The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Thermal Properties of Diamond Films Deposited by Chemical Vapor Depositon

  • Chae, Hee-Baik (Department of Physics, Soonchunhyang University) ;
  • Baik, Young-Joon (Division of Ceramics Korea Institute of Science and Techanology)
  • Published : 1997.03.01
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Abstract

Four diamond films were deposited by the microwave plasma assisted chemical vapor deposition method varying CH4 concentration from 2.5 to 10% in the feeding gases. Thermal conductivity was measured on these free standing films by the steady state method from 80 K to 400K. They showed higher thermal conductivity as the film deposited with lower methane concentration. One exception, 7.79% methane concentration deposited film, was observed to be the highest thermal conductivity. Phonon scattering processes were considered to analyze the thermal conductivity with the full Callaway model. The grain size and the concentration of the extended and the point defects were used as the fitting parameters. Microstructure of diamond films was investigated with the scanning electron microscopy and Raman spectroscopy.

Keywords

References

  1. Properties of Diamond J. E. Field
  2. J. Phys. v.C8 R. Berman;P. R. W. Hudson;M. Martinez
  3. Properties and Applications of Diamond J. Wilks;E. Wilks
  4. Jap. J. Appl. Phys. v.25 A. Ono;T. Baba;H. Funamoto;A. Nishikawa
  5. J. Appl. Phys. v.64 D. T. Morelli;C. P. Beetz;T. A. perry
  6. J. Appl. Phys. v.71 J. E. Graebner;J. A. Mucha;L. Seibles;G. W. Kammlott
  7. Appl. Phys. Lett. v.59 D. T. Morelli;C. P. Beetz;T. A. Perry
  8. Diamond Films and Technology v.1 J. E. Graebner;J. A. Herb
  9. Thermal Conductivity of Diamond v.24 D. T. Morelli;P. A. Thrower(ed.)
  10. J. Appl. Phys. v.69 K. Baba;Y. Aikawa;N. Shohata
  11. 2nd international Conference on the Application of Diamond Films and Related Materials C. Gu;C. W. Jin;G. Zou;M. Yoshikawa(ed.)m. Murakawa(ed.)Y. Tzeng;W. A. Yarbrough
  12. Electrochemical Society v.89 no.12 Proceeding of 1st International Symposium on Diamond and Diamond-like Films J. A. Herb;C. Bailey;K. V. Ravi;P. A. Danning
  13. Phys. Rev. v.113 J. Callway
  14. Thermal Conduction in Solids, Oxford University R. Berman
  15. Phys. Rev. v.B47 J. R. olson;R. O. pohl;J. W. Vandersande;a. Zoltan;T. R. Anthony;W. F. Banhozer
  16. Phys. Rev. Lett. v.70 L. Wei;P. K. Kuo;R. L Thomas;T. R. Anthony;W. F. Banholzer
  17. Phys. Rev. v.B50 J. E. Graebner;M. E. Reiss;L. Seibles;T. M. Hartnett;R. P. Miller;C. J. Robinson
  18. J. Appl. Phys. v.78 H. B. Chae;Y. J. Han;D. J. Seong;J. C. Kim;Y. J. Baik
  19. Phys. Z. Sowjetunion v.11 L. Landau;G. Rumer
  20. Single Crystal Elastic Constants and Aggregate constants G. Simmons;H. Wang
  21. Emerging CVD Science and Technology Chemical and Microstructual Characterization and Properties of Diamond in Synthetic Diamond W. J. P. Enckevort