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A Study on the Dielctric Properties of the PTC $BaTiO_3$ Ceramic Thin Films  

Im, Ik-Tae (Dept. Mechanical Design Engineering, College of Eng., Chonbuk National University)
So, Byung Moon (Dept. IT Applied System Engineering, College of Eng., Chonbuk National University)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.3, 2012 , pp. 63-67 More about this Journal
Abstract
The films were deposited at evaporator system and were annealed at heat treatment. The films had a dense microstructure with fine grains. The electrical properties of the films were dramatically controlled with annealing. Samples Preparation were analyzed in term of positive temperature coefficient of Resistivity Samples were made in the substrate tempera-true of $400^{\circ}C$ deposition time of 10 hours, and forward power of 210watt. R-T(resistivity-temperature) Characteristics of the samples were investigated as a function of the substrate type and the ambient temperature. The resistivity of the thin film specimens was compared with that of the bulk type specimens. By using RF/DC magnetron sputtering system, we obtained lower resistivity in the thermistor with thin $BaTiO_3$ film than that in the bulk type thermistor.
Keywords
$BaTiO_3$; Thin Film; PTC;
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