Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Thermal Stability of Silicon-containing Diamond-like Carbon Film

실리콘 함유 DLC 박막의 내열특성

  • Kim, Sang-Gweon (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH)) ;
  • Kim, Sung-Wan (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH))
  • 김상권 (한국생산기술연구원 열표면연구부) ;
  • 김성완 (한국생산기술연구원 열표면연구부)
  • Received : 2010.01.27
  • Accepted : 2010.02.11
  • Published : 2010.03.30
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Abstract

Diamond-like carbon (DLC) coating was studied to be a good tribological problem-solver due to its low friction characteristics and high hardness. However, generally hydrogenated DLC film has shown a weak thermal stability above $300^{\circ}C$. However, the silicon doping DLC process by DC pulse plasma enhanced chemical vapor deposition (PECVD) for the new DLC coating which has a good characterization with thermal stability at high temperature itself has been observed. And we were discussed a process for optimizing silicon content to promote a good thermal stability using various tetramethylsilane (TMS) and methane gas at high-temperature. The chemical compositions of silicon-containing DLC film was analyzed using X-ray photoelectron spectroscopy (XPS) before and after heat treatment. Raman spectrum analysis showed the changed structure on the surface after the high-temperature exposure testing. In particular, the hardness of silicon-containing DLC film showed different values before and after the annealing treatment.

Keywords

References

  1. A. C. Ferrari: Dia. and ReI. Mat. 11 (2002) 1053. https://doi.org/10.1016/S0925-9635(01)00730-0
  2. J. Robertson: Mat. Sci. and Eng. R 37 (2002) 127.
  3. M. Saraiva, C. Louro, A. Cavaleiro, and N. J. M. Carvalho: Traite. Therm., 386 (2008) 45.
  4. J. C. Damasceno, and S. S. Camargo Jr. : Thin Solid Films 516 (2008) 1890. https://doi.org/10.1016/j.tsf.2007.10.119
  5. R. L. DeRosa, P. A. Schader and J. E. Shelby: J. of Non-Cry. Sol. 331 (2003) 32. https://doi.org/10.1016/j.jnoncrysol.2003.08.078
  6. S. S. Camargo Jr., A. L. Baia Neto, R. A. Santos, F. L. Freire Jr., R. Carius, and F. Finger: Dia. and ReI. Mat. 7 (1998) 1155. https://doi.org/10.1016/S0925-9635(98)00165-4
  7. S. G. Kim, Y. K. Cho, W. S. Jang and S. W. Kim, N. Saito and O. Takai : J. Kor. Phys. Soc. 54 (2009) 1228. https://doi.org/10.3938/jkps.54.1228
  8. S. G. Kim, N. Saito, N. Otake, S. W. Kim, and O. Takai : J. Jap. Soc. for Heat Treat. 49 (2009) 373.
  9. K. Oguri, and T. Arai : Surf. and Coat. Tech. 47 (1991) 710. https://doi.org/10.1016/0257-8972(91)90344-V
  10. W. -J. Wu, T. -M. Pai, and M. -H. Hon : Dia. and ReI. Mat. 7 (1998) 1478. https://doi.org/10.1016/S0925-9635(98)00213-1

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  1. 실리콘 함유 DLC 박막의 마찰마모 시험에 의한 물리적 특성 및 화학적 결합 구조 변화 고찰 vol.24, pp.3, 2010, https://doi.org/10.12656/jksht.2011.24.3.127