Transactions of the Korean Society of Automotive Engineers (한국자동차공학회논문집)

The Korean Society of Automotive Engineers (한국자동차공학회)
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A Study on the Mechanical Property of Sillicon Diamond-like-carbon Coating for Insulation of Electrically Assisted Forming Die Component

통전성형 금형 부품 절연을 위한 Si-DLC코팅 기계적 특성 연구

  • 김우영 (엠에스오토텍 신기술연구팀) ;
  • 이현우 (엠에스오토텍 신기술연구팀) ;
  • 양대호 (엠에스오토텍 신기술연구팀) ;
  • 홍성태 (울산대학교 기계공학과)
  • Received : 2014.11.11
  • Accepted : 2015.10.14
  • Published : 2015.11.01
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Abstract

In the present study, multi-layered Si DLC (Silicon Diamond-Like Carbon) coatings with HMDSO (Hexamethyldisiloxane) buffer layers are applied on SKD 11 substrates by PECVD (Plasma Enhanced Chemical Vapor Deposition) with different HMDSO gas flow rates, while the gas flow rate of $C_2H_2$ is fixed to enhance the electric resistivity of forming dies for electrically assisted forming. The HMDSO buffer layer is introduced to increase adhesion between the base metal and Si-DLC layers. The result of evaluation of electric resistivity and adhesion strength shows that the properties are affected by the flow rate of HMDSO, while the flow rate of 80 sccm results in the coating with the highest electric resistivity and adhesion strength among the selected flow rates.

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References

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