• 제목/요약/키워드: Energy dispersive X-ray spectroscopy(EDS)

검색결과 303건 처리시간 1.115초

ZnO 기반 NO2 가스센서의 MgZnO와 MgO을 통한 성능 향상에 대한 연구 (Study on the Performance Improvement of ZnO-based NO2 Gas Sensor through MgZnO and MgO)

  • 박소영;이세형;박찬영;백동기;이문석
    • 센서학회지
    • /
    • 제31권6호
    • /
    • pp.455-460
    • /
    • 2022
  • Brush-like ZnO hierarchical nanostructures decorated with MgxZn1-xO (x = 0.1, 0.2, 0.3, 0.4, and 0.5) were fabricated and examined for application to a gas sensor. They were synthesized using vapor phase growth (VPG) on indium tin oxide (ITO) substrates. To generate electronic accumulation at ZnO surface, MgZnO nanoparticles were prepared by sol-gel method, and the ratio of Mg and Zn was adjusted to optimize the device for NO2 gas detection. As the electrons in the accumulation layer generated by the heterojunction reacted faster and more frequently with the gas, the sensitivity and speed improved. When tested as sensing materials for gas sensors at 100 ppm NO2 at 300℃, these MgZnO decorated ZnO nanostructures exhibited an improvement from 165 to 514 times compared to pristine ZnO. The response and recovery time of the MgZnO decorated ZnO samples were shorter than those of the pristine ZnO. Various analyzing techniques, including field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray powder diffraction (XRD) were employed to confirm the growth morphology, atomic composition, and crystalline information of the samples, respectively.

Electrochemical Behavior of Sm(III) on the Aluminium-Gallium Alloy Electrode in LiCl-KCl Eutectic

  • Ye, Chang-Mei;Jiang, Shi-Lin;Liu, Ya-Lan;Xu, Kai;Yang, Shao-Hua;Chang, Ke-Ke;Ren, Hao;Chai, Zhi-Fang;Shi, Wei-Qun
    • 방사성폐기물학회지
    • /
    • 제19권2호
    • /
    • pp.161-176
    • /
    • 2021
  • In this study, the electrochemical behavior of Sm on the binary liquid Al-Ga cathode in the LiCl-KCl molten salt system is investigated. First, the co-reduction process of Sm(III)-Al(III), Sm(III)-Ga(III), and Sm(III)-Ga(III)-Al(III) on the W electrode (inert) were studied using cyclic voltammetry (CV), square-wave voltammetry (SWV) and open circuit potential (OCP) methods, respectively. It was identified that Sm(III) can be co-reduced with Al(III) or Ga(III) to form AlzSmy or GaxSmy intermetallic compounds. Subsequently, the under-potential deposition of Sm(III) at the Al, Ga, and Al-Ga active cathode was performed to confirm the formation of Sm-based intermetallic compounds. The X-ray diffraction (XRD) and scanning electron microscopy-energy dispersive spectroscopy (SEM-EDS) analyses indicated that Ga3Sm and Ga6Sm intermetallic compounds were formed on the Mo grid electrode (inert) during the potentiostatic electrolysis in LiCl-KCl-SmCl3-AlCl3-GaCl3 melt, while only Ga6Sm intermetallic compound was generated on the Al-Ga alloy electrode during the galvanostatic electrolysis in LiCl-KCl-SmCl3 melt. The electrolysis results revealed that the interaction between Sm and Ga was predominant in the Al-Ga alloy electrode, with Al only acting as an additive to lower the melting point.

BGA 패키지에서 Sn-Ag계 솔더범프와 Ni pad 사이에 형성된 금속간화합물의 분석 (Intermetallic Formation between Sn-Ag based Solder Bump and Ni Pad in BGA Package)

  • 양승택;정윤;김영호
    • 마이크로전자및패키징학회지
    • /
    • 제9권2호
    • /
    • pp.1-9
    • /
    • 2002
  • 실제 BGA패키지에서 Sn-Ag-(Cu) 솔더와 금속패드가 반응하여 생성된 금속간 화합물의 특성을 Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS)f) X-ray Diffractometer (XRD)를 사용하여 분석하였다. EDS로 분석한 결과를 보면 BGA 패키지에서 Sn-Ag-Cu 솔더와 Au/Ni/Cu 금속층간의 반응으로 생성된 금속간화합물은 $(Cu,Ni)_6Sn_5$로 예상되며 . Cu의 편석은 솔더와 Ni 층 사이에서 발견되었다. XRD 분석결과 Cu를 함유하고 있는 Sn-Ag-Cu 솔더와 Ni층 사이에서는 $\eta -Cu_6 Sn_5$ 타입의 금속간화합물이 분석되었으며 Sn-Ag 솔더와 Ni층 사이에서는 $Ni_3$Sn_4$가 분석되었다. 계면에 생성된 금속간화합물은 리플로 회수와솔더내의 Cu의 함량에 따라증가하였다

  • PDF

석면 함유 천장재의 안정화제 희석에 따른 침투깊이 연구 (A Study of Penetration Depth into Ceiling Materials containing Asbestos according to Dilution Rate of Scattering Prevention Agent)

  • 신현규;최용규;전보람;하주연
    • 한국산업보건학회지
    • /
    • 제25권1호
    • /
    • pp.82-88
    • /
    • 2015
  • Objectives: This study is designed to analyze the penetration performance into ceiling materials containing asbestos of scattering prevention agents and investigate the change in penetration depth and viscosity according to the dilution rate of anti-scattering agents diluted with distilled water. Methods: Five different types of scattering prevention agents were spread on plate-type asbestos ceiling materials. The penetration depth of each coated ceiling material was measured by energy dispersive spectroscopy (EDS) analysis, based on X-ray fluorescence (XRF) results of the non-coated ceiling materials. Test equipment installed the ceiling materials and 60 minutes were collected at a flow rate of $10{\ell}/min$ at a filter of 25 mm. Results: An EDS analysis of the cross-section of ceiling materials constructed with a scattering prevention agent revealed that potassium is detected in the process of penetrating hardener solidification and this element could be an indicator for infiltration. When anti-scattering agents with different viscosities were constructed and the penetration depth was analyzed by potassium detection assessment using EDS, the depth results with viscosities of 5.0, 2.5, and 1.9 cP were 98.5, 103, and $147{\mu}m$, respectively. Penetration performance improved with decrease in viscosity. Conclusions: For asbestos ceiling materials, it is concluded that a higher dilution rate of the scattering prevention agent leads to lower viscosity, and hence a deeper penetration depth from $156{\mu}m$ to 3 mm. The asbestos anti-scattering properties according to the penetration depth will be confirmed through further study.

14K 화이트-레드골드의 확산접합 공정에 따른 접합 물성 연구 (Bonding Properties of 14K White-Red Gold Alloy by Diffusion Bonding Process)

  • 송정호;송오성
    • 한국재료학회지
    • /
    • 제27권7호
    • /
    • pp.386-391
    • /
    • 2017
  • Using a customized diffusion bonder, we executed diffusion bonding for ring shaped white gold and red gold samples (inner, outer diameter, and thickness were 15.7, 18.7, and 3.0 mm, respectively) at a temperature of $780^{\circ}C$ and applied pressure of 2300 N in a vacuum of $5{\times}10^{-2}$ torr for 180 seconds. Optical microscopy, field emission scanning electron microscopy (FE-SEM), and energy-dispersive X-ray spectroscopy (EDS) were used to investigate the microstructure and compositional changes. The mechanical properties were confirmed by Vickers hardness and shear strength tests. Optical microscopy and FE-SEM confirmed the uniform bonding interface, which was without defects such as micro pores. EDS mapping analysis confirmed that each gold alloy was 14K with the intended composition; Ni and Cu was included as coloring metals in the white and red gold alloys, respectively. The effective diffusion coefficient was estimated based on EDS line scanning. Individual values of Ni and Cu were $5.0{\times}10^{-8}cm^2/s$ and $8.9{\times}10^{-8}cm^2/s$, respectively. These values were as large as those of the melting points due to the accelerated diffusion in this customized diffusion bonder. Vickers hardness results showed that the hardness values of white gold and red gold were 127.83 and 103.04, respectively, due to solid solution strengthening. In addition, the value at the interface indicated no formation of intermetallic compound around the bonding interface. From the shear strength test, the sample was found not to be destroyed at up to 100,000 gf due to the high bonding strength. Therefore, these results confirm the successful diffusion bonding of 14K white-red golds with a diffusion bonder at a low temperature of $780^{\circ}C$ and a short processing time of 180 seconds.

Influence of inorganic composition and filler particle morphology on the mechanical properties of self-adhesive resin cements

  • Marina Rodrigues Santi ;Rodrigo Barros Esteves Lins;Beatriz Ometto Sahadi;Giovanna Correa Denucci;Gabriela Soffner ;Luis Roberto Marcondes Martins
    • Restorative Dentistry and Endodontics
    • /
    • 제47권3호
    • /
    • pp.32.1-32.11
    • /
    • 2022
  • Objectives: This study aimed to evaluate the influence of inorganic composition and filler particle morphology on the mechanical properties of different self-adhesive resin cements (SARCs). Materials and Methods: Three SARCs including RelyX Unicem-2 (RUN), Maxcem Elite (MAX), and Calibra Universal (CAL) were tested. Rectangular bar-shaped specimens were prepared for flexural strength (FS) and flexural modulus (FM) and determined by a 3-point bending test. The Knoop microhardness (KHN) and top/bottom microhardness ratio (%KHN) were conducted on the top and bottom faces of disc-shaped samples. Sorption (Wsp) and solubility (Wsl) were evaluated after 24 hours of water immersion. Filler morphology was analyzed by scanning electron microscopy and X-ray energy dispersive spectroscopy (EDS). FS, FM, %KHN, Wsp, Wsl, and EDS results were submitted to 1-way analysis of variance and Tukey's post-hoc test, and KHN also to paired t-test (α = 0.05). Results: SARC-CAL presented the highest FS value, and SARC-RUN presented the highest FM. SARC-MAX and RUN showed the lowest Wsp and Wsl values. KHN values decreased from top to bottom and the SARCs did not differ statistically. Also, all resin cements presented carbon, aluminum, and silica in their composition. SARC-MAX and RUN showed irregular and splintered particles while CAL presented small and regular size particles. Conclusions: A higher mechanical strength can be achieved by a reduced spread in grit size and the filler morphology can influence the KHN, as well as photoinitiators in the composition. Wsp and Wsl can be correlated with ions diffusion of inorganic particles.

자동차 부품 Tribology용 인산-망간 화성처리에 있어서 첨가제에 따른 화성피막 특성 (Characterization of Tribology for Automobile Part of Manganese Phosphate Solution with Addition agent)

  • 변영민;박종규;서선교;이지환
    • 한국표면공학회지
    • /
    • 제48권2호
    • /
    • pp.56-61
    • /
    • 2015
  • In this study, the wear performance of manganese phosphate coating on SM45C with addition agent of Tartaric acid and Citric acid were investigated. The Surface morphology of manganese phosphate coating was examined by Scanning Electron Microscope (SEM) and Energy Dispersive X-ray spectroscopy (EDS). It is found that Mn, P, Fe, O and C. The crystal structure and thee composition was analysis and determined by using XRD. The XRD results indicated that manganese phosphate coatings are mainly composed of $(Mn,Fe)_5H_2(PO_4)_44H_2O$ and consists of a lot of close packed lump crystalline. Based on the time dependence of morphology and the weight of manganese phosphate coating, it shows that the phosphating process mainly includes three stages: corrosion of the substrate, creation and growth of phosphate crystal nucleus and thickening of manganese phosphate coating. The wear tests were performed in a ball on disc apparatus as per ASTM G-99 Standard. It was showed that the initial wear was quite high followed by low sludge.

용사법에 의해 제조된 Al/SiC 복합재료의 마모거동 (2) - 작용하중의 영향 - (Wear Behavior of Al/SiC Composites Fabricated by Thermal Spray Process (2) - Effect of Applied Load on Wear Behavior -)

  • 이광진;김균택;김영식
    • Tribology and Lubricants
    • /
    • 제29권5호
    • /
    • pp.298-303
    • /
    • 2013
  • In this work, the effect of applied load on the wear behavior of Al/SiC composites was studied. Al/SiC composites were fabricated following the thermal spray process. Dry sliding wear tests were performed on these composites under four different applied loads, i.e., 5, 10, 15, and 20 N. The wear behaviors of the composites under these applied loads were investigated using scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDS). Under applied loads of up to 15 N, the wear rates of Al/SiC composites decreased with an increase in the applied load because of the formation of an adhesion layer on the worn surface. However in the case of an applied load of 20 N, the wear rate was significantly high because the formation and fracture of the adhesion layer were repeated continuously. These results show that the wear behaviors of the tested composites are significantly influenced owing to the applied loads.

다이아몬드 분말상에 무전해 Ni-B 도금을 위한 계면활성제의 영향 (Effect of Surfactant in Electroless Ni-B Plating for Coating on the Diamond Powder)

  • 양창열;유시영;문환균;이정호;유봉영
    • 한국표면공학회지
    • /
    • 제50권3호
    • /
    • pp.177-182
    • /
    • 2017
  • The properties of electroless Ni-B thin film on diamond powder with different parameters (temperature, pH, surfactant etc.) were studied. The surface morphology, structure and composition distribution of the Ni-B film were observed by field effect scanning electron microscope (FE-SEM), energy-dispersive spectrometer (EDS), X-ray diffraction (XRD) and Auger electron spectroscopy (AES). The growth rate of Ni-B film was increased with increase of bath temperature. The B content in Ni-B film was reduced with increase of bath pH. As a result the structure of Ni-B film was changed from amorphous to crystalline structure. The PVP in solution plays multi-functional roles as a dispersant and a stabilizer. The Ni-B film deposited with adding 0.1 mM-PVP was strongly introduced an amorphous structure with higher B content (25 at.%). Also the crystallite size of Ni-B film was reduced from 12.7 nm to 5.4 nm.

PCDS: 반도체 및 디스플레이 공정 시 실시간 입자 분석 및 모니터링 방법

  • 김득현;김용주;강상우;김태성;이준희
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
    • /
    • pp.70.2-70.2
    • /
    • 2015
  • 현재 반도체 및 디스플레이이 공정 분야는 1 um 이상의 입자에서부터 10 nm이하 크기의 오염입자를 제어해야 한다. 현재 오염원인을 파악하기 위해서 사용하는 방법은 공정 완료 후 대상물(웨이퍼 및 글래스)을 CD-SEM (Critical Dimension Scanning Electron Microscope)와 같은 첨단 분석장비를 사용하여 사후 (Ex-situ) 진행하고 있다. 이러한 방법은 오염원이 이미 공정 대상물을 오염시키고 난 후 그 원인을 분석하는 방법으로 그 원인을 찾기가 어려울 뿐만 아니라, 최근 공정관리가 공정 진행 중(In-situ) 행해져야 하는 추세로 봤을 때 합당한 방법이라 할 수 없다. 이를 해결하기 위해 진공공정 중 레이저를 이용하여 측정하고자 하는 여러 시도들이 있었지만, 여전히 긍정적인 답변을 보여주지 못하고 있다. 본 발표에서 소개하는 PCDS (Particle Characteristic Diagonosis System)은 PBMS (Particle Beam Mass Spectrometer)와 SEM (Scanning Electron Microscope), 그리고 EDS (Energy Dispersive X-ray Spectroscopy)를 통합하여 만든 시스템으로 진공공정 중 (In-situ) 챔버 내부에서 발생하고 있는 입자의 크기 분포, 입자의 형상, 그리고 입자의 성분을 실시간으로 분석할 수 있는 방법을 제공한다. 이러한 방법 (PCDS)에 대한 개념과 원리, 그리고 현재까지 개발된 단계에서 얻어진 결과에 대해 소개할 것이다.

  • PDF