• 전력전자학회:학술대회논문집
• /
• 전력전자학회 2003년도 춘계전력전자학술대회 논문집(2)
• /
• pp.953-956
• /
• 2003

Digital environment that is represented to internet is displacing business way of industry and business achievement way with the fast speed being giving great change on life whole, improve existence business process utilizing internet and Web connection technology, information superhighway to tradition industrialist manufacture and e-transformation's propulsion that wish to maximize productivity and administration efficiency Is spread vigorously. In this paper, we wish to accomplish generation equipment's heighten stability and believability through remote monitoring and control of PV system. This paper describes the design of the monitoring system for sensing the monitoring data and indirect controlling of the PV system. Most of the conventional monitoring system depend on the special hardware and software. Basic design goal of monitoring system is to provide the convenience for the user and the portability for the system. In order for the system to fulfill its requirements, it was designed using Labview GUI facility based on the Windows 2000 environment of IBM PC compatible and Add-on card based on the TCP/IP protocol. Advantage of the monitoring system are a personnel expenses curtailment effect, free of the place restriction and unmanned system of the generation plants, etc..

• 전력전자학회:학술대회논문집
• /
• 전력전자학회 2003년도 추계학술대회 논문집
• /
• pp.252-255
• /
• 2003

Digital environment that is represented to internet is displacing business way of industry and business achievement way with the fast speed being giving great change on life whole, improve existence business process utilizing internet and Web connection technology, information superhighway to tradition industrialist manufacture and e-transformation's propulsion that wish to maximize productivity and administration efficiency is spread vigorously. In this paper, we wish to accomplish generation equipment's heighten stability and believability through remote monitoring and control of BIPV system. This paper describes the design of the monitoring system for sensing the monitoring data and indirect controlling of the BIPV system. Most of the conventional monitoring system depend on the special hardware and software. Basic design goal of monitoring system is to provide the convenience for the user and the portability for the system. In order for the system to fulfill its requirements, it was designed using Labview GUI facility based on the Windows 2000 environment of IBM PC compatible and Add-on card based on the TCP/IP protocol. Advantage of the monitoring system are a personnel expenses curtailment effect, free of the place restriction and unmanned system of the generation plants, etc.

• Transactions on Electrical and Electronic Materials
• /
• 제14권2호
• /
• pp.71-77
• /
• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제11권1호
• /
• pp.1-5
• /
• 2011

To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

• 한국재난정보학회 논문집
• /
• 제10권3호
• /
• pp.374-387
• /
• 2014

성폭력 범죄는 재범의 개연성이 높은 범죄이므로, 이에 대한 대책으로 도입된 것이 전자감독제도이다. 본 제도는 전자장치를 통해 피부착자의 위치를 24시간 파악할 수 있기 때문에 피부착자에게 심리적 정신적 압박감을 주어, 어느 정도는 범죄의 의도를 억제하는데 효과가 있다. 하지만 강력한 의지를 가진 범죄자들의 재범을 막는데 한계가 있다. 현재 연구 중인 차세대 지능형 전자발찌는 전자감독 대상자의 위치정보와 부착센서를 통한 행동 및 신체적 상태 변화 정보를 실시간으로 수집하고 분석한다. 이를 기반으로 범죄 발생의 징후를 사전에 예측하여 범죄의도를 사전에 차단하거나, 실행중인 범죄가 확대되기 전에 중지시키는 데 그 목적이 있다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2001년도 합동 추계학술대회 논문집 정보 및 제어부문
• /
• pp.268-271
• /
• 2001

This paper presents observer-based on-line overload monitoring scheme for a PMSM(Permanent Magnet Synchronous Motor) drive system. Proposed scheme is to monitor overload status of motor drive system at remote place. The drive system is previously installed on main system and has no communication function. Proposed scheme consists of intelligent sensing head and monitoring part. Intelligent sensing head acquire motor 3-Phase currents and transmit data to monitoring part over serial communication interface. Monitoring part estimates motor speed using state observer. By comparing estimated speed with reference speed, we can detect motor fault. In this scheme observed information must coded and transmitted over a digital communication channel with finite capacity. We consider communication constraint as time delay and we design discrete-time observer. The proposed scheme is tested on the actual drive system.

• Journal of information and communication convergence engineering
• /
• 제3권4호
• /
• pp.187-190
• /
• 2005

High aspect ratio via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via-hole, this sophisticated and important process still hold several problems, such as etching stop and loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• 한국전기전자재료학회논문지
• /
• 제21권5호
• /
• pp.397-401
• /
• 2008

Most of the topic in PCB industry was about increasing the volume of product for the development of electronics in numerous industrial application area. However, it has been emerged that yield improvement quality manufacturing via detecting any suspicious process in order to minimize the scrapped product and material waste. In addition, recently, restriction of hazardous substances (RoHS) claims that electronic manufacturing environment should reduce the harmful chemicals usage, thus the importance of monitoring copper etchant and detecting any mis-processing is crucial for electronics manufacturing. In this paper, we have developed real-time chemical monitoring system using RGB sensor, which is simpler but more accurate method than commercially utilized oxidation reduction potential (ORP) technique. The developed Cu etchant monitoring system can further be utilized for copper interconnect process in future nano-semiconductor process.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
• /
• pp.106-110
• /
• 2008

Continuous on-line temperature monitoring allows corrective measures to be taken to prevent upcoming failure. Continuous temperature monitoring and event recording provides information on the energized equipment's response to normal and emergency conditions. On-line temperature monitoring helps to coordinate equipment specifications and ratings, determine the real limits of the monitored equipment and optimize facility operations. Using wireless technique eliminates any need for special cables and wires with lower installation costs if compared to other types of online condition monitoring equipment. In addition, wireless temperature monitoring works well under difficult conditions in strategically important locations. Wireless technology for on-line condition monitoring of energized equipment is applicable both as standalone system and with an interface with power quality monitoring system.

• 한국전자통신학회논문지
• /
• 제9권2호
• /
• pp.261-266
• /
• 2014

국내 보안관제센터들의 현황을 검토하였으며, 보안관제 체계의 특징인 패턴기반 보안관제체계와 중앙집중형 보안관제 체계에 대한 분석과 장단점을 분석하였다. 또한 국내 보안관제 체계 발전방안에서는 기존 패턴 기반의 중앙집중형 관제 체계가 가지고 있는 문제점을 개선하기 위해 이상행위 탐지기반의 허니넷과 다크넷을 분석하여 이를 적용한 발전 방안을 기술하였다.