• 한국전기전자재료학회논문지
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• 제22권12호
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• pp.1089-1094
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• 2009

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as resistive gas sensors for ethanol ($C_2H_5OH$) detection. Sensor films were fabricated by air spray method for the multi-walled CNTs solution on glass substrates. Sensors were characterized by resistance measurements in the sensing system, in order to find the optimum detection properties for the ethanol gas molecular. The film that was sprayed with the MWCNT dispersion for 60 see, was 300 nm thick. And the electric resistivity is $2{\times}10^{-2}\;{\Omega\cdot}cm$. Also, the sensitivity and the linearity of MWVNT sensor for ethanol gas are 0.389 %/sec and 17.541 %/FS, respectively. The MWCNT film was excellent in the response for the ethanol gas molecules and its reaction speed was very fast, which could be using as ethanol gas sensor. The conductance of the fabricated sensors decreases when the sensors are exposed to ethanol gas.

• 센서학회지
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• 제17권2호
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• pp.143-146
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• 2008

Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases. SAW sensors using five different kinds of polymers were used to detect toxic chemicals and their gas sensing characteristics were investigated. The polymers used as the sensing materials were polyisobutylene(PIB), polyepichlorohydrin(PECH), polydimethylsiloxane(PDMS), polybutadiene(PBD) and polyisoprene(PIP). The recommendable mixing ratio of PIB, PECH, PDMS, PBD and PIP to solvents were 1:30, 1:40, 1:10, 1:30 and 1:30, respectively. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.

• 센서학회지
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• 제16권2호
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• pp.97-103
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• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• 센서학회지
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• 제29권5호
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• pp.279-282
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• 2020

In this study, body pressure was quantitatively detected using built-in optical sensors, inside an air cushion seat. The proposed system visualizes the effect of the body pressure distribution on the air cushion seat. The built-in sensor is based on the time-of-flight (ToF) optical method, instead of the conventional electrical sensor. A ToF optical sensors is attached to the bottom surface of the air-filled cells in the air cushion. Therefore, ToF sensors are durable, as they do not come in physical contact with the body even after repeated use. A ToF sensor indirectly expresses the body pressure by measuring the change in the height of the air-filled cell, after being subjected to the weight of the body. An array of such sensors can measure the body pressure distribution when the user sits on the air cushion seat. We implemented a prototype of the air cushion seat equipped with 7 ToF optical sensors and investigated its characteristics. In this experiment, the ToF optical pressure sensor successfully identified the pressure distribution corresponding to a sitting position. The data were accessed through a mobile device.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 추계학술대회 논문집 학회본부
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• pp.366-370
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• 1990

Generally, when servo system is used, various sensors are required to have comparison and compensation to the reference value. However, the sensors are relatively expensive, and cannot be always implemented because of the limit of space or the environmental conditions. In this paper, state observer systems without sensors are investigated. State observer systems are required to estimate the states quickly and exactly without being affected by the disturbances. Thus, in this paper, the effects of systems poles and observer poles are studies. In addition, the parameter variations are also considered to evaluate the effect of them to the observer based systems. Also, in this paper a whole system which includes compensators, observers and loads are considered and analysed by using numerical simulations.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1422-1424
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• 1994

This paper deals with piezoresistive humidity sensor using polycrystalline silicon (Poly-Si ) with membrane in sensors of semiconductor. Poly-Si piezoresistors which have no temperature dependancy are deposited on silicon wafer, membrane is formed with micromachining technology, then polyimide is formed as a hygroscopic layer. Whereas the principle of conventional humidify sensors are based on the change in electrical properties of the material, the humidity induced volume change of a polyimide layer leads to a deformation of a silicon membrane in this case. This deformation is transformed into an output voltage by Poly-Si piezoresistive. Wheatstone bridge. Fabricated piezoresistive humidity sensors showed good linearity, response time, and long term stability.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.51-54
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• 2020

To develop gas-distinguishing sensor system, it is highly required to integrate multiple sensors for effective detection of a single targeted gas or mixture of gases. In addition, it is important to collect the reliable data from individual sensors into one integrated measuring device. Collecting the data of toxic gases on the spot should be done without inhalation. We suggest simple wirelessly running system for data collection that guarantees both reliability of data sources and safety. Here, we made a multi-gas measuring instrument(device) combined with Bluetooth module which provides a safe and precise big data accumulation system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3331-3333
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• 1999

A novel antistiction method using photo resist is proposed and verified to improve the yield of polysilicon micromachining process. $7.5{\mu}m-thick$ polysilicon is used as a structural layer. Residual stress and stress gradient originated from polysilicon deposition with LPCVD process is relaxed by doping and thermal treatment. The stress gradient of stress-free polysilicon layer is $-0.755MPa/{\mu}m$.

• 센서학회지
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• 제31권6호
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• pp.403-410
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• 2022

Flexible and wearable sensing technologies have emerged as a result of developments in interdisciplinary research across several fields, bringing together various subjects such as biology, physics, chemistry, and information technology. Moreover, various types of flexible wearable biocompatible devices, such customized medical equipment, soft robotics, bio-batteries, and electronic skin patches, have been developed over the last several years that are extensively employed to monitor biological signals. As a result, we present an updated overview of new bio-implantable sensor technologies for various applications and a brief review of the state-of-the-art technologies.

• 센서학회지
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• 제26권1호
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• pp.35-38
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• 2017

A thermally responsive hydrogel has reversibility with temperature during swelling. Here, we proposed origami inspired temperature sensor by using multi-layered hydrogel film. The formation of patterned stripes on microscale film drives bending to an angle that can be controlled linearly. Although temperature range was not wide, measured sensitivity of sensors has high resolution and accuracy. It providing a powerful platform for the design of sensitive sensors and that easily adapt other type of sensors in microscale.