Electrical characteristics of carbon nitride capacitor for micro-humidity sensors |
Kim, Sung-Yeop
(Department of Elcetronic Engineering, Kyungnam University)
Lee, Ji-Gong (Department of Elcetronic Engineering, Kyungnam University) Chang, Choong-Won (Department of Elcetronic Engineering, Kyungnam University) Lee, Sung-Pil (Department of Elcetronic Engineering, Kyungnam University) |
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