A study on the fabrication and processing of ultra-precision diamond tools using FIB milling
![]() |
Wi, Eun-Chan
(Department of Mechanical Convergence Engineering, Induk University)
Jung, Sung-Taek (Department of Mechanical Convergence Engineering, Induk University) Kim, Hyun-Jeong (Department of Mechanical Convergence Engineering, Induk University) Song, Ki-Hyeong (IT Converged Process R&D Group, Korea Institute of Industrial Technology) Choi, Young-Jae (IT Converged Process R&D Group, Korea Institute of Industrial Technology) Lee, Joo-Hyung (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology) Baek, Seung-Yup (Department of Mechanical Convergence Engineering, Induk University) |
1 | Chen, S. T., Tsai, M. Y., Lai, Y. C., & Liu, C. C., "Development of a micro diamond grinding tool by compound process", Journal of Materials Processing Technology, 209(10), pp. 4698-4703, 2009. DOI |
2 | Cheng, J., & Gong, Y. D., "Experimental study on ductile-regime micro-grinding character of soda-lime glass with diamond tool", The International Journal of Advanced Manufacturing Technology, 69(1-4), pp. 147-160, 2013. DOI |
3 | Kawasegi, N., Ozaki, K., Morita, N., Nishimura, K., & Yamaguchi, M., "Development and machining performance of a textured diamond cutting tool fabricated with a focused ion beam and heat treatment", Precision Engineering, 47, pp. 311-320, 2017. DOI |
4 | Choi, W. K., & Baek, S. Y., "Study on Platinum Coating Depth in Focused Ion Beam Diamond Cutting Tool Milling and Methods for Removing Platinum Layer", Materials, 8(9), pp. 6498-6507, 2015. DOI |
5 | Baek, S. Y., Choi, W. K., Choi, Y. J., & Lee, E. S., "Controllability Study of Single-Crystal Diamond Cutting Tool Focus Ion Beam Milling with Different Beam Current and Tilting Angle", In Advanced Materials Research (Vol. 1136, pp. 430-434). Trans Tech Publications Ltd, 2016. DOI |
6 | Baek, S. Y., Chu, J. H., & Jung, S. T., "A Study on Fabrication of Ultra-Precision Diamond Tool and Length Optimization for Improving the Stability", In Key Engineering Materials (Vol. 777, pp. 289-293). Trans Tech Publications Ltd, 2018. DOI |
7 | Hang-Eun Joe, Eun-Goo Kang, Martin B. G. J., "A Review of State of the Art of Electron Beam and Ion Beam Machining", Journal of the Korean Society for Precision Engineering, 35(3), pp. 241-252, 2018. DOI |
8 | Orloff, J., Utlaut, M., Swanson, L., & Wagner, A., "High resolution focused ion beams: FIB and its applications", Physics Today, 57(1), pp. 54-55, 2004. DOI |
![]() |