• Title/Summary/Keyword: Equipment Manufacturing Industry

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Abnormal Detection in 3D-NAND Dielectrics Deposition Equipment Using Photo Diagnostic Sensor

  • Kang, Dae Won;Baek, Jae Keun;Hong, Sang Jeen
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.2
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    • pp.74-84
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    • 2022
  • As the semiconductor industry develops, the difficulty of newly required process technology becomes difficult, and the importance of production yield and product reliability increases. As an effort to minimize yield loss in the manufacturing process, interests in the process defect process for facility diagnosis and defect identification are continuously increasing. This research observed the plasma condition changes in the multi oxide/nitride layer deposition (MOLD) process, which is one of the 3D-NAND manufacturing processes through optical emission spectroscopy (OES) and monitored the result of whether the change in plasma characteristics generated in repeated deposition of oxide film and nitride film could directly affect the film. Based on these results, it was confirmed that if a change over a certain period occurs, a change in the plasma characteristics was detected. The change may affect the quality of oxide film, such as the film thickness as well as the interfacial surface roughness when the oxide and nitride thin film deposited by plasma enhenced chemical vapor deposition (PECVD) method.

Recent Studies on Area Selective Atomic Layer Deposition of Elemental Metals (단일 원소 금속의 영역 선택적 원자층 증착법 연구 동향)

  • Min Gyoo Cho;Jae Hee Go;Byung Joon Choi
    • Journal of Powder Materials
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    • v.30 no.2
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    • pp.156-168
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    • 2023
  • The semiconductor industry faces physical limitations due to its top-down manufacturing processes. High cost of EUV equipment, time loss during tens or hundreds of photolithography steps, overlay, etch process errors, and contamination issues owing to photolithography still exist and may become more serious with the miniaturization of semiconductor devices. Therefore, a bottom-up approach is required to overcome these issues. The key technology that enables bottom-up semiconductor manufacturing is area-selective atomic layer deposition (ASALD). Here, various ASALD processes for elemental metals, such as Co, Cu, Ir, Ni, Pt, and Ru, are reviewed. Surface treatments using chemical species, such as self-assembled monolayers and small-molecule inhibitors, to control the hydrophilicity of the surface have been introduced. Finally, we discuss the future applications of metal ASALD processes.

Research Progress on NF3 Substitute Gas of PECVD Chamber Cleaning Process for Carbon Neutrality (반도체·디스플레이 탄소중립을 위한 PECVD 챔버세정용 NF3대체가스 개발연구)

  • Seyun Jo;Sang Jeen Hong
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.4
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    • pp.72-75
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    • 2023
  • Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

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Study of Welding Toughness Characteristics on the Root-pass Welding Process of High Tensile Steel at Tower Production for Offshore Wind Power Generation (해상풍력 발전용 타워 제작시 고장력강재의 초층용접에 관한 용접특성 연구)

  • Jung, Sung-Myoung;Kim, Ill-Soo;Kim, Ji-Sun;Na, Hyun-Ho;Lee, Ji-Hye
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.2
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    • pp.349-353
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    • 2012
  • As the world wind energy market grows rapidly, the productions of wind power generation equipment have recently increased, but manufacturers are not able meet this requirement. Particularly offshore wind energy industry is one of the most popular renewable energy sectors. To generalize welding processes, the welding automation is considered for steel structure manufacturing in offshore wind energy to get high quality and productivity. Welding technology in construction of the wind towers is depended on progress productivity. In addition, the life of wind tower structures should be considered by taking account of the natural weathering and the load it endures. The root passes are typically deposited using Gas Tungsten Arc Welding(GTAW) with a specialized backing gas shield. Not only the validation consists of welders experienced in determining the welding productivity of the baseline welding procedure, but also the standard testing required by the ASME section IX and API1104 codes, toughness testing was performed on the completed field welds. This paper presents the welding characteristics of the root-pass welding of high tensile steel in manufacturing of offshore wind tower. Based on the result from welding experiments, optimal welding conditions were selected after analyzing correlation between welding parameters(peak current, background current and wire feed rate) and back-bead geometry such as back-bead width(mm) and back-bead height performing root-pass welding experiment under various conditions. Furthermore, a response surface approach has been applied to provide an algorithm to predict an optimal welding quality.

Development of Rapid Manufacturing Process by Machining with Automatic Filling (자동 충진 공정을 이용한 쾌속 제작 공정 개발)

  • Shin, B. S.;Yang, D. Y.;Choi, D. S.;Lee, E. S.;Hwang, K. H.
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.7
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    • pp.174-178
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    • 2001
  • In order to reduce the lead-time and cost, recently the technology of rapid protoyping and manufacturing(RPM)has been widely used. Machining process is still considered as one of the effective RPM methods that have been developed and currently available in the industry. It also offers practical advantages such as precision and versatility. Some considerations are still required during the machining process. One of the most important points is fixturing. There should be an effective method of fixturing since the fixturing time depends on the complexity of geometry of the part to be machined. In this paper, the rapid manufacturing process has been developed combining machining with automatic filling. The proposed fixturing technique using automatic filling can be widely applicable to free surface type of product such as a fan. In the filling stage, remeltable material is chosen for the filling process. An automatic set-up device attachable to the table of the machine has also been developed. The device ensures the quality during a series of machining operations. This proposed process has shown to be a useful method to manufacture the required products with the reduced the response-time and cost.

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The Value Chain of Cultural Industry in Gyeongbuk (경북 문화산업의 가치사슬 특성)

  • Choi, Jeong-Su
    • Journal of the Economic Geographical Society of Korea
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    • v.9 no.1
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    • pp.39-60
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    • 2006
  • The value chain is analytically useful for the cultural industry that has the characteristics of both manufacture and service industry, as the focus of value chain analysis moves from manufacturing only to the other stages of activity involved in supplying goods and services to consumers. The aim of paper is to analyse the value chain of the cultural industry in Gyeongbuk, find out the strengths and weaknesses of it, and suggest the ways to enhance the innovation capabilities of cultural industry in Gyeongbuk. First, the firms in advertisement & marketing, and circulation & distribution have low percent in cultural industry and need the low level of human resource, but produce high value-added in value chain; so, we should facilitate the make-up of the firms in advertisement & marketing, and circulation & distribution. Second, we should strengthen inter-firm networks to facilitate the ex-change of the equipment, human resource, information and technology between them. Third, we should construct the system to development human resource with two levels and spread the open atmosphere of firms.

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Analysis of the Operation of Fire Observers in the Domestic Manufacturing Industry - Focusing on the Revised Occupational Safety and Health Act (국내 제조업 화재감시자 운영 실태 분석 - 개정 산업안전보건법 중심)

  • Kyung Min Kim;Yongyoon Suh;Jong Bin Lee;Seong Rok Chang
    • Journal of the Korean Society of Safety
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    • v.38 no.3
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    • pp.77-84
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    • 2023
  • Welding and cutting, which are representative tasks in handling firearms at industrial sites, are the basis for production and maintenance processes across all industries. They are also essential in the root industry. Specifically, they are widely used in the manufacturing industry, including equipment industries such as shipbuilding, automobiles, and chemicals, and subsequent maintenance work and general facility repair. However, such hot work carries a high fire risk owing to sparks scattering and inadequate management, resulting in a high occurrence of accidents. In response, the government and relevant organizations have recently revised the Occupational Safety and Health Act to prevent accidents during hot work. These revisions impose more stringent regulations than before, which are expected to help prevent actual fire accidents. However, whether the fire observer system, which is the core element of the revision, would be practically applied and maintained is unclear. Therefore, this study compared the fire observer system in the revised Occupational Safety and Health Act with those in the laws and systems of developed countries, conducted interviews with safety and health experts to assess the suitability of the new system for fire observer operations, and improvement plans were derived accordingly. Therefore, the laws and systems of developed countries grant more authority to fire observers compared with those of Korea. Moreover, professional training in handling emergency is required. Interviews with safety and health experts revealed that regardless of company size, the same operating standards were applied, and standards for deploying fire observers in various locations were unclear. Furthermore, there was a lack of professional education and training, and the role and authority of fire observers were limited. These findings revealed a problem in this sector. The results of this study are expected to serve as basic data for establishing a practical system for placing fire observers and supplementing laws, guidelines, and systems for preventing fire accidents.

The present status and future aspects of the market for printed electronics (인쇄전자 산업시장의 현황과 전망)

  • Park, Jung-Yong;Park, Jae-Sue
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.17 no.2
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    • pp.263-272
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    • 2013
  • Printed electronics creates electrically functional devices by printing on variety of substrates. Printing typically uses common printing equipment or other low-cost equipment suitable for defining patterns on material, such as screen printing, flexography, gravure, offset lithography and inkjet. Compared to conventional manufacturing of microelectronics, printed electronics is characterized by simpler and more cost-effective fabrication of high and low volume products. Now there is huge effort towards printing many other more functional components, from displays to transistors to photovoltaic cells, using the full range of printing technologies - from inkjet to roll to roll analogue print techniques. The market for printed electronics will rise from $1.99 billion in 2010 to $55.10 billion in 2020. In 2030, this industry could be $300 billion - larger than the silicon semiconductor industry - from lighting to displays[8].

A Decomposition Analysis of FDI Inflow into Korea - Shift-Share Analysis, 2003-2006 - (한국 외국인직접투자 유입요인의 분해분석 - 변이할당분석, 2003-2006 -)

  • Lee, Sanghack;Cheong, Kiwoong;Kim, Jeongsook
    • International Area Studies Review
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    • v.13 no.3
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    • pp.145-161
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    • 2009
  • Applying the shift-share analysis, this paper decomposes FDI inflow into Korea for the period of 2003-2006. The paper finds that Korea has been lagging behind the world average in absorbing inward FDI, thereby recording negative aggregate industry-mix effects and negative aggregate competitive effects as well. However, the following industries have recorded positive competitive effect: electrical and electronic equipment, motor vehicles and other transport equipment, hotels and restaurants, transport, storage and communications, finance, and business services. In a nutshell, Korea is revealed to have competitive advantage in absorbing inward FDI in a few manufacturing industries and most of service industries. Government policies should accordingly be focused on these industries to encourage more inward FDIs.

The Study on the Improvement in Tread Buffing Processing for Recapped Tire for prevention of muscle and skeletal system trouble (근골격계 질환 예방을 위한 재생타이어 트레드 버핑작업 개선에 관한 연구)

  • 김재열;한재호;이연신;김항우;오성민;송경석
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.04a
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    • pp.197-202
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    • 2004
  • As a part of environmental pollution prevention and resources recycling, the regeneration of waste tire has been largely contributed to national industry. But, the worker has been evaded this regeneration process by reason of the best mischievous process condition among 3D industries. So, the first, the process condition of regenerating waste tire was analyzed. The second, the equipment or system was developed for the improvement of working strength and environment. The last, researchers intend to solve these problems

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