• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.24 no.2
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• pp.27-32
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• 2010

This paper suggests the new performance evaluation system which is suitable for high speed EFEM(Equipment Front End Module) device using a semiconductor process. An EFEM consisting of multi-joint robots is the mainstay of semiconductor automation, shuffling silicon wafers or quartz photo-masks between ultra-clean storage carriers and a variety of processing, measurement and testing systems. The theoretical and experimental studies for the development of performance evaluation system have been carried out. The presented results from the above investigation show considerably developed performance evaluation system for the high speed EFEM Especially, it is efficient for prepareing the WTO/TBT(Technical Barriers to Trade) Agreement and the PL(Product Liability) law.

• Journal of the Korea Society for Simulation
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• v.21 no.2
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• pp.41-50
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• 2012

In this study we first explain details of the semiconductor manufacturing processes and cluster tools. Then we discuss the problems in current fab layout and cluster tool architecture. As a solution to these problems, we propose the ILE (In-Line EFEM) architecture in which wafer movements are conducted through interconnected EFEMs (Equipment Front End Modules) instead of AMHS (Automated Material Handling System). Then we model the pilot ILE system using discrete event simulation and analyze the cycle time. Finally we compare three different scenarios of equipment layout in the ILE system in terms of cycle time.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.20 no.5
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• pp.439-451
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• 2008

Based on reflected and transmitted waves by a single step bottom, a new model of scatterer method is constructed which can be used to calculate wave transformation over a multi-step topography. The approximate results are tested by comparison with the more accurate results obtained from EFEM presented by Kirby and Dalrymple(1983). In the case of plane-wave approximation, solutions of the scatterer method and the EFEM are the same. Results obtained by the scatterer method with non-propagating modes are much better, in terms of phase for the calculated reflection and transmission coefficients, than those by plane-wave approximation. As the effect of non-propagating modes decreases, solutions of the scatterer method become closer to those of the EFEM.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.04a
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• pp.121-121
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• 2014

본 연구에서는 반도체 제조의 Diffusion 공정설비의 FFU (Fan Filter Unit) 진동에 의해 발생한 wafer 불량 현상을 규명 및 개선하였다. EFEM(Equipment Front End Module)의 Loading 부에 장착된 FOUP(Front Opening Unified Pod)에 들어 있는 Wafer 들이 설비 EFEM 하부로 떨어져 깨지거나 FOUP 내에서 겹침 현상이 발생하는 것을 확인하였다. 이에 생산현장의 모든 Diffusion 공정 설비를 조사하였으며, 그 결과 A 사(社)의 특정 설비에서만 발생되는 현상임을 확인하였다. 해당 A사(社)설비군에서만 월 평균 10 건의 Slot Mapping Error 가 발생하였으며, 이로 인해 Wafer가 재 제조된 매수가 월 평균 53 매로 확인되었다. 따라서 본 연구는 A 사(社)설비에서 발생하는 Mapping Error 의 원인 규명 및 개선을 위해 추진되었다. 총 12 개의 항목을 불량 발생 원인 후보 군으로 선정 후 예비 진단한 결과 FFU(Fan Filter Unit)에 의한 문제 발생 가능성이 가장 높을 것으로 추정되었다. 이에 따라 4 개의 서로 다른 물리적 환경/조건에서 진동을 측정하였으며, 최종 평가 결과 Motor 와 Blade 의 불균형에서 기인한 진동이 설비의 loader 부에 직접적으로 영향을 주는 것을 확인하였다. 진동 문제를 해결하기 위해 고 RPM blade 에서 저 RPM 및 유량 감소를 보완할 수 있는 신규모델로 교체하였다. 신규 Module(blade/motor) 장착 후 Load port 에서의 진동 측정 결과 개선 전 대비 91% 감소하였으며, 결과적으로 Slot mapping error 발생 건수가 50% 이상 감소되는 효과와 Wafer 재 제조 매수도 월 평균 약 43% 감소하는 효과를 얻을 수 있었다.

• Geophysics and Geophysical Exploration
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• v.10 no.2
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• pp.154-160
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• 2007

This paper compares the characteristics of three different algorithms for three-dimensional (3D) magnetotelluric (MT) modeling. These methods are developed by Mackie et al. (1994), Sasaki (1999) and Nam et al. (2007). The first and second methods are based on the finite difference method (FDM), while the last one the finite-element method (FEM). MT responses, apparent resistivities and phases, for a COMMEMI 3D-2 model show a good agreement with integral equation solutions and only minor discrepancies are found over the anomalous bodies in the 3D model. The computation time of the two methods based on FDM is short and the static divergence correction contributes to speed up. The FEM modeling scheme is accurate but slow.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.21 no.2
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• pp.117-126
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• 2009

In order to test the accuracy between the modified mild slope equation (MMSE) without evanescent modes and the plane-wave approximation (PA) of eigenfunction expansion method, various numerical results from both models are presented. In this study, analytical solutions of two models are employed, one based on the MMSE derived by Porter (2003) and the other on the scatterer method of PA by Seo (2008a). Judging from direct comparisons against existing results of rapidly varying topography, the PA model gives better predictions of the wave propagation than the MMSE model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.465-466
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• 2012

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.4 no.1
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• pp.1-9
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• 1992

Eigen Function Expansion Method(EFEM) and Plane Wave Approximation are employed to study the propagation of linear water waves over trenches. The properties of trapped waves due to depth and ambient current discontinuities and the effect of evanescent modes on wave propagations are investigated. Special attention is paid to the trapped waves, and not only 3-D plots but also B-D plots of wave propagation are presented.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.3 no.3
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• pp.170-175
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• 1991

In order to calculate reflection coefficients of surface waves due to underwater obstacles, the hybrid boundary integral equation method is used. Numerical results based on the linear element are verified to the exact solutions for a flat bottom. Reflection coefficient and transmission coefficients for a step are compared to Young's results and the results by EFEM (Kirby et al., 1987), in which reflection coefficients decrease to zero as the periods of incident waves decrease. Reflection coefficients for a sinusiodal hump located on a constant depth increase due to the interaction between humps.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.29 no.4B
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• pp.377-384
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• 2009

In order to reduce computing time significantly for a large matrix in EFEM of linear waves propagation over ripple beds, each of which is approximated to a multi-step topography, a partition method is presented to calculate reflection coefficients. By use of 10 evanescent modes in the model, the most accurate numerical solutions have been obtained up to date, which show different behaviors of computed reflection coefficient in some cases against the existing results. Both computing time and memory of the present partition model for solving a large matrix are still so much demanding that it is needed to develop an efficient method.