• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.247-247
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• 2010

DLC(diamond-like carbon)는 비정질 고상 탄소의 하나로 다이아몬드의 유사한 높은 경도, 내마모성, 윤활성, 전기절연성, 화학적 안정성을 가지고 있는 재료이다. 이러한 우수한 특성 때문에 DLC는 박막의 형태로 여러 종류의 보호코팅에 많이 응용되고 있다. DLC의 광범위한 응용에 있어 가장 큰 문제점은 박막이 갖는 높은 잔류응력과 이에 따른 기판과의 낮은 접착성으로 알려져 있다. 최근 연구에 의하면, plasma pre-treatment를 통해 PTFE기판에 DLC박막의 adhesion strength를 증진 시킬 수 있다고 보고하였다. 또한 ion beam technique를 이용하여 잔류응력을 줄이고 기판과의 접착력을 높일 수 있다는 것도 보고 되었다. 이에 기인하여 pre-treatment가 DLC합성에 잔류응력을 낮추고 기판과의 접착성을 높이는 효과를 보일 것이라고 가정하고 연구하였다. 본 연구에서 pre-treatment가 Diamond-like Carbon의 stainless steel 합성시 stress와 adhesion에 어떤 효과가 있는지 알아보기 위해, pre-treatment시와 synthesis of DLC film시에 13.56MHz 150W RF플라즈마 화학기상 증착 (RF-PECVD) 법을 통해 합성되었다. pre-treatment시에 H2(80 sccm), O2(10 sccm), N2(20 sccm)의 가스 종류를 다르게 하였고, synthesis of DLC film시에는 CH4 (20 sccm), H2 (80 sccm)가스의 유량을 고정하였다. 합성된 DLC 박막은 Contact Angle Analyze, Raman spectroscopy, Scratch tester를 이용하여 접촉각, D peak Position, G peak Position, ID/IG ratio, 접착력을 측정하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 춘계학술발표회 논문집
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• pp.262-262
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• 2012

Diamond like carbon(DLC) 박막은 고경도, 초저마찰 특성을 요구하는 마찰분야에 널리 사용되며, 대면적 저가 코팅 방법 개발 및 물성 조절 기술이 요구된다. 본 연구에서는 선형 이온 소스를 통한 DLC 박막의 대면적 코팅 방법은 연구했으며, 방전 주파수 조절에 따른 박막 물성 조절 특성을 분석하였다.

• Tribology and Lubricants
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• 제11권5호
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• pp.59-65
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• 1995

Tribological behaviors of nitrogen incorporated amorphous diamond-like carbon films were experimentally measured under a vacuum ($3 \times 10^{-5}$ Torr) using a ball (AISI 52100 steel)-on-disk wear-rig. Nitrogen incorporated DLC films were deposited by r.f. plasma assisted chemical vapor deposition method. Mixtures of benzene and ammonia or nitrogen gases were used as the reaction gases for the r.f. PACVD, and Si (100) wafer was used as the substrate. In the tribo-test, effects of DLC film thickness and normal load in friction were measured and discussed. Results showed that friction of nitrogen incorporated DLC films from a mixture gas of benzene and ammonia was lower than that of 100% benzene, specially in the measurement of minimum coefficient of friction. Differences in frictional characteristics of nitrogen incorporated DLC films were explained with the changes in chemical structures of the films. Result also showed that friction of DLC films increased with the sliding contact cycle, which remarkably accompanied with roll-shaped wear debris. Mechanisms and roles of the polymer-like wear debris were presented and discussed.

• 한국광학회지
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• 제18권5호
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• pp.362-366
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• 2007

본 연구에서는 3 메가픽셀, 2.5배 줌 카메라폰 모듈용 비구면 유리렌즈 개발을 목적으로 실험계획법(DOE)을 적용하여 성형용 초경 코어의 연삭가공조건을 구하고, 이를 활용하여 비구면 Glass렌즈 성형용 초경합금(WC) 코어를 초정밀 연삭가공을 수행하였다. 또한 가공된 성형용 코어의 가공면 위에 이온증착법으로 다이아몬드상 탄소(Diamond-Like Carbon; DLC) 코팅을 수행하여 DLC 코팅이 성형용 코어의 형상정도(PV)와 표면조도(Ra)에 미치는 영향을 평가하였으며, 비구면 Glass렌즈를 동일한 조건에서 성형하여 성형렌즈의 광학적 특성을 비교하여 성형용 코어면의 DLC 코팅 효과에 대하여 검토하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2006년도 춘계학술대회 논문집
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• pp.109-112
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• 2006

A fluorine-doped diamond-like carbon (F-DLC) stamp which has high contact angle, high UV-transmittance and sufficient hardness, was fabricated using the following direct etching method: F-DLC is deposited on a quartz substrate using DC and RF magnetron sputtering, PMMA is spin coated and patterned using e-beam lithography and finally, $O_2$ plasma etching is performed to transfer the line patterns having 100 nm line width, 100 nm line space and 70 nm line depth on F-DLC. The optimum fluorine concentration was determined after performing several pre-experiments. The stamp was applied successfully to UV-NIL without being coated with an anti-adhesion layer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.145-146
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• 2006

A fluorine-doped diamond-like carbon (F-DLC) stamp which has high contact angle, high UV-transmittance and sufficient hardness, was fabricated using the following direct etching method: F-DLC is deposited on a quartz substrate using DC and RF magnetron sputtering, PMMA is spin coated and patterned using e-beam lithography and finally, O2 plasma etching is performed to transfer the line patterns having 100 nm line width, 100 nm line space and 70 nm line depth on F-DLC. The optimum fluorine concentration was determined after performing several pre-experiments. The stamp was applied successfully to UV-NIL without being coated with an anti-adhesion layer.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2003년도 학술대회지
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• pp.360-367
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• 2003

Diamond-like carbon(DLC) films are considerable research interest because of their widespread applications as protective coatings in areas such as optical windows, magnetic storage disks, car parts, biomedical coatings and as micro-electromechanical devices(MEMs). DLC films were deposited on WC-Co by PECVD using Ar, $C_2H_4$ gas. Tribological tests were conducted using a ball-on-disk type tribometer in dry air. Three kinds of counter-bodies balls were used. The counter-bodies balls are SM45C, SUJ2 and $ZrO_2$(3.17mm in diameter). Wear rate of the samples were calculated after measuring the worn-out volume of the wear track. As results wear test, the higher hardness of counter-bodies, friction coefficient low. As result of XPS estimation, wear debris generated as an oxide lower the friction coefficient.

• 한국자동차공학회논문집
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• 제23권6호
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• pp.656-662
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• 2015

In the present study, multi-layered Si DLC (Silicon Diamond-Like Carbon) coatings with HMDSO (Hexamethyldisiloxane) buffer layers are applied on SKD 11 substrates by PECVD (Plasma Enhanced Chemical Vapor Deposition) with different HMDSO gas flow rates, while the gas flow rate of $C_2H_2$ is fixed to enhance the electric resistivity of forming dies for electrically assisted forming. The HMDSO buffer layer is introduced to increase adhesion between the base metal and Si-DLC layers. The result of evaluation of electric resistivity and adhesion strength shows that the properties are affected by the flow rate of HMDSO, while the flow rate of 80 sccm results in the coating with the highest electric resistivity and adhesion strength among the selected flow rates.

• Tribology and Lubricants
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• 제30권4호
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• pp.199-204
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• 2014

Various heat-treated and surface coating methods are used to mitigate abrasion in sliding machine parts. The most cost effective of these methods involves hard coatings such as diamond-like carbon (DLC). DLC has various advantages, including a high level of hardness, low coefficient of friction, and low wear rate. In practice, a supporting layer is generally inserted between the DLC layer and the steel substrate to improve the load carrying capacity. In this study, an indentation and sliding contact problem involving a small, hard, spherical particle and a DLC-coated steel surface is modeled and analyzed using a nonlinear finite element code, MARC, to investigate the influence of the supporting layer thickness on the coating characteristics and the related coating failure mechanisms. The results show that the amount of plastic deformation and the maximum principal stress decrease with an increase in the supporting layer thickness. However, the probability of the high tensile stress within the coating layer causing a crack is greatly increased. Therefore, in the case of DLC coating with a supporting layer, fatigue wear can be another important cause of coating layer failure, together with the generally well-known abrasive wear.

• 열처리공학회지
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• 제23권2호
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• pp.83-89
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• 2010

Diamond-like carbon (DLC) coating was studied to be a good tribological problem-solver due to its low friction characteristics and high hardness. However, generally hydrogenated DLC film has shown a weak thermal stability above $300^{\circ}C$. However, the silicon doping DLC process by DC pulse plasma enhanced chemical vapor deposition (PECVD) for the new DLC coating which has a good characterization with thermal stability at high temperature itself has been observed. And we were discussed a process for optimizing silicon content to promote a good thermal stability using various tetramethylsilane (TMS) and methane gas at high-temperature. The chemical compositions of silicon-containing DLC film was analyzed using X-ray photoelectron spectroscopy (XPS) before and after heat treatment. Raman spectrum analysis showed the changed structure on the surface after the high-temperature exposure testing. In particular, the hardness of silicon-containing DLC film showed different values before and after the annealing treatment.