood by applying fire-retardant chemical composites, and to secure the fire safety performance in buildings. Red pine (Pinus densiflora) was selected as a test specimen because it is mostly used as a building material in Korea. Fire retardant chemical composites (FRCs) were prepared by mixing boron, phosphorous, and nitrogen species and treated by press-impregnation method. Water-based FRCs were composed of 3% boric acid($H_3BO_3$), 3% borax decahydrate($Na_2B_4O_7$), 8% ammonium carbonate($(NH_4)_2CO_3$), diammonium phosphate ($(NH_4)_2HPO_4$) varied from 10-30% and potassium carbonate($K_2CO_3$) varied from 10-30%. From the test results of cone calorimeter, TG analysis and gas hazard assessments, newly proposed were the optimal composition and production methods of FRCs which can sufficiently meet fire-retardant level 3 based on Korea law of construction. Thus, the FRCs, developed in this study, are anticipated to contribute to the improvement of fire safety and widespread of usage in wood as building materials.

• 한국전산유체공학회지
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• 제20권4호
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• pp.14-20
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• 2015

Without electirc power to cool down the hot reactor core, passive systems utilizing natural circulation are becoming a big specialty of recent neculear systems after the severe accident in Fukusima. When we consider the natural circulation in a pool, thermal mixing phenomena may start from single phase circulation and can continue to two phase condition. Since the CUPID code, which has been developed for two-phase flow analysis, can deal with the phase transition phenomena, the CUPID would be pertinent to natural convection problems in single- and two-phase conditions. Thus, the CUPID should be validated against single- and two-phase natural circulation phenomena. For the first step of the validation process, this study is focused on the validation of single-phase natural circulation. Moreover, the CUPID code solves the fluid properties by the relationship to pressure and temperature from the steam table considering non-condensable gas effects, so that the effects from variable properties are included. Simple square thermal cavity problems are tested for laminar and turbulent conditions against numerical and experimental data. Throughout the investigation, it is found that the variable properties can affect the flow field in laminar condition, but the effect becomes weak in turbulence condition, and the CUPID code implementing steam table is capable of analyzing single phase natural circualtion phenomena.

• 유기물자원화
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• 제7권2호
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• pp.47-55
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• 1999

최근에 음식물쓰레기의 증가에 따라 폐기불의 처리가 현대사회의 큰 문제로 되었다. 본 연구는 음식물 쓰레기와 하수슬러지 혼합물의 2단 혐기성소화조에 의하여 소화의 가능성을 검토할 목적으로 수행되었다. 음식물쓰레기와 하수슬러지를 1:9의 비율로 하여 파이롯트 2단 소화시스템을 사용하여 현장에서 운전하였으며, 체류기간은 20일로 유지했다. $3.03kg\;TCOD/m^3day$의 유기물 부가에서 COD와 VS 제거효율이 57.7%와 47.7%를 보였으며, 가스 생성율과 메탄의 함량은 $0.4m^3/kg$ vs.day와 65.3%로 나타났다. 이러한 결과로부터 하수슬러지와 음식물쓰레기의 혼합처리가 효과적인 것으로 밝혀 졌다.

• 한국재료학회지
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• 제23권4호
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• pp.246-249
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• 2013

Nano-sized ${\beta}$-SiC nanoparticles were synthesized combined with a sol-gel process and a carbothermal process. TEOS and carbon black were used as starting materials for the silicon source and carbon source, respectively. $SiO_2$ nanoparticles were synthesized using a sol-gel technique (Stober process) combined with hydrolysis and condensation. The size of the particles could be controlled by manipulating the relative rates of the hydrolysis and condensation reactions of tetraethyl orthosilicate (TEOS) within the micro-emulsion. The average particle size and morphology of synthesized silicon dioxide was about 100nm and spherical, respectively. The average particles size and morphology of the used carbon black powders was about 20nm and spherical, respectively. The molar ratio of silicon dioxide and carbon black was fixed to 1:3 in the preparation of each combination. $SiO_2$ and carbon black powders were mixed in ethanol and ball-milled for 12 h. After mixing, the slurries were dried at $80^{\circ}C$ in an oven. The dried powder mixtures were placed in alumina crucibles and synthesized in a tube furnace at $1400{\sim}1500^{\circ}C$ for 4 h with a heating rate of $10^{\circ}C$/min under flowing Ar gas (160 cc/min) and furnace cooling down to room temperature. SiC nanoparticles were characterized by XRD, TEM, and SAED. The XRD results showed that high purity beta silicon carbide with excellent crystallinity was synthesized. TEM revealed that the powders are spherical shape nanoparticles with diameters ranging from 15 to 30 nm with a narrow distribution.

• 한국재료학회지
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• 제13권10호
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• pp.635-639
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• 2003

We investigated dry etching of GaAs and AiGaAs in a high density planar inductively coupled plasma system with BCl$_3$and BCl$_3$/Ar gas chemistry. A detailed etch process study of GaAs and ALGaAs was peformed as functions of ICP source power, RIE chuck power and mixing ratio of $BCl_3$ and Ar. Chamber process pressure was fixed at 7.5 mTorr in this study. The ICP source power and RIE chuck power were varied from 0 to 500 W and from 0 to 150 W, respectively. GaAs etch rate increased with the increase of ICP source power and RIE chuck power. It was also found that etch rates of GaAs in $15BCi_3$/5Ar plasmas were relatively high with applied RIE chuck power compared to pure 20 sccm $BCl_3$plasmas. The result was the same as AlGaAs. We expect that high ion-assisted effect in $BCl_3$/Ar plasma increased etch rates of both materials. The GaAs and AlGaAs features etched at 20 sccm $BCl_3$and $15BCl_3$/5Ar with 300 W ICP source power, 100 W RIE chuck power and 7.5 mTorr showed very smooth surfaces(RMS roughness < 2 nm) and excellent sidewall. XPS study on the surfaces of processed GaAs also proved extremely clean surfaces of the materials after dry etching.

• 한국전기전자재료학회논문지
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• 제16권6호
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• pp.449-453
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• 2003

Ferroelectric YMnO$_3$ thin films were etched with Ar/Cl$_2$ and CF$_4$/Cl$_2$ inductively coupled plasma (ICP). The maximum etch rate of YMnO$_3$ thin film was 300 $\AA$/min at a Ar/Cl$_2$ gas mixing ratio of 2/8, a RF power of 800 W, a DE bias of 200 V, a chamber pressure of 15 mTorr, and a substrate temperature of 30 $^{\circ}C$. From the X-ray photoelectron spectroscopy (XPS) analysis, yttrium etched by chemical reactions with Cl radicals assisted by Ar ion bombardments in Ar/Cl$_2$ plasma. In CF$_4$/Cl$_2$ plasma, yttrium are remained on the etched surface of YMnO$_3$ and formed of nonvolatile YF$_{x}$ compounds manganese etched effectively by chemical reactions with Cl and F radicals. From the X-ray diffraction (XRD) analysis, the (0004) diffraction peak intensity of the YMnO$_3$ thin film etched in Ar/Cl$_2$ plasma shows lower value than that in CF$_4$/Cl$_2$ plasma. It indicates that the crystallinty of YMnO$_3$ thin film is more easily damaged by the Ar ion bombardment than the changes of stoichiometry due to nonvolatile etch by-products.s.