• 제목/요약/키워드: Channel thickness

검색결과 555건 처리시간 0.026초

STI구조를 갖는 nMOSFET의 채널 너비에 따른 Hot-Carrier 열화 현상에 관한 연구 (A Study on the Channel-Width Dependent Hot-Carrier Degradation of nMOSFET with STI)

  • 이성원;신형순
    • 대한전자공학회논문지SD
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    • 제40권9호
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    • pp.638-643
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    • 2003
  • Channel width dependence of hot-carrier effect in nMOSFET with shallow trench isolation is analyzed. $I_{sub}$- $V_{G}$ and $\Delta$ $I_{ㅇ}$ measurement data show that MOSFETs with narrow channel-width are more susceptible to the hot-carrier degradation than MOSFETs with wide channel-width. By analysing $I_{sub}$/ $I_{D}$, linear $I_{D}$- $V_{G}$ characteristics, thicker oxide-thickness at the STI edge is identified as the reason for the channel-width dependent hot-carrier degradation. Using the charge-pumping method, $N_{it}$ generation due to the drain avalanche hot-carrier (DAHC) and channel hot-electron (CHE) stress are compared. are compared.

부 채널 신호에 대한 박막의 영향 (Thin Film Effects on Side Channel Signals)

  • 선용빈
    • 반도체디스플레이기술학회지
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    • 제12권2호
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    • pp.51-56
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    • 2013
  • Even if transmissions through normal channel between ubiquitous devices and terminal readers are encrypted, any extra sources of information retrieved from encrypting module can be exploited to figure out the key parameters, so called side channel attack. Since side channel attacks are based on statistical methods, making side channel signal weak or complex is the proper solution to prevent the attack. Among many countermeasures, shielding the electromagnetic signal and adding noise to the EM signal were examined by applying different thicknesses of thin films of ferroelectric (BTO) and conductors (copper and gold). As a test vehicle, chip antenna was utilized to see the change in radiation characteristics: return loss and gain. As a result, the ferroelectric BTO showed no recognizable effect on both shielding and adding noise. Cu thin film showed increasing shielding effect with thickness. Nanometer Au exhibited possibility in adding noise by widening of bandwidth and red shifting of resonating frequencies.

매몰채널 pMOSFET소자의 서브쓰레쉬홀드 특성 고찰 (Subthreshold characteristics of buried-channel pMOSFET device)

  • 서용진;장의구
    • E2M - 전기 전자와 첨단 소재
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    • 제8권6호
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    • pp.708-714
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    • 1995
  • We have discussed the buried-channel(BC) behavior through the subthreshold characteristics of submicron PMOSFET device fabricated with twin well CMOS process. In this paper, we have guessed the initial conditions of ion implantation using process simulation, obtained the subthreshold characteristics as a function of process parameter variation such as threshold adjusting ion implant dose($D_c$), channel length(L), gate oxide thickness($T_ox$) and junction depth of source/drain($X_j$) using device simulation. The buried channel behavior with these process prarameter variation were showed apparent difference. Also, the fabricated pMOSFET device having different channel length represented good S.S value and low leakage current with increasing drain voltage.

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DGMOSFET의 도핑분포에 따른 상 · 하단 전류분포 및 차단전류 분석 (Analysis on Forward/Backward Current Distribution and Off-current for Doping Concentration of Double Gate MOSFET)

  • 정학기
    • 한국정보통신학회논문지
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    • 제17권10호
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    • pp.2403-2408
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    • 2013
  • 본 연구에서는 이중게이트 MOSFET에 대한 차단전류를 분석하기 위하여 도핑분포함수에 따라 상단과 하단게이트에 의한 전류분포를 분석할 것이다. 분석을 위하여 실험치에 유사한 결과를 얻을 수 있도록 채널도핑농도의 분포함수로써 가우시안함수를 사용하여 유도한 포아송방정식의 이차원 해석학적 전위모델을 이용하여 차단전류를 분석하였다. 특히 소자 파라미터인 채널길이, 채널두께, 게이트산화막 두께 및 채널도핑농도 등을 파라미터로 하여 가우스함수의 이온주입범위 및 분포편차의 변화에 대한 차단전류의 변화를 분석하였다. 분석결과 차단전류는 소자파라미터에 의한 상하단 전류의 변화에 따라 커다란 변화를 보이고 있었으며 특히 채널도핑함수인 가우시안 함수의 형태에 따라서도 큰 변화를 보이고 있다는 것을 관찰할 수 있었다.

[ 0.1\;μm ] SOI-MOSFET의 적정 채널도핑농도에 관한 시뮬레이션 연구 (Investigation of Optimal Channel Doping Concentration for 0.1\;μm SOI-MOSFET by Process and Device Simulation)

  • 최광수
    • 한국재료학회지
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    • 제18권5호
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    • pp.272-276
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    • 2008
  • In submicron MOSFET devices, maintaining the ratio between the channel length (L) and the channel depth (D) at 3 : 1 or larger is known to be critical in preventing deleterious short-channel effects. In this study, n-type SOI-MOSFETs with a channel length of $0.1\;{\mu}m$ and a Si film thickness (channel depth) of $0.033\;{\mu}m$ (L : D = 3 : 1) were virtually fabricated using a TSUPREM-4 process simulator. To form functioning transistors on the very thin Si film, a protective layer of $0.08\;{\mu}m$-thick surface oxide was deposited prior to the source/drain ion implantation so as to dampen the speed of the incoming As ions. The p-type boron doping concentration of the Si film, in which the device channel is formed, was used as the key variable in the process simulation. The finished devices were electrically tested with a Medici device simulator. The result showed that, for a given channel doping concentration of $1.9{\sim}2.5\;{\times}\;10^{18}\;cm^{-3}$, the threshold voltage was $0.5{\sim}0.7\;V$, and the subthreshold swing was $70{\sim}80\;mV/dec$. These value ranges are all fairly reasonable and should form a 'magic region' in which SOI-MOSFETs run optimally.

고농도의 Ge 함량을 가진 Biaxially Strained SiGe/Si Channel Structure의 정공 이동도 특성 (Hole Mobility Characteristics of Biaxially Strained SiGe/Si Channel Structure with High Ge Content)

  • 정종완
    • 한국전기전자재료학회논문지
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    • 제21권1호
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    • pp.44-48
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    • 2008
  • Hole mobility characteristics of two representative biaxially strained SiGe/Si structures with high Ge contents are studied, They are single channel ($Si/Si_{1-x}Ge_x/Si$ substrate) and dual channel ($Si/Si_{1-y}Ge_y/Si_{1-x}Ge_x/Si$ substrate), where the former consists of a relaxed SiGe buffer layer with 60 % Ge content and a tensile-strained Si layer on top, and for the latter, a compressively strained SiGe layer is inserted between two layers, Owing to the hole mobility performance between a relaxed SiGe film and a compressive-strained SiGe film in the single channel and the dual channel, the hole mobility behaviors of two structures with respect to the Si cap layer thickness shows the opposite trend, Hole mobility increases with thicker Si cap layer for single channel structure, whereas it decreases with thicker Si cap layer for dual channel. This hole mobility characteristics could be easily explained by a simple capacitance model.

Analysis of Subthreshold Characteristics for Device Parameter of DGMOSFET Using Gaussian Function

  • Jung, Hak-Kee
    • Journal of information and communication convergence engineering
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    • 제9권6호
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    • pp.733-737
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    • 2011
  • This paper has studied subthreshold characteristics for double gate(DG) MOSFET using Gaussian function in solving Poisson's equation. Typical two dimensional analytical transport models have been presented for symmetrical Double Gate MOSFETs (DGMOSFETs). Subthreshold swing and threshold voltage are very important factors for digital devices because of determination of ON and OFF. In general, subthreshold swings have to be under 100mV/dec, and threshold voltage roll-off small in short channel devices. These models are used to obtain the change of subthreshold swings and threshold voltage for DGMOSFET according to channel doping profiles. Also subthreshold swings and threshold voltages have been analyzed for device parameters such as channel length, channel thickness and channel doping profiles.

CuPc 두께 변화 및 채널 길이 변화에 따른 전계 효과 트랜지스터의 전기적 특성 연구 (Electrical Properties with Varying CuPc Thickness and Channel Length of the Field-effect Transistor)

  • 이호식
    • 한국전기전자재료학회논문지
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    • 제20권1호
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    • pp.47-52
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    • 2007
  • Organic field-effect transistors (OFETS) are of interest for use in widely area electronic applications. We fabricated a copper phthalocyanine (CuPc) based field-effect transistor with varying channel length. The CuPc FET device was made a top-contact type and the channel length was a $100\;{\mu}m,\;50\;{\mu}m,\;40\;{\mu}m,\;and\;30\;{\mu}m$ and the channel width was a fixed at 3 mm. We observed a typical current-voltage (I-V) characteristics in CuPc FET with varying channel length (L) and we calculated the effective mobility. Also, we measured a capacitance-voltage (C-V) by applied bias voltage with varying frequency at 43, 100, 1000 Hz.

마이크로 레이저 평면빔을 이용한 마이크로채널 내에서의 Micro-LIF 측정 (Micro-LIF Measurement in a Micro-channel Using an Micro Laser Light Sheet)

  • 윤상열;김재민;김수헌;김경천
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.1540-1545
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    • 2004
  • Measurement of concentration fields in a micro-channel is the crucial technology in the area of Lab-on-a-chip to be used for various bio-chemical applications. It is wel-known that the only possible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been made so far due to the limit of light illumination. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having 5 microns thickness by a micro focus laser line generator. Nile Blue A was used as fluorescent dye for LIF measurement. The laser sheet beam illuminates an exact plane of concentration measurement in the micro-channel to increase the signal to noise ratio and reduce the depth uncertainty considerably.

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최적 단면 치수를 가지는 복합재료 U-Beam의 설계 (Design of composite channel section beam for optimal dimensions)

  • 이헌창;전흥재;박지상;변준형
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2002년도 추계학술발표대회 논문집
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    • pp.276-279
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    • 2002
  • A problem formulation and solution for design optimization of laminated composite channel section beam is presented in this study. The objective of this study is the determination of optimum section dimensions of composite laminated channel section beam which has equivalent flexural rigidities to flexural rigidities of steel channel section beam. The analytical model is based on the laminate theory and accounts for the material coupling for arbitrary laminate stacking sequence configuration. The model is used to determine the optimal section dimensions of composite channel section beam. The web height, flange width and thickness of the beam are treated as design variables. The solutions described are found using a global search algorithm, Genetic Algorithms (GA).

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