• 제목/요약/키워드: Channel thickness

검색결과 555건 처리시간 0.025초

$\delta$ 도핑된 SiGe p-채널 MESFET의 특성 분석 (Electrical Characteristics of $\delta$-doped SiGe p-channel MESFET)

  • 이관흠;이찬호
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 추계종합학술대회 논문집
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    • pp.541-544
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    • 1998
  • A SiGe p-channel MESFET using $\delta-doped$ layers is designed and the considerable enhancement of the current driving capability of the device is observed from the result of simulation. The channel consists of double $\delta-doped$ layers separated by a low-doped spacer which consists of Si and SiGe. A quantum well is formed in the valence band of the Si/SiGe heterojunction and much more holes are accumulated in the SiGe spacer than those in the Si spacer. The saturation current is enhanced by the contribution of the holes inthe spacer. Among the design parameters that affect the performance of the device, the thickness of the SiGe layer and the Ge composition are studied. The thickness of $0~300\AA$ and the Ge composition of 0~30% are investigated, and the saturation current is observed to be increased by 45% compared with a double $\delta-doped$ Si p-channel MESFET.

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Effect of Subthreshold Slope on the Voltage Gain of Enhancement Mode Thin Film Transistors Fabricated Using Amorphous SiInZnO

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • 제18권5호
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    • pp.250-252
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    • 2017
  • High-performance full swing logic inverters were fabricated using amorphous 1 wt% Si doped indium-zinc-oxide (a-SIZO) thin films with different channel layer thicknesses. In the inverter configuration, the threshold voltage was adjusted by varying the thickness of the channel layer. The depletion mode (D-mode) device used a TFT with a channel layer thickness of 60 nm as it exhibited the most negative threshold voltage (-1.67 V). Inverters using enhancement mode (E-mode) devices were fabricated using TFTs with channel layer thicknesses of 20 or 40 nm with excellent subthreshold slope (S.S). Both the inverters exhibited high voltage gain values of 30.74 and 28.56, respectively at $V_{DD}=15V$. It was confirmed that the voltage gain can be improved by increasing the S.S value.

미세 유체 상 PDMS 고분자 필름의 펨토초 레이저 어블레이션 및 천공 임계치 연구 (fs-laser Ablation and Optoperforation Threshold for PDMS Thin Film on $\mu$-channel)

  • 우숙이;;윤태오;정세채;박일홍
    • 한국정밀공학회지
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    • 제27권2호
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    • pp.29-33
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    • 2010
  • We have investigated fs-laser ablation as well as optoperforation threshold of PDMS (Polydimethylsiloxane) thin lid cover on ${\mu}$-channel with changing the flow medium from water to hemoglobin. The ablation threshold is found to be independent of both PDMS thin film thickness and flow medium, but the optoperforation threshold is dependent on the films thickness. The observation that the ablation process is well described with simple two-temperature model supposed that the cover lid PDMS of $\mu$-channel be processed with minimized thermal effects by fs-laser with low laser fluence.

STI 채널 모서리에서 발생하는 MOSFET의 험프 특성 (The MOSFET Hump Characteristics Occurring at STI Channel Edge)

  • 김현호;이천희
    • 한국시뮬레이션학회논문지
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    • 제11권1호
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    • pp.23-30
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    • 2002
  • An STI(Shallow Trench Isolation) by using a CMP(Chemical Mechanical Polishing) process has been one of the key issues in the device isolation[1] In this paper we fabricated N, P-MOSFEET tall analyse hump characteristics in various rounding oxdation thickness(ex : Skip, 500, 800, 1000$\AA$). As a result we found that hump occurred at STI channel edge region by field oxide recess. and boron segregation(early turn on due to boron segregatiorn at channel edge). Therefore we improved that hump occurrence by increased oxidation thickness, and control field oxide recess( 20nm), wet oxidation etch time(19HF,30sec), STI nitride wet cleaning time(99HF, 60sec+P 90min) and fate pre-oxidation cleaning time (U10min+19HF, 60sec) to prevent hump occurring at STI channel edge.

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비정질 산화물 SiZnSnO 반도체 박막의 전기적 특성 분석 (Investigation on Electrical Property of Amorphous Oxide SiZnSnO Semiconducting Thin Films)

  • 변재민;이상렬
    • 한국전기전자재료학회논문지
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    • 제32권4호
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    • pp.272-275
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    • 2019
  • We investigated the electrical characteristics of amorphous silicon-zinc-tin-oxide (a-SZTO) thin films deposited by RF-magnetron sputtering at room temperature depending on the deposition time. We fabricated a thin film transistor (TFT) with a bottom gate structure and various channel thicknesses. With increasing channel thickness, the threshold voltage shifted negatively from -0.44 V to -2.18 V, the on current ($I_{on}$) and field effect mobility (${\mu}_{FE}$) increased because of increasing carrier concentration. The a-SZTO film was fabricated and analyzed in terms of the contact resistance and channel resistance. In this study, the transmission line method (TLM) was adopted and investigated. With increasing channel thickness, the contact resistance and sheet resistance both decreased.

Effect of Variation of Membrane Thickness on the Activity of $Ca^{2+}$-activated $K^+$ Channel in Planar Lipid Bilayers

  • Seo, Hyoung-Sik;Ryu, Pan-Dong
    • 한국생물물리학회:학술대회논문집
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    • 한국생물물리학회 1999년도 학술발표회 진행표 및 논문초록
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    • pp.56-56
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    • 1999
  • Change of membrane property can affect the activity of membrane proteins. In this work, we investigated the single channel properties of large conductance $Ca^{2+}$-activated $K^{+}$(BK) channels in planar lipid bilayers of different thickness. First, we recorded the activity of single BK channels from rat skeletal muscle incorporated into the control bilayer, then increased the bilayer thickness by perfusing the recording solution with the one saturated with n-pentane, or reduced the thickness by adding diheptanoylphosphatidylcholine (di$C_{7:0}$PC) to the recording soluton.(omitted)

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GMS Brightness를 사용한 구름 두께와 가강수량의 통계적 추정 (Statistical Estimates of Cloud Thickness and Precipitable Water from GMS Brightness Data)

  • 최영진;신동인
    • 대한원격탐사학회지
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    • 제6권2호
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    • pp.153-164
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    • 1990
  • A statistical correlation between cloud thickness and brightness is shown by regression analysis using the least-square method. Cloud thicknesses are obtained from radiosonde observation. Brightness values are obtained from GMS visible channel. Regression analyses are preformed on both thickness data used in conjunction with brightness data for summer season. The results are shown by the regression curve relating thickness and brightness accounting for 79% of variance. And the relationship between thickness and precipitable water in the cloud layers is analyzed. The thickness shows a positive correlation with precipitable water in cloudy layers.

전압분포의 선형특성을 이용한 Long-Channel Asymmetric Double-Gate MOSFET의 문턱전압 모델 (Analytical Model for the Threshold Voltage of Long-Channel Asymmetric Double-Gate MOSFET based on Potential Linearity)

  • 양희정;김지현;손애리;강대관;신형순
    • 대한전자공학회논문지SD
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    • 제45권2호
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    • pp.1-6
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    • 2008
  • Long-channel Asymmetric Double-Ga(ADG) MOSFET의 해석적 문턱전압 모델을 제시한다. 본 모델은 채널 도핑과 채널의 양자효과까지 고려하였으며 더 나아가 문턱전압 영역에서 potential 분포의 선형특성을 이용하여 기존의 모델보다 간단하면서도 정확한 접근을 가능하게 하였다. 개발한 모델의 정확도는 다양한 실리콘 필름의 두께, 채널 도핑, 그리고 산화막 두께 변화에 대하여 numerical 시뮬레이션 결과와 비교하여 검증하였다.

채널도핑강도에 대한 DGMOSFET의 DIBL분석 (Analysis of Drain Induced Barrier Lowering for Double Gate MOSFET According to Channel Doping Intensity)

  • 정학기
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2011년도 추계학술대회
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    • pp.888-891
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    • 2011
  • 본 연구에서는 이중게이트(Double Gate; DG) MOSFET에서 발생하는 단채널효과 중 하나인 드레인유기장벽 감소(Drain Induced Barrier Lowering; DIBL)에 대하여 분석하고자 한다. 드레인 유기장벽감소 현상은 채널의 길이가 짧아질 때 드레인 전압이 소스쪽 장벽에 영향을 미쳐 장벽의 높이를 감소시키는 현상으로써 단채널에서 발생하는 매우 중요한 효과이다. 본 연구에서는 DIBL을 해석하기 위하여 이미 발표된 논문에서 타당성이 입증된 포아송방정식의 해석학적 전위분포를 이용할 것이다. 이 모델은 특히 전하분포함수에 대하여 가우시안 함수를 사용함으로써 보다 실험값에 가깝게 해석하였으며 소자 파라미터인 채널두께, 산화막두께, 도핑강도 등에 대하여 드레인 유기장벽감소의 변화를 관찰하고자 한다.

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ICP 식각 시스템에 의한 초전도 스트립 라인의 임계 특성 분석 (Analysis of the Critical Characteristics in the Superconducting Strip Lines by ICP Etching System)

  • 고석철;강형곤;최효상;양성채;한병성
    • 한국전기전자재료학회논문지
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    • 제17권7호
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    • pp.782-787
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    • 2004
  • Superconducting flux flow transistor (SFFT) is based on a control of the Abrikosov vortex flowing along a channel. The induced voltage by moving of the Abrikosov vortex in an SFFT is greatly affected by the thickness, the width, and the length of channel. In order to fabricate a reproducible channel in the SFFT, we studied the variation of the critical characteristics of ${YBa}_2{Cu}_3{O}_7-\delta(YBCO)$ thin films with the etching time using ICP (Inductively coupled plasma) system. From the simulation, it was certified that the vortex velocity was increased in a low pinning energy at channel width 0,5 mm. The surfaces of YBCO thin film were etched by ICP etching system. We observed the etched channel surfaces by AFM (Atomic Force Microscope) and measured the critical current density with etching time. As a measured results, the etching thickness of channel should be optimized to fabricated a flux flow transistor with specified characteristics.