• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.347-348
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• 2007

On-chip micro humidity sensor, using $CN_x$ films for the sensing material, was designed, simulated, and fabricated with Op amp based readout circuit and diode temperature sensors. To compensate the temperature and other gases, two methods were applied. One is wheatstone-bridge with reference FET that eliminates other undesirable chemical species, and the other is a diode temperature sensor to compensate the temperature effect. $CN_x$ film can be a new humidity sensing material, and has a strong potential to adapt to smart sensors or multi-sensors using MEMS or nano-technology. A particular design technology for integration of sensors and systems together was proposed that whole fabrication process could be achieved by a standard CMOS process.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.52 no.5
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• pp.219-219
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• 2003

This paper described about the acoustic wave measurement method to diagnose GIS for particles. We measured and analyzed the signals of acoustic waves with two type acoustic sensors having 125kHz and 50kHz resonant frequency respectively when the particles were bounced on the inside surfaces of GIS tanks by the electrostatic force. To use two sensors for the diagnosis of GIS, we set up the calibration method for this measurement method. We showed the output characteristics of two sensors according to the sizes and materials of particles in the experiment. As the results, the inception voltages bouncing particles depended on the materials and the extinction voltages bouncing them depended on the sizes and materials. We found out that the relationship between sizes of particles and output voltages of sensors didn′t have linearity but the ratios of between peak values of two sensors depended on the materials of GIS enclosures and the sizes of particles.

• Korean Journal of Optics and Photonics
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• v.21 no.4
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• pp.168-174
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• 2010

Fiber optic current sensors based on polarization-rotated reflection interferometry are demonstrated by incorporating them into polymeric optical waveguide components, including polarization-maintaining 3-dB couplers, TE-pass waveguide polarizers, and thermooptic phase modulators. To remove the bending induced birefringence, optical fiber coil is annealed at $850^{\circ}C$ for 24 hours. The reflection interferometry comprising polymer waveguide devices exhibit a highly stable output signal corresponding to the flowing current.

• Journal of Sensor Science and Technology
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• v.15 no.3
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• pp.199-204
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• 2006

Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide ($NO_{2}$) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to $NO_{2}$. All sensors exhibited a reversible response at a thermal treatment temperature of $130^{\circ}C$ for about 5 minutes. The resistance change to $NO_{2}$ of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.

• Journal of Sensor Science and Technology
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• v.25 no.5
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• pp.310-319
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• 2016

Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of $0.63mV/{\mu}m$ for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of $3{\mu}m/^{\circ}C$ from $20^{\circ}C$ to $30^{\circ}C$, and a monotonic characteristic for the gap between the sensor and the target.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3265-3267
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• 1999

Capacitance-type alcohol gas sensors using porous silicon (PS) layer as sensitive film were fabricated to measure low alcohol gas concentration. Though sensors using porous silicon layer have show high sensitivity by large internal surface area, there is still much room for improvement to measure low breath alcohol concentration especially at room temperature. In this work, to discuss the response properties against exposure to organic vapor for breath alcohol measurements on the basis of experimental results. we measured the variation of the capacitance for the range of 0 to 0.5% alcohol concentration, and observed the improvement of sensitivity by illumination of UV light. In addition, the effect of CO2 and N2 gases involved commonly in exhaling breath was estimated, and the same procedure against methanol vapor was executed to compare qualitatively with the capacitance characteristics by alcohol vapor.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.2
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• pp.93-99
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• 2019

A pressure sensor is a device that converts an applied physical pressure into an electrical signal. Such sensors have a range of applications depending on the pressure level, from low to high pressure. Sensors that use physical pressure, when compared to those operating under air pressure, are not widely applied as they are inefficient. To solve this problem, graphene oxide, which exhibits good mechanical and electrical characteristics, was used to increase the efficiency of these pressure sensors. Graphene oxide has properties that control the movement of charges within the dielectric. Exploiting these properties, we evaluated the change in electrical characteristics when pressure was applied according to the ratio and thickness of the oxidation graph added to the pressure sensor.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.52 no.12
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• pp.649-654
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• 2003

The simplest method for measuring output currents of the three phase inverters is to measure them with three current sensors such as hall sensors. This method requires at least two current sensors, and these types of sensors are somewhat expensive. More economical method is measuring DC link current with a simple shunt resistor, then, reconstructing output current using the DC link current value and the switching status. However, in low speed region, the measurement becomes difficult and even impossible due to the requirement of minimum switching duration for A/D conversion. These problems can be overcome by limitation of switching duration. Limitation of switching, however, causes voltage and current distortion. Owing to compensation, distortion can be effectively suppressed. However these increase acoustic noise due to increment of current ripple. In this paper, a current measurement method is proposed, which can reduce minimum switching duration resulting in reduction of acoustic noise. The validity of proposed method is confirmed through experiment.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.48 no.10
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• pp.1279-1286
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• 1999

In conventional GPS/DR integration schemes, the GPS position (or pseudo-range) information is used in calibrating DR sensors. In those schemes, however, an inaccurate calibration may degrade the position accuracy when the GPS measurement is not available. This paper presents a new integration scheme where the GPS velocity information is used in calibrating DR sensors. Also proposed is a new error model of DR sensors for calibrating the bias error and the tilt error in dynamic environments. The proposed model makes it possible that the errors of both the DR sensor parameters and the velocity are calibrated using the GPS carrier-based velocity(or the pseudo-range rate) measurement while the DR position error is calibrated using the GPS position measurement. Since the DR sensors are calibrated accurately, the positioning accuracy is drastically improved when the GPS measurements are unavailable.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.4
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• pp.317-322
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• 2010

This paper reports the fabrication and characterization of surface micromachined poly 3C-SiC capacitive pressure sensors on silicon wafer operable in touch mode and normal mode for high temperature applications. FEM(finite elements method) simulation has been performed to verify the analytical mode. The sensing capacitor of the capacitive pressure sensor is composed of the upper metal and the poly 3C-SiC layer. Measurements have been performed in a temperature range from $25^{\circ}C$ to $500^{\circ}C$. Fabrication process of designed poly 3C-SiC touch mode capacitive pressure sensor was optimized and would be applicable to capacitive pressure sensors that are required high precision and sensitivity at high pressure and temperature.