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http://dx.doi.org/10.4313/JKEM.2007.20.6.514

Study on the Generation of Leakage Current by the Fourier Transform Infrared Analysis  

Oh, Teresa (청주대학교 반도체설계공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.20, no.6, 2007 , pp. 514-519 More about this Journal
Abstract
The surfaces of $SiO_2$ films were treated by PMMA diluted solutions, and analyzed the chemical shift from Fourier Transform Infrared Spectrometer. The $SiO_2$ film treated by PMMA diluted solution changed the properties of the surface, and showed the blue and red shift according to the concentration of PMMA. The C-H bond elongation effect due to the high electro-negative atom chlorine showed the red shift, and makes the final material with the cross-link structure. The leakage current was efficiently reduced at the sample No 7 with the red shift, witch depends on the electron deficient group.
Keywords
PMMA; C=O bond; C=C bond; Si-O bond; Leakage current;
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