• Title/Summary/Keyword: Fourier 변환적외선 분광분석

Search Result 48, Processing Time 0.03 seconds

Fourier Transform Infrared Spectroscopic Analysis of the Silylated Resist on Silicon Wafers in Semiconductor Lithographic Process (반도체 사진공정에서 실리콘 웨이퍼 위의 Silylated Resist의 Fourier 변환 적외선 분광분석)

  • Kang, Sung Chul;Kim, Su Jong;Son, Min Young;Park, Chun Geun
    • Analytical Science and Technology
    • /
    • v.5 no.4
    • /
    • pp.455-464
    • /
    • 1992
  • Using FT-IR, we determined the depth of silylated layers produced from various gas-phase-silylation conditions was proposed by using Fourier Transform Infrared (FT-IR) spectroscopic analysis. The depth of silylated layer was determined from absorbance measurments of the significant peaks (Si-O-ph, Si-C, Si-H) of FT-IR spectra with background spectrum subtraction method. And the results were compared with thickness measurments of SEM. The results were well agree with SEM. It found to be well suited for determining silylation process window.

  • PDF

Analysis of sampling noise effect of Interferometer on FTIR Spectrometer (FTIR 분광용 간섭계의 샘플링 잡음 영향 분석)

  • Bae, Hyo-Wook;Park, Do-Hyun;Ra, Sung-Woong;Choi, Seung-Ki
    • Journal of the Institute of Electronics Engineers of Korea SD
    • /
    • v.44 no.4
    • /
    • pp.10-17
    • /
    • 2007
  • FTIR(Fourier Transform Infrared) spectrometry is a useful method to obtain infrared spectra of materials in gas phase by registering the interferogram of a target material using an interferometer, and then performing a Fourier transform on the interferogram to obtain the spectrum. In this paper, sampling noise effect on signal processing of the rapid scan interferometer was studied with relation to sampling the interferogram points at the improper location and empirically verified.

Study on the Generation of Leakage Current by the Fourier Transform Infrared Analysis (푸리에변환 적외선분광분석법에 의한 누설전류의 발생 원인에 대한 연구)

  • Oh, Teresa
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.20 no.6
    • /
    • pp.514-519
    • /
    • 2007
  • The surfaces of $SiO_2$ films were treated by PMMA diluted solutions, and analyzed the chemical shift from Fourier Transform Infrared Spectrometer. The $SiO_2$ film treated by PMMA diluted solution changed the properties of the surface, and showed the blue and red shift according to the concentration of PMMA. The C-H bond elongation effect due to the high electro-negative atom chlorine showed the red shift, and makes the final material with the cross-link structure. The leakage current was efficiently reduced at the sample No 7 with the red shift, witch depends on the electron deficient group.

DSC and FTIR Studies of Miscible Poly(butylene 2,6-naphthalate)/Poly(4-vinylphenol) Blends (DSC와 FTIR을 이용한 상용성 (폴리부틸렌나프탈레이트/폴리비닐페놀) 블렌드의 연구)

  • 이준열;한지영
    • Polymer(Korea)
    • /
    • v.26 no.6
    • /
    • pp.737-744
    • /
    • 2002
  • Thermodynamic miscibility of the binary blends composed of semi-crystalline poly (butylene 2,6-naphthalate) (PBN) and amorphous poly (4-vinylphenol) (PVPh) was investigated using differential scanning calorimetry (DSC) and Fourier transform infrared (FTIR) spectroscopy. DSC scan results showed that there was a single glass transition temperature (T$\_$g/) for each blend. Crystalline melting temperature (T$\_$m/) depression of the PBN in the blends was also observed with the increase of PVPh content. Both results of the single T$\_$g/ and the depression of T$\_$m/ for the PBN/PVPh blends indicate that the blends are thermodynamically miscible at the molecular level. FTIR spectroscopic analysis confirmed that strong intermolecular hydrogen bonding interactions between the ester carbonyl groups of the PBN and the hydroxyl groups of the PVPh are occurred.

Development of Lyocell-Based Graphite Fabric for Aerospace (항공우주용 리오셀계 흑연화 직물 개발)

  • Park, Gil-Young;Kim, Nam-Kyu;Kim, Yun-Chul;Seo, Sang-Kyu;Chung, Yong-Sik
    • Journal of the Korean Society of Propulsion Engineers
    • /
    • v.25 no.4
    • /
    • pp.36-42
    • /
    • 2021
  • In this study, the impregnation of Lyocell fabrics was performed using phosphoric acid, ammonium phosphate, diammonium hydrogen, triammonium phosphate as phosphorus flame retardant, to fabricate continuous graphite fabrics using lyocell fiber. The physical and chemical structure changes were investigated by thermogravimetric, Fourier-transform infrared spectroscopy, C-nuclear magnetic resonance, X-ray diffraction, and weight analyses, By analyzing the thermal behavior of phosphorus flame retardant, conditions for the temperature, gas, and residual time of the pyrolysis process were set. Graphite fabrics with a tensile strength of 1,007.19±11.47 N/5 cm and yield of 25.3% were fabricated using continuous pyrolysis, carbonization and graphitization process.

Electrochemical Characteristics of Biosensor using Protected Enzyme Nanoparticles for the Detection of Glucose (나노입자 효소를 이용한 포도당 검출용 바이오센서의 전기화학적 특성)

  • Lee, Keum-Ju;Yun, Dong-Hwa;Jang, Jun-Hyoung;Hong, Suk-In
    • Proceedings of the KIEE Conference
    • /
    • 2007.07a
    • /
    • pp.1536-1537
    • /
    • 2007
  • 본 논문은 당뇨병의 지표 물질인 glucose의 농도를 극미량의 시료를 사용하여 정량할 수 있는 방법을 개발하기 위해 organic/inorganic 네트웍에 의해 안정화된 나노입자 효소를 이용하여 초소형 효소 전극을 개발하였다. 전극은 실리콘 웨이퍼상에 반도체 공정을 이용하여 마이크로 크기의 금 박막 전극을 제작하였다, Organic/Inorganic 물질과 함께 합성된 glucose oxidase 나노입자는 20nm 크기로 투과형 전자현미경 (Transmission Electron Microscope:TEM)으로 관찰하고, 푸리에변환 적외선분광법(Fourier transform infrared spectrophotometer : FTIR) 을 이용하여 분석하였고, 전극 특성을 알아보기 위해 Potentiostat/Galvanostat을 사용하여 전기 화학 실험을 하였다. 제작된 전극은 시간대 전류법으로 glucose의 농도에 따른 감도를 측정하였다. 실험결과에 따라 전극의 표면에서 발생하는 전류는 glucose의 농도에 비례함을 알 수 있었다. 또한 순환 전압전류법을 통하여 감도를 측정하였다.

  • PDF

Simultaneous estimation of fatty acids contents from soybean seeds using fourier transform infrared spectroscopy and gas chromatography by multivariate analysis (적외선 분광스펙트럼 및 기체크로마토그라피 분석 데이터의 다변량 통계분석을 이용한 대두 종자 지방산 함량예측)

  • Ahn, Myung Suk;Ji, Eun Yee;Song, Seung Yeob;Ahn, Joon Woo;Jeong, Won Joong;Min, Sung Ran;Kim, Suk Weon
    • Journal of Plant Biotechnology
    • /
    • v.42 no.1
    • /
    • pp.60-70
    • /
    • 2015
  • The aim of this study was to investigate whether fourier transform infrared (FT-IR) spectroscopy can be applied to simultaneous determination of fatty acids contents in different soybean cultivars. Total 153 lines of soybean (Glycine max Merrill) were examined by FT-IR spectroscopy. Quantification of fatty acids from the soybean lines was confirmed by quantitative gas chromatography (GC) analysis. The quantitative spectral variation among different soybean lines was observed in the amide bond region ($1,700{\sim}1,500cm^{-1}$), phosphodiester groups ($1,500{\sim}1,300cm^{-1}$) and sugar region ($1,200{\sim}1,000cm^{-1}$) of FT-IR spectra. The quantitative prediction modeling of 5 individual fatty acids contents (palmitic acid, stearic acid, oleic acid, linoleic acid, linolenic acid) from soybean lines were established using partial least square regression algorithm from FT-IR spectra. In cross validation, there were high correlations ($R^2{\geq}0.97$) between predicted content of 5 individual fatty acids by PLS regression modeling from FT-IR spectra and measured content by GC. In external validation, palmitic acid ($R^2=0.8002$), oleic acid ($R^2=0.8909$) and linoleic acid ($R^2=0.815$) were predicted with good accuracy, while prediction for stearic acid ($R^2=0.4598$), linolenic acid ($R^2=0.6868$) had relatively lower accuracy. These results clearly show that FT-IR spectra combined with multivariate analysis can be used to accurately predict fatty acids contents in soybean lines. Therefore, we suggest that the PLS prediction system for fatty acid contents using FT-IR analysis could be applied as a rapid and high throughput screening tool for the breeding for modified Fatty acid composition in soybean and contribute to accelerating the conventional breeding.

THE COMPARISON OF POLYMERIZATION OF COMPOSITE RESIN INFLUENCED BY CURING DEPTH AND SHADE (광중합 복합레진의 색상과 깊이에 따른 중합도의 비교)

  • Choi, Kung-Ho;Lee, Ju-Hyun;Park, Ho-Won
    • Journal of the korean academy of Pediatric Dentistry
    • /
    • v.31 no.2
    • /
    • pp.280-289
    • /
    • 2004
  • Adequate polymerization is a crucial factor in obtaining optimal physical properties and clinical performance of resin composite restorative materials. The purpose of this study was to determine the effectiveness of shade and depth on dental composite resin polymerized with plasma arc curing unit employing FTIR and microhardness. From this experiment, the following results were obtained : 1. The light transmission and microhardness by mode 6 in plasma arc curing were similar to by 20 secs in halogen light curing. 2. The experimental groups of A1, A2, A3, A3.5 were not signifcant difference to light transmission and microhardness on surface and 2mm depth, but were significant difference on 3mm and 4mm depth. Especially light transmission and microhardness were small in darker shade and deeper thickness. 3. Compared with depth cure, uncured monomer amount increased at more than 2mm depth. 4. The light transmission by FTIR and polymerization by microhardness were significant corelation.

  • PDF

Fabrication of an Alternating Multilayer Film of Poly(ethylene-alt-maleic anhydride) and Poly(4-vinyl pyridine) by Layer-by-Layer Self-Assembly Method (Layer-by-Layer 자기조립법에 의한 Poly(ethyiene-alt-maleic anhydride)i Poly(4-vinyl pyrtdine) 다층막 제조)

  • Lee Joon Youl;Hong Sook-Young
    • Polymer(Korea)
    • /
    • v.29 no.4
    • /
    • pp.392-398
    • /
    • 2005
  • Self-assembled multilayer thin films of poly(ethylene-alt-maleic anhydride) (PEMAh) and poly(4-vinyl pyridine) (P4VP) were fabricated by layer-by-layer (LbL) sequential adsorption. Fourier transform infrared (FT-IR) spectroscopic analysis of the self-assembled PEMAh/P4VP multilayer films confirms that the driving forces for the multilayer buildup are the intermolecular hydrogen bonding and electrostatic interactions. The linear increase of absorption peak of P4VP at 256 nm with increasing number of PEMAh/P4VP bilayers indicates that the multilayer buildup is an uniform assembling process. We also investigate the effects of polyelectrolyte concenhation variation of the dipping solution and pH variation of the PEMAh solution on the multilayer film formation. Thickness. adsorbed polyelectrolyte mass and surface roughness of the multilayer films were measured by UV-visible spectroscopy, quartz crystal microbalance (QCM), and atomic force microscopy (AFM), respectively.

Study on the Interaction between Depressants Zinc Sulfate and Xanthate on the Flotation of Sphalerite (섬아연석 억제제인 황산아연과 잔세이트의 상호 작용에 관한 연구)

  • KIM, Minkyu;YOU, Kwangsuk
    • Resources Recycling
    • /
    • v.29 no.6
    • /
    • pp.98-103
    • /
    • 2020
  • In this study, the depression behavior of zinc sulfate on the sphalerite with the addition of potassium butyl xanthate was investigated to clear the relationship between zinc sulfate and xanthate in depression of sphalerite. As a result of the experiment, it was confirmed that the depress effect of zinc sulfate on the sphalerite declined with the increase of its addition amount. From the results of SEM-EDS and FT-IR analysis, it was found out that the amorphous precipitate of metal xanthate (Zn-BX) was formed in sphalerite concentrate, when the solubility product of [Zn+]·[BX] in the pulp solution exceeded 3.71×10-11, which is the solubility of Zn-butyl xanthate. It is considered that the Zn-butyl xanthate had a negative effect on the depression of sphalerite.