• Title/Summary/Keyword: Ceramic deposition

Search Result 735, Processing Time 0.025 seconds

Thermal Properties of Diamond Films Deposited by Chemical Vapor Depositon

  • Chae, Hee-Baik;Baik, Young-Joon
    • The Korean Journal of Ceramics
    • /
    • v.3 no.1
    • /
    • pp.29-33
    • /
    • 1997
  • Four diamond films were deposited by the microwave plasma assisted chemical vapor deposition method varying CH4 concentration from 2.5 to 10% in the feeding gases. Thermal conductivity was measured on these free standing films by the steady state method from 80 K to 400K. They showed higher thermal conductivity as the film deposited with lower methane concentration. One exception, 7.79% methane concentration deposited film, was observed to be the highest thermal conductivity. Phonon scattering processes were considered to analyze the thermal conductivity with the full Callaway model. The grain size and the concentration of the extended and the point defects were used as the fitting parameters. Microstructure of diamond films was investigated with the scanning electron microscopy and Raman spectroscopy.

  • PDF

Patterning of Diamond Micro-Columns

  • Cho, Hun-Suk;Baik, Young-Joon;Chung, Bo-Keon;Lee, Ju-Yong;Jeon, D.;So, Dae-Hwa
    • The Korean Journal of Ceramics
    • /
    • v.3 no.1
    • /
    • pp.34-36
    • /
    • 1997
  • We have fabricated a patterned diamond field emitter on a silicon substrate. Fine diamond particles were planted on a silicon wafer using conventional scratch method. A silicon oxide film was deposited on the substrate seeded with diamond powder. An array of holes was patterned on the silicon oxide film using VLSI processing technology. Diamond grains were grown using a microwave plasma-assisted chemical vapor deposition. Because diamond could not grow on the silicon oxide barrier, diamond grains filled only the patterned holes in the silicon oxide film, resulting in an array of diamond tips.

  • PDF

The Resistivity Properties of SrTiO$_3$ Thin Films by Sputtering method. (스퍼터링 방법을 이용한 SrTiO$_3$박막의 저항을 특성)

  • 이우선;손경춘;서용진;김남오;이경섭;김형곤
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 1999.05a
    • /
    • pp.207-210
    • /
    • 1999
  • The objective of this study Is to deposited the preparation of SrTiO$_3$3 dielectric thin films on Ag/barrier-mater/Si(N-type 100) bottom electrode using a conventional rf-magnetron sputtering technique with a ceramic target under various conditions. It is demonstrated that the leakage current of films are strongly dependent on the atmosphere during deposition and the substrate temperature. The resistivity properties of films deposited on silicon substrates were very high resistivity. Capacitance of the films properties were the highest value(1000pF) and dependent on substrate temperature.

  • PDF

Laser Ablation of a ZnO:P2O5 Target under the Presence of a Transverse Magnetic Field

  • Alauddin, Md.;Park, Jin-Jae;Gwak, Doc-Yong;Song, Jae-Kyu;Park, Seung-Min
    • Bulletin of the Korean Chemical Society
    • /
    • v.31 no.4
    • /
    • pp.798-802
    • /
    • 2010
  • From time-resolved optical emission spectra, we have investigated the effects of a transverse magnetic field on the expansion of a plasma plume produced by laser ablation of a ZnO:$P_2O_5$ ceramic target in oxygen active atmosphere. The emission spectra of $Zn^{+*}$, $P^{+*}$, and $Zn^*$ neutrals in the presence of magnetic field turn out to be considerably different from those without magnetic field. The characteristics of the deposited films grown on amorphous fused silica substrates by pulsed laser deposition (PLD) are examined by analyzing their photoluminescence (PL), X-ray diffraction (XRD), and UV-visible spectra.

Estimation of Machinability for Super Heat-resistant Alloys Inconel 600 in Turning Process (선삭가공에서 초내열합금 Inconel 600의 가공성 평가)

  • Won, Jong-Sik;Lim, Eun-Seong;Jung, Yoon-Gyo
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.10 no.6
    • /
    • pp.1-8
    • /
    • 2011
  • Recently, super heat-resistant alloy Inconel 600 come into spotlight as the material of airplane parts but this material causes lots of problems that is, reduction of machinability and attritious wear and breakage of cutting tool during turning processing due to high temperature strength and cohesion between tool material and Inconel 600. Therefore, in this study, it was purposed to determine tool material kind and to select of proper cutting range when turning process was carried out for Inconel 600. In order to these Purpose, coated carbide tool and ceramic tool was used in this experiment and the machinability of Inconel 600 was investigated from perspective of the cutting force, chipping and wear of tool and deposition phenomenon of chip.

A Study on the Dielctric Properties of the PTC $BaTiO_3$ Ceramic Thin Films

  • Im, Ik-Tae;So, Byung Moon
    • Journal of the Semiconductor & Display Technology
    • /
    • v.11 no.3
    • /
    • pp.63-67
    • /
    • 2012
  • The films were deposited at evaporator system and were annealed at heat treatment. The films had a dense microstructure with fine grains. The electrical properties of the films were dramatically controlled with annealing. Samples Preparation were analyzed in term of positive temperature coefficient of Resistivity Samples were made in the substrate tempera-true of $400^{\circ}C$ deposition time of 10 hours, and forward power of 210watt. R-T(resistivity-temperature) Characteristics of the samples were investigated as a function of the substrate type and the ambient temperature. The resistivity of the thin film specimens was compared with that of the bulk type specimens. By using RF/DC magnetron sputtering system, we obtained lower resistivity in the thermistor with thin $BaTiO_3$ film than that in the bulk type thermistor.

Pulsed Laser Deposition $Na_{0.5}K_{0.5}NbO_{3}$ Thin Film (PLD 기법에 의한 $Na_{0.5}K_{0.5}NbO_{3}$ 박막 제작)

  • 최원석;문병무;조중래
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.11a
    • /
    • pp.33-35
    • /
    • 2000
  • Na-K-Nb system showed a number of ferroelectric phases in bulk ceramic. [001]-axis oriented single-phase Na$_{0.5}$K$_{0.5}$NbO$_3$ (NKN) thin film have been grown on LaA1O$_3$ substrates using KrF excimer laser. X-ray diffraction $\theta$-2$\theta$ scan, rocking curves, and $\phi$ scan data evidence highly c-axis oriented along the [001] direction.ion.

  • PDF

An Evaluation on High Temperature Oxidation Resistance of EB-PVD Thermal Barrier Coatings (전자빔 증착법에 의한 열차폐코팅의 고온 내산화성 평가)

  • Kim, Jong-H.;Jeong, Se-I.;Lee, Ku-H.;Lee, Eui-Y.
    • Journal of the Korean institute of surface engineering
    • /
    • v.39 no.4
    • /
    • pp.147-152
    • /
    • 2006
  • Failure mechanisms of electron beam physical vapor deposited thermal barrier coatings(EB-PVD TBCs) that occur during thermal cyclic oxidation were investigated. The investigations include microstructural degradation of NiCrAIY bond coat, thermally grown oxides(TGOs) along the ceramic top coat-substrate interface and fracture path within TBCs. The microstructural degradation of the bond coat during cyclic oxidation created Al depleted zones, resulting in reduction of NiAl and ${\gamma}$-Ni solid solution phase. It was observed that the fracture took placed primarily within the TGOs or at the interfaces between TGOs and bond coat.

Recent Progress in Dielectric-Based Ultrafast Charging/Discharging Devices (유전체를 활용한 초고속 에너지 충/방전 소자 기술)

  • Choi, Hyunsu;Ryu, Jungho;Yoon, Woon-Ha;Hwang, Geon-Tae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.35 no.4
    • /
    • pp.322-332
    • /
    • 2022
  • Energy storage capacitors based on dielectric ceramics with superior polarization properties and dielectric constant can provide much higher output power density due to their very fast energy charging/discharging rates, which are particularly suitable for operating pulsed-power devices. For an outstanding energy storage performance of dielectric capacitor, a large recoverable energy density could be derived by introducing a slim polarization-electric field hysteresis loop into dielectric materials by various technical approaches. Many research teams have explored various dielectric capacitor technologies to demonstrate high output power density and ultrafast charging/discharging behavior. This article reviews the recent research progress in high-performance dielectric capacitors for pulsed-power electronic applications.

Studies on the Effects of Variables on the Fabrication Of C/SiC Composite by Chemical Vapor Infiltration in a Fluidized Bed Reactor (유동층반응기에서 화학증기침투에 의한 C/SiC의 복합체 제조시 변수의 영향 연구)

  • Lee, Sung-Joo;Kim, Yung-Jun;Kim, Mi-Hyun;Rim, Byung-O;Chung, Gui-Yung
    • Applied Chemistry for Engineering
    • /
    • v.10 no.6
    • /
    • pp.843-847
    • /
    • 1999
  • In this research, C/SiC composites, i.e. activated carbon coated with SiC obtained from dichlorodimethylsilane(DDS) and hydrogen, have been made by chemical vapor infiltration(CVI) in a fluidized bed reactor. Activated carbons of sizes of 4~12, 12~20, and 20~40 mesh were used. After deposition the surface area, the amount and the shape of deposit of each sample were observed at different concentrations of reactant DDS, sizes of activated carbon, reaction pressures and reaction times. The experimental results showed that uniform deposition in the pores of sample was obtained at a lower concentration of DDS and a lower pressure. Additionally, from the observation that the pore diameter and the surface area have minimum values at a certain time of deposition, it was known that deposition occurred inside of the pore at first and then on the outside of particle. Small particles of SiC were deposited uniformly on the surface of activated carbon at lower DDS concentrations and lower reaction pressures. The results were confirmed by SEM, TGA, the pore size distribution analyzer and BET.

  • PDF