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A study on the fabrication and processing of ultra-precision diamond tools using FIB milling  

Wi, Eun-Chan (Department of Mechanical Convergence Engineering, Induk University)
Jung, Sung-Taek (Department of Mechanical Convergence Engineering, Induk University)
Kim, Hyun-Jeong (Department of Mechanical Convergence Engineering, Induk University)
Song, Ki-Hyeong (IT Converged Process R&D Group, Korea Institute of Industrial Technology)
Choi, Young-Jae (IT Converged Process R&D Group, Korea Institute of Industrial Technology)
Lee, Joo-Hyung (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology)
Baek, Seung-Yup (Department of Mechanical Convergence Engineering, Induk University)
Publication Information
Design & Manufacturing / v.14, no.2, 2020 , pp. 56-61 More about this Journal
Abstract
Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.
Keywords
FIB milling; Diamond tool; Cutting edge width; Sharpness;
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Times Cited By KSCI : 2  (Citation Analysis)
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