• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.172-172
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• 2016

Dual-beam experiments (Focused ion beam - Orientation mapping microstructure, FIB-OIM) is a widely used experimental tool because this experiments tool available alternates between automated serial sectioning and EBSD with the help of dual beams. We investigated the reconstruction procedure for analysis tool which three-dimensional internal microstructure using Ni superalloy(IN100) and ZrO2. As a results, we observed annealing twin boundary each layer in Ni superalloy(IN100) and fairly isotropic internal microstructure in ZrO2 using marching cubes algorithm. According to these results, this procedure is reconstructed well and we gained ability to arrange the EBSD map and internal microstructure.

• Journal of the Korean Vacuum Society
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• v.1 no.2
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• pp.269-276
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• 1992

경계 요소법을 이용하여 Finely-focused ion beam 시스템을 위한 전계형 시뮬레 이터를 개발하였다. 경계 요소법을 시뮬레이터에 적용함으로써 기존의 유한 요소법, 차분근 사법에서는 피할 수 없었던 내부격자망 구성이 불필요하게 됨에 따라 계산속도를 현저히 줄 일 뿐만 아니라 불규칙 경계에 대한 요소분할이 가능하게 되어 최적렌즈구조 설계의 새로운 요소인 전극구조의 모양을 자유롭게 시뮬레이션 할 수 있게 되었다. 또한 개발된 시뮬레이 터를 이용하여 최적조건을 만족하는 구조를 제안한다. 이때 렌즈설계조건은 beam half-angle 3.0 mrad, working distance 50mm, 빔에너지 퍼짐 (beam energy spread) 10eV, 가속에너지 35keV이다.

• Journal of the Korean Applied Science and Technology
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• v.36 no.2
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• pp.434-447
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• 2019

Polyethylene glycol (PEG) is widely used in cosmetics as a surfactant, detergent and emulsifier. During the manufacturing process, 1,4-dioxane, which is toxic to humans, can be produced as a by-product by dimerization of ethylene oxide. As consumers' interest in cosmetic ingredients has increased, the need for safe emulsion research without PEG ingredients in the personal care market has increased. With increasing consumer interest in cosmetic ingredients, the need for safer emulsion research without the PEG ingredient in the personal care market has increased. In this study, we aimed to develop and stabilize nanoemulsion formulation without PEG. Response Surface Methodology (RSM) was used to develop optimized nanoemulsion formulations. Surfactant content (2~4%), oil content (4~8%) and polyol content (12~24%) were set as independent variables as a result of preliminary experiments for determining independent variables and ranges. The particle size, zeta potential, turbidity, and polydispersity index of the formulation were measured as response variables. As a result of measurement of the prepared nanoemulsion by FIB (Focused ion beam), spherical particles were found to have a size distribution of 100 to 200 nm. The stability of each formulation was evaluated for 30 days at each temperature ($4^{\circ}C$, $25^{\circ}C$, and $45^{\circ}C$). The optimal formulation considering the optimum particle size, turbidity, polydispersity index and zeta potential was found to be surfactant (2%), oil (8%) and polyol (24%).

• Design & Manufacturing
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• v.14 no.2
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.105.1-105.1
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• 2016

Many of the complex materials developed today derive their unique properties from the presence of multiple phases or from local variations in elemental concentration. Simply performing analysis of the bulk materials is not sufficient to achieve a true understanding of their physical and chemical natures. Secondary ion mass spectrometer (SIMS) has met with a great deal of success in material characterization. The basis of SIMS is the use of a focused ion beam to erode sample atoms from the selected region. The atoms undergo a charge exchange with their local environment, resulting in their conversion to positive and negative secondary ions. The mass spectrometric analysis of these secondary ions is a robust method capable of identifying elemental distribution from hydrogen to uranium with detectability of the parts per million (ppm) or parts per billion (ppb) in atomic range. Nano secondary ion mass spectrometer (Nano SIMS, Cameca Nano-SIMS 50) equipped with the reactive ion such as a cesium gun and duoplasmatron gun has a spatial resolution of 50 nm which is much smaller than other SIMS. Therefore, Nano SIMS is a very valuable tool to map the spatial distribution of elements on the surface of various materials In this talk, the surface imaging applications of Nano SIMS in KBSI will be presented.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.183.2-183.2
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• 2016

TFT-LCD, OLED 등의 불량 분석을 위해 단면 가공이 필요한 경우 주로 FIB (Focused Ion Beam)를 이용하여 전처리 하고 있으나, 단면 가공을 해야 하는 두께가 두껍거나 분석해야 하는 영역이 넓은 경우 짧게는 수 시간에서 많게는 수십 시간까지 전처리 시간이 소요되는 어려움이 있다. 이러한 시료의 경우, 수 keV로 가속된 이온빔을 조사하여 시료를 시료를 가공하는 이온빔 전처리 장비를 활용하면 전처리 시간 단축 및 FIB 로 분석할 수 없는 넓은 영역에 대한 단면 분석이 가능하다. 본 Poster 에서는 이온빔 전처리 장비를 활용하여 분석한 사례를 소개하고자 한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.27-28
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.595-596
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.533-534
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.535-536
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• 2006