• 한국생산제조학회지
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• 제20권4호
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• pp.395-400
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• 2011

Scanning Probe Lithography is a method to localized oxidation on single crystal silicon wafer surface. This study demonstrates nanometer scale non contact lithography process on (100) silicon (p-type) wafer surface using AFM(Atomic force microscope) apparatuses and pulse controlling methods. AFM-based experimental apparatuses are connected the DC pulse generator that supplies ultra short pulses between conductive tip and single crystal silicon wafer surface maintaining constant humidity during processes. Then ultra short pulse durations are controlled according to various experimental conditions. Non contact lithography of using ultra short pulse induces electrochemical reaction between micro-scale tip and silicon wafer surface. Various growths of oxides can be created by ultra short pulse non contact lithography modification according to various pulse durations and applied constant humidity environment.

• Journal of Electrochemical Science and Technology
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• 제13권1호
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• pp.1-18
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• 2022

Persistent organic pollutants (POPs) and emerging pollutants (EP) are characterized by their difficulty to be removed through biological oxidation processes (BOPs); they persist in the environment and could have adverse effects on the aquatic ecosystem and human health. The electro-oxidation (EO) process has been successfully used as an alternative technique to oxidize many kinds of the aforementioned pollutants in wastewater. However, the EO process has been criticized for its high energy consumption cost and its potential generation of by-products. In order to decrease these drawbacks, its combination with biological oxidation processes has been reported as a solution to reduce costs and to reach high rates of recalcitrant pollutants removal from wastewaters. Thus, the location of EO in the treatment line is an important decision to make, since this decision affects the formation of by-products and biodegradability enhancement. This paper reviews the advantages and disadvantages of EO as a pre and post-treatment in combination with BOPs. A perspective of the EO scale-up is also presented, where hydrodynamics and the relationship of A/V (area of the electrode/working volume of the electrochemical cell) experiments are examined and discussed.

• 한국전기화학회:학술대회논문집
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• 한국전기화학회 2000년도 춘계총회 및 학술발표회
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• pp.17-17
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• 2000

• Journal of Electrochemical Science and Technology
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• 제11권4호
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• pp.346-351
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• 2020

The removal characteristics of copper (Cu) from electrochemical surface by voltage-activated reaction were reviewed to assess the applicability of electrochemical-mechanical polishing (ECMP) process in three types of electrolytes, such as HNO₃, KNO₃ and NaNO₃. Electrochemical surface conditions such as active, passive, transient and trans-passive states were monitored from its current-voltage (I-V) characteristic curves obtained by linear sweep voltammetry (LSV) method. In addition, the oxidation and reduction process of the Cu surface by repetitive input of positive and negative voltages were evaluated from the I-V curve obtained using the cyclic voltammetry (CV) method. Finally, the X-ray diffraction (XRD) patterns and energy dispersive spectroscopy (EDS) analyses were used to observe the structural surface states of a Cu electrode. The electrochemical analyses proposed in this study will help to accurately control the material removal rate (MRR) from the actual ECMP process because they are a good methodology for predicting optimal electrochemical process parameters such as current density, operating voltage, and operating time before performing the ECMP process.

• 자원리싸이클링
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• 제10권5호
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• pp.22-28
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• 2001

방사성 유기 혼합폐기물의 저온 분해공정인 MEO(Mediated Electrochemical Oxidation) 공정에서 발생하는 폐액으로부터 Ag를 화학적으로 회수하는 연구를 수행하였다. 고농도 질산용액과 함에 존재하는 $AgNO_3$를 HCl과 반응시켜 AgCl 침전물로 회수하였다. 이 때 HCl 최적 반응 당량비는 $AgNO_3$비해 1% 초과하였으며 100% 침전시킬 수 있었다. AgCl은 알카리 분위기에서 과산화수소와 반응시켜 순수 Ag금속으로 환원됨을 알 수 있었고, Ag금속의 환원 반응시 용액의 pH는 12.8~13.0의 범위가 적당하였다.

• 한국전기전자재료학회논문지
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• 제18권6호
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• pp.515-520
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• 2005

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. Also CMP process got into key process for global planarization in the chip manufacturing process. In this study, potentiodynamic polarization was carried out to investigate the influences of $H_2O_2$ concentration and metal oxide formation through the passivation on tungsten and titanium. Fortunately, the electrochemical behaviors of tungsten and titanium are similar, an one may expect. As an experimental result, electrochemical corrosion of the $5\;vol\%\;H_2O_2$ concentration of tungsten and titanium films was higher than the other concentrations. According to the analysis, the oxidation state and microstructure of surface layer were strongly influenced by different oxidizer concentration. Moreover, the oxidation kinetics and resulting chemical state of oxide layer played critical roles in determining the overall CMP performance. Therefore, we conclude that the CMP characteristics tungsten and titanium metal layer including surface roughness were strongly dependent on the amounts of hydrogen peroxide oxidizer.

• 한국표면공학회지
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• 제56권4호
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• pp.250-258
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• 2023

Ceramic oxide layer was formed on the surface of high silicon aluminum alloy by using PEO (plasma electrolytic oxidation) process. The microstructure of the oxide layer was analyzed using scanning electron microscopy (SEM) and x-ray diffraction patterns (XRD). The high silicon aluminum alloy prior to PEO process consists of Al, Si and Al₂Cu phases in XRD analysis, whereas Al₂Cu phase selectively disappeared after PEO treatment. Considerable decrease of relative intensity in most of peaks in XRD results of the high silicon aluminum alloy treated by PEO process was observed. It may be attributed to the formation of amorphous phases after PEO treatment. The corrosion behavior of the high silicon aluminum alloy treated by PEO process was investigated using electrochemical impedance spectroscopy (EIS) and other electrochemical techniques (i.e., open circuit potential and polarization curve). Electroanalytical studies indicated that the high silicon aluminum alloy treated by PEO process shows greater corrosion resistance than that untreated by PEO process.

• 대한화학회지
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• 제15권3호
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• pp.127-132
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• 1971

To obtain the various kinds of inosose stereomers, the process of electrochemical oxidation is more effective than chemical oxidation of myo-inositol. So that myo-inositol aqueous solution was electrolyzed by platinum and lead peroxide anode to confirming the occurrence of electrochemical oxidation. The result is that myo-inosose-2 is producing with high yield comparatively by electrolytic oxidation of myo-inositol. Also we studied about the relation between the electrolytic current efficiency and electrolytic temperature and anodic current density. The current efficiency is rising with lowering of electrolytic temperature identically in both anode such as platinum and lead peroxide and also rising with increasing of anodic current density in platinum anode, but inversely in lead peroxide.

• Membrane and Water Treatment
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• 제9권3호
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• pp.189-194
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• 2018

Electrochemical reduction of nitrate was studied using Zn, Cu and (Ir+Ru)-Ti cathodes and Pt/Ti anode in a cell divided by an ion exchange membrane. During electrolysis, effects of the different cathode types on operating parameters (i.e., voltage, temperature and pH), nitrate removal efficiency and by-products (i.e., nitrite and ammonia) formation were investigated. Ammonia oxidation rate in the presence of NaCl was also determined using the different ratios of hypochlorous acid to ammonia. The operating parameter values were similar for all types of cathode materials and were maintained relatively constant. Nitrate was well reduced and converted mostly to ammonia using Zn and Cu cathodes. Ammonia, produced as a by-product of nitrate reduction, was oxidized in the presence of NaCl in the electrochemical process and the oxidation performance was enhanced upon increasing the hypochlorous acid-to-ammonia ratio to 1.09:1. Zn and Cu cathodes promoted the nitrate reduction to ammonia and the produced ammonia was finally removed from solution by reacting with hypochlorite ions. Using Zn or Cu cathodes, instead of noble metal cathodes, in the electrochemical process can be an alternative technology for nitrate-containing wastewater treatment.

• 전기화학회지
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• 제5권4호
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• pp.221-225
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• 2002

Assisted by the highly sensitive confocal microprobe Raman spectrometer and proper surface roughening procedure, the Raman investigation on the adsorption and reaction of methanol was performed on Pt-Ru electrodes with different coverages. A detailed description of the roughening process of the Pt electrodes and the underpotential deposition of the Ru was given. Reasonably good Raman signal reflecting the metal-carbon vibration and CO vibration was detected. The appearance of vibrations of the Ru oxides, together with the existence of Ru-C, Pt-C and CO bands, clearly demonstrates the participation of the bi-functional mechanism during the oxidation process of methanol on Pt-Ru electrodes. The Pt-Ru electrode was found to have a higher catalytic activity over Pt electrodes. This preliminary study shows that electrochemical Raman spectroscopy can be applied to the study of rough electrode surface.