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http://dx.doi.org/10.5369/JSST.2007.16.2.097

Electrical characteristics of carbon nitride capacitor for micro-humidity sensors  

Kim, Sung-Yeop (Department of Elcetronic Engineering, Kyungnam University)
Lee, Ji-Gong (Department of Elcetronic Engineering, Kyungnam University)
Chang, Choong-Won (Department of Elcetronic Engineering, Kyungnam University)
Lee, Sung-Pil (Department of Elcetronic Engineering, Kyungnam University)
Publication Information
Journal of Sensor Science and Technology / v.16, no.2, 2007 , pp. 97-103 More about this Journal
Abstract
Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.
Keywords
micro-humidity sensors; carbon nitride films; MIS capacitor; C-V plot;
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1 이성필, S. Chowdhury, '페닝 소스 스퍼터링 장치를 이용한 결정성 질화탄소막의 성장 및 물리적 특성' 센서학회지, 제9권, 제3호, pp. 93-103, 2000
2 J. G. Lee and S. P. Lee, 'Characterization of crystalline carbon nitride films deposited on Si and $Si_3N_4$/Si substrate by RF magnetron sputtering system with DC bias', J. Electroceram., vol. 13, pp. 321, 2004   DOI
3 A. Y. Liu and M. L. Cohen, 'Prediction of new low compressibility solids', Science, vol. 245, pp. 841, 1989   DOI   ScienceOn
4 S. P. Lee and S. Chowdhury, 'Performance of differential field effect transistors with porous gate metal for humidity sensors', J. of the Korean Sensors Society, vol. 8, no. 6, pp. 8-13, 1999
5 J. G. Lee and S. P. Lee, 'Humidity sensing properties of CNx film by RF magnetron sputtering system', Sensors and Actuators B, vol. 108, pp. 450, 2005   DOI   ScienceOn
6 E. H. Nicollian and J. R. Brews, MOS Physics and Technology, John Wiley & Sons, New York, pp. 423-435, 1982
7 S. P. Lee and Y K. Yoon, 'Hygroscopic characteristics of $TiO_{2_x}$ thin film humidity sensors by RF magentron sputter', J. of the Korean Sensors Society, vol. 7, no. 2, pp. 79-83, 1998
8 C. M. Sung and M. Sung, 'Carbon nitride and other speculative superhard materials', Materials Chemistry and Physics, vol. 43, pp. 1, 1996   DOI   ScienceOn
9 D. Marton, K. J. Boyd, and J. W. Rabalais, 'Synthesis of carbon nitride', International Journal of Modern Physics B, vol. 9, no. 27, pp. 3527, 1995   DOI
10 J. G. Lee and S. P. Lee. 'Nano-Structured Carbon Nitride Film for Humidity Sensor Applilcations', J. Korean Phys. Soc. vol. 45, no. 3, pp. 619, 2004