• Journal of the Semiconductor & Display Technology
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• 제2권2호
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Proceedings of the Korea Concrete Institute Conference
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• 한국콘크리트학회 2000년도 봄 학술발표회 논문집
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• pp.745-750
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• 2000

Steel plate bonding technique is most widely used in strengthening of existing concrete structures, but it has inherently a problem of the premature failure such as interface separation and rip off. So far, many studies have been arid out in the manner of laboratory tests for the reinforced concrete beams to find out he mechanism of the premature failure. However, in order to verify the characteristics of the premature failure, more reasonable local investigations are needed rather than such relatively global experimental works. In this study, therefore, the double lap test which simulate the pure shear loadings and the half beam tests which consider combined flexure-shear force have been done. There are, however, difficulties in getting the normal stress caused to premature failure, so that finite element analysis was performed, too. In numerical study, material nonlinearity was considered, and the interface element was applied to model the interface between steel plate and adhesive. From the results of experimental and numerical studies, a realistic failure criterion on the separation of steel plates has been derived.

• Transactions of the Korean Society of Machine Tool Engineers
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• 제18권2호
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• pp.137-143
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• 2009

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

• Proceedings of the KSME Conference
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1778-1783
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• 2008

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nanometrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

• Proceedings of the Korea Concrete Institute Conference
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• 한국콘크리트학회 2004년도 추계 학술발표회 제16권2호
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• pp.353-356
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• 2004

Nonlinear numerical analysis was performed to investigate the behavioral characteristics and failure mechanism of flexure -dominated structural walls with partially confined boundary elements. Based on the results, deformability of walls with partially confined boundary elements was evaluated, and a design method which can determine depth of confined boundary element according to given ductility demand, was developed. Also, effective details of laterally confining re-bars were proposed for boundary elements with rectangular cross-section. The design method can be used to choose the spacing of confining re-bars assuring the confining effect and constructability.

• Proceedings of the KIEE Conference
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• 대한전기학회 1993년도 하계학술대회 논문집 B
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• pp.1054-1056
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• 1993

The displacement amplifying units(DAUs) of the flexure hinge mechanism are used to amplify the displacements from the Piezo actuators using the principle of a lever. We fabricate for two step DAUs with the SUS304(stainless steel) and experiment them. The fabricated four DAUs have all the hinges aligned to a straight line, and differ in the first step ideal gain($4{\times}10,\;6{\times}10,\;8{\times}10,\;10{\times}10$). We measure the input and the output displacements to get the real amplifying gain. The resonant frequencies of these DAUs are also measured. The experimental results are compared with those of the theoretical formula and with those of the numerical analyses.

• Journal of the Korean Society for Precision Engineering
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• 제21권3호
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• Structural Engineering and Mechanics
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• 제84권2호
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• pp.253-268
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• 2022

Using non-destructive Acoustic Emission (AE) and optical Digital Image Correlation (DIC) methods, the moment-curvature behavior of steel and GFRP bars reinforced concrete beams under flexure was explored in this study. In the tension zone, laboratory studies were carried out on steel-RC and GFRP-RC beams with varying percentages of longitudinal reinforcement ratios of 0.33 %, 0.52%, and 1.11%. The distinct mechanism of cracking initiation and fracture progression of failure in steel-RC and GFRP-RC beams were effectively correlated and picked up using AE waveform characteristics of the number of AE hits and their amplitudes, AE energy as well as average frequency and duration. AE XY event plots and longitudinal strain profiles using DIC gives an online and real-time visual display of progressive AE activity and strains respectively to efficaciously depict the crack evolution and their advancement in steel-RC and GFRP-RC beams. They display a close matching with the micro and macro-cracks visually observed in the actual beams at various stages of loading.

• Journal of the Korean Society for Precision Engineering
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• 제21권12호
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1219-1222
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.