• Title/Summary/Keyword: Cylindrical chamber

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Dry Etching of GaAs in a Planar Inductively Coupled BCl3 Plasma (BCl3 평판형 유도결합 플라즈마를 이용한 GaAs 건식식각)

  • Lim, Wan-tea;Baek, In-kyoo;Jung, Pil-gu;Lee, Je-won;Cho, Guan-Sik;Lee, Joo-In;Cho, Kuk-San;Pearton, S.J.
    • Korean Journal of Materials Research
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    • v.13 no.4
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    • pp.266-270
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    • 2003
  • We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.

Excess Pore Pressure Induced by Cone Penetration in OC Clay (콘관입으로 인한 과압밀점토의 과잉간극수압의 분포)

  • Kim, Tai-Jun;Kim, Sang-In;Lee, Woo-Jin
    • Journal of the Korean Geotechnical Society
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    • v.22 no.11
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    • pp.75-87
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    • 2006
  • A series of calibration chamber tests are performed to investigate the spatial distribution of the excess porewater pressure due to piezocone penetration into overconsolidated clays. It was observed that the excess porewater pressure increases monotonically from the piezocone surface to the outer boundary of the shear zone and then decreases logarithmically, approaching zero at the outer boundary of the plastic zone. It was also found that the size of the shear zone decreases from approximately 2.2 to 1.5 times the cone radius with increasing OCR, while the plastic radius is about 11 times the piezocone radius, regardless of the OCR. Based on the modified Cam clay model and the cylindrical cavity expansion theory, the expressions to predict the Initial porewater pressure at the piezocone were developed, considering the effects of the strain rate and stress anisotropy. The method of predicting the spatial distribution of excess porewater pressure proposed in this study was verified by comparing it with the porewater pressure measured in overconsolidated specimens in the calibration chamber.

A Study of Swirling Flow in a Cylindrical Tube Port 1, Velocity Profiles (수평 원통관내에서 Swirling Flow의 유동에 관한 연구(I))

  • Medwell, J.O.;Chang, T.H.;Kwon, S.S.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.1 no.4
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    • pp.265-275
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    • 1989
  • An experimental study of decaying swirl air flow has been obtained by tangential inlet in a straight tube with Reynolds number range 20,000~40,000. The friction factor, swirl angle, velocity profiles and turbulent intensity are measured by using micro-manometer and hot-wire anemometer. It is found that the swirl flow behaviors depend on the swirl intensity along the test tube.

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The effect of combustion chamber design and other combustion parameters on the performance of light duty diesel engine (소형 디젤엔진에서 연소실 형상 및 연소관련 주요 인자들이 엔진 성능에 미치는 영향)

  • 이민종;구영곤;장낙영
    • Journal of the korean Society of Automotive Engineers
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    • v.11 no.6
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    • pp.80-88
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    • 1989
  • 본 연구에서는 양산중인 배기량 2.4Liter, 간접분사방식의 소형 디젤엔진에서 연소방식을 직접 분사방식으로 연소계를 재설계하여, 간접분사방식과 직접분사방식에 따른 엔진성능상의 차이점을 비교 평가하고, 아울러 직접분사방식에서 연소실 형상과 연소 관련 주요 인자들의 변경시 엔 진성은에 미치는 영향에 대해 고찰하였다. 직접분사방식 엔진은 간접분사방식 엔진에 대해 동 일출력, 동일 Smoke 수준인 경우 10-15%의 연료소비 저감의 효과가 있고, 이에 따라 연소관련 부품의 열부하면에서도 유리하였으나, 소음 및 NOx 배출은 증가하는 것으로 나타났다. 직접분사 연소방식에서는 Deep Bowl 연소실 형태의 Cylindrical Type 과 Re-entrant Type 에서 연비와 Smoke 등을 고려한 최적 분사시기가 Re-entrant Type 에서 4.deg. CA정도 늦었으며, 각기 최적 분사시기에서 스옴, NOx를 비교한 결과 Re-entrant Type이 더 우수하였다.

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Silent Discharge and Ozone Generation Characteristic of $Al_2O_3$ (아루미나 방전관의 무성방전 및 오존발생특성)

  • Kim, Hag-Gyu;Kwak, Dong-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.908-911
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    • 2002
  • Recently deep interests and attraction have been paid on the generation of ozone, which is widely used to remove bed smell and to clear water. In this paper the silent discharge and ozone generation characteristics of various typed discharge chambers were investigated experimentally. Dielectric of $Al_2O_3$ was embedded in the cylindrical type of discharge chamber to improve the ozone generation rate and to stabilize the silent discharge mode of operation. Discharge current and ozone concentration depend strongly on the applied voltage and frequency.

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A Study on the Flow Friction Loss of a Shrouded Rotating Disk (밀폐된 단일 회전 원판 주위의 유동손실에 관한 연구)

  • 조성욱;임윤철
    • Tribology and Lubricants
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    • v.19 no.5
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    • pp.292-297
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    • 2003
  • The fundamental fluid mechanics associated with the rotation of a smooth plane disk enclosed within a cylindrical chamber have been studied experimentally. In order to acquire systematic information pertinent to this problem torque and friction loss data were obtained over a wide range of disk Reynolds numbers for axial clearance-disk radius ratio H/R from 0.025 to 0.2 and radial tip gap-disk radius ratio s/R from 0.021 to 0.105. Loss analysis of hard disk drive (HDD) is presented to describe the contribution of windage loss of a rotating disk. The minimum loss form factor of HDD can be obtained from this analysis at each operation conditions.

A Numerical Study on Normal and Abnormal Combustion in Hydrogen Premixture (수소 예혼합기의 정상 및 이상연소에 관한 수치해석)

  • 손채훈;정석호
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.8
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    • pp.1989-1998
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    • 1995
  • Characteristics of the flame propagation for normal and abnormal combustion in hydrogen premixture in a cylindrical constant-volume combustion chamber are studied numerically. A detailed hydrogen oxidation kinetic mechanism, mixture transport properties and a model describing spark ignition process are used. The calculated pressure-time history of the stable deflagration wave propagation agrees well with the experiment. The ignition of the premixture in the unburned gas, initiated by the hot spot, causes a transition from deflagration to detonation under some initial temperature and pressure. Under the initial conditions with high temperature and pressure, excessive ignition energy initiates a strong blast wave and a detonation wave that follows. The chemical reaction in the detonation wave is much more vigorous than that in the deflagration wave and the peak pressure in the detonation wave is much higher than the equilibrium value.

Actively controlled sound field on the top edge of noise barriers for railway noise reduction (철도소음 저감 향상을 위한 방음벽 상단의 능동제어장치)

  • Koh Hyo-In;Cho Joon-Ho;Kim Jae-Chul;Lee Chan-Woo;Han Hwan-Su
    • Proceedings of the KSR Conference
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    • 2005.05a
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    • pp.332-337
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    • 2005
  • In this study the sound field on the surface of the top edge of noise barriers is actively minimized to enhance the shielding effect without increasing the hight of the barrier. First the results of a numerical study are shown; the sound field reduction in the far field due to a cylindrical active headpiece attached to a semi-infinite screen and the related control parameters are investigated. The results of a model experiment in an anechoic chamber and optimal control parameters for noise control on the railway side are shown and discussed.

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Identification, Growth and Pathogenicity of Colletotrichum boninense Causing Leaf Anthracnose on Japanese Spindle Tree

  • Lee, Hyang-Burm;Park, Jae-Young;Jung, Hack-Sung
    • The Plant Pathology Journal
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    • v.21 no.1
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    • pp.27-32
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    • 2005
  • Leaf anthracnose was observed on leaves of Japanese spindle tree in Seoul, Korea from autumn 2003 to spring 2004. The causal fungus was purely isolated from he leaf spot lesions and cultured on PDA. The colony on PDA was cream to orange but blackish in the center n old cultures. Conidia were formed in blackish orange asses and were cylindrical in shape, measured 13-17${\times}$5-7 ${\mu}$m in size. Blackish brown setae were often observed on PDA and ranged up to 100 ${\mu}$m in length. Based on morphological and ITS region sequence analyses, the fungal strain was identified as Colletotrichum boninense. Koch’s postulates were fulfilled by inoculating tree leaves with 1 ${\times}$ $106^6$ conidia per ml in a moist chamber. This is the first study on the pathogenicity, growth and phylogenetic characteristics of C. boninense causing leaf anthracnose on Japanese spindle tree in Korea.

A study on the flow friction loss of a shrouded rotating disk (밀폐된 단일 회전 원판 주위의 유동손실에 관한 연구)

  • 조성욱;임윤철
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.11a
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    • pp.159-165
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    • 2001
  • The fundamental fluid mechanics associated with the rotation of a smooth plane disk enclosed within a cylindrical chamber have been studied experimentally. In order to acquire systematic information pertinent to this problem torque and friction loss data were obtained over a wide range of disk Reynolds numbers for axial clearance-disk radius ratio H/R from 0.025 to 0.2 and radial tip gap-disk radius ratio s/R from 0.021 to 0.105. Loss analysis of hard disk drive(HDD) is presented to describe the contribution of windage loss of a rotating disk. The minimum loss from factor of HDD can be obtained from this analysis at each operation conditions.

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