• 한국표면공학회지
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• 제31권3호
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• pp.142-150
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• 1998

Stainless steel is being used widely for various purposes due to its good corrosion resistance. There has been much research to produce colored stainless steel by several methods such as anodizing and ion plating. In this experiment, we coated TiN(C,O,H)films SUS304 substraate with the DC magnetron spttering system made by Leybold Heraeus and studied the interlater structure and abhesive strength of the films as a function of additional gases, acetylene, hydrogen and oxygen. When the acetylene gas was added into the chamber, the specimen with the interlayer phase had good adhesion due to the toughness of the $\gamma'-Fe_4N$ plase induced from a solid solution of carbon atoms, while low adhesion appeared on the specimen of the non interlayer phase. The formation of the interlayer phase($\gamma'-Fe_4N$) was due to hydrogen embrittlement and internal stress induced by $\gamma'-Fe_4N$ formation in the interlayer. We could fine the interlayer phase ($\gamma'-Fe_4N$) at the interface between the film and the substrate of the TEM image when $\gamma'-Fe_4N$ was detected by the X-ray duffraction metheod.

• 한국표면공학회지
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• 제48권5호
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• pp.218-226
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• 2015

The goal of this study is to investigate a metal cladding that contains SiC composites as a protective layer and analysis the characteristics of the specimens on high temperature oxidation To make SiC composites, the current process needs a high temperature (about $1100^{\circ}C$) for the infiltration of fixing materials such as SiC. To improve this situation, we need a low temperature process. In this study, we developed a low temperature process for making SiC composites on the metal layer, and we have made two kinds: cladding with protective SiC composites made by polycarbosilane(PCS), and a PCS filling method using supercritical carbon dioxide. A corrosion test at $1200^{\circ}C$ in a mixed steam and Ar atmosphere was performed on these specimens. The result show that the cladding with protective SiC composites have excellent oxidation suprression rates. This study can be said to have developed new metal cladding with enhanced durability by using SiC composite as protective films of metal cladding instead of simple coating film.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 추계학술대회 초록집
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• pp.177-178
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• 2009

DLC (Diamond-like Carbon) 코팅막은 저마찰, 고경도, 낮은 표면조도 등의 우수한 특성을 갖는 박막 물질로 다양한 산업분야에서 그 코팅막의 활용을 목적으로 응용연구가 활발하게 이루어지고 있다. 본 연구에서는 플라즈마 화학기상증착(PCVD) 공정을 이용하여 바이어스, 진공도, 공정 온도 등의 코팅 조건 변수를 이용하여 DLC 코팅막을 제작하였다. 또한, 코팅막은 공정 조건에 따라 증착속도, 표면 및 단면 조직, 밀착력, 경도, 마찰계수 등의 특성을 평가하였다. 플라즈마 화학기상증착법을 이용한 DLC 코팅막 제조는 상온과 $175^{\circ}C$에서 이루어졌으며, 저온 중 DLC 코팅막 제조가 가능해짐에 따라 고분자 와 같은 저융점을 갖는 피처리물의 코팅처리가 가능하여 산업적 응용의 확대가 기대된다. SEM 표면 조직 관찰에 따른 DLC 코팅막의 표면조직과 조도는 공정조건에 따라 큰 차이는 보이지 않았지만, 밀착력에 있어서는 매우 큰 차이를 나타내었다. 스크래치 시험 결과 가장 높은 밀착력은 100 N 이상을 나타내었으며, 이 때의 마찰계수는 약 0.02를 나타내었다. 가장 낮은 마찰계수는 약 0.01을 보였으며, 이때의 밀착력은 25 N을 나타내었다. 증착속도는 바이어스 전압의 증가에 따라 증가하는 경향을 나타내었으며, 온도의 증가에 따라 감소하는 경향을 나타내었다.

• 한국응용과학기술학회지
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• 제27권3호
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• pp.361-369
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• 2010

A study on the corrosion inhibition of metals is important in many industrial applications (carbon steel, copper, aluminum, SUS 304, nickel). In this study, we investigated the C-V diagrams related to the surface corrosion of metals. It was observed through the SEM that the surface corrosion state of the various metals had the corrosion potential by the scan rate and the organic inhibitor containing an amine group. We determined to measure cyclic voltammetry using the three-electrode system. The measurement of oxidation and reduction ranged from -1350mV to 1650mV. The scan rate was 50, 100, 150, and 200mV/s. It turned out that the C-V characterization of SUS 304 was irreversible process caused by the oxidation current from the cyclic voltammogram. After adding organic inhibitors, the adsorption film was constituted, and the passive phenomena happened. As a result, it was revealed that the inhibition effect of metal corrosion depends on the molecular interaction, and the interaction has influence on the adsorption complex.

• Bulletin of the Korean Chemical Society
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• 제15권1호
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• pp.79-83
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• 1994

The organometallic chemical vapor deposition of single precursors, $[Me_2Al({\mu}-NHR)]_2\;(R=^iPr,\;^tBu)$, for alumininum nitride thin films has been investigated to evaluate their poroperties as potential precursors. In chemical vapor deposition processes the gas phase products scattered from a Ni(100) substrate were analyzed by mass spectrometry and the deposited films were characterized by X-ray photoelectron spectroscopy (XPS). The optimum temperatures for the formation of AlN films have been found to be between 700 K and 800 K. Carbon contamination of the films seems to be attributed mainly to the methyl groups bonded to the aluminum atoms. It is apparent that $^tBu$ group is better than $^iPr$ group as a substituent on the nitrogen atom of the single precursors for the AlN thin film formation.

• 대한금속재료학회지
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• 제48권12호
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• pp.1109-1115
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• 2010

ZnO thin films were deposited on Si(100) substrates at low temperatures ($44^{\circ}C{\sim}210^{\circ}C$) by atomic layer deposition using DEZn (diethyl zinc) and water as precursors. The film thickness was measured by ellipsometry calibrated with cross-sectional TEM. The phase formation, microstructure evolution, UV-absorbance, and chemical composition changes were examined by XRD, SEM, AFM, TEM, UV-VIS-NIR, and AES, respectively. A uniform amorphous ZnO layer was formed even at $44^{\circ}C$ while stable crystallized ZnO films were deposited above $90^{\circ}C$. All the samples showed uniform surface roughness below 3 nm. Fully crystallized ZnO layers with a band-gap of 3.37 eV without carbon impurities can be formed at substrate temperatures of less than $90^{\circ}C$.

• 대한금속재료학회지
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• 제50권7호
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• pp.545-548
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• 2012

The optical and electronic properties of Indium Tin Oxide (ITO) thin films deposited on a RF-plasma treated glass substrate were investigated by X-Ray Photoelectron Spectroscopy (XPS), Ultra-violet Photoelectron Spectroscopy (UPS), Reflected Electron Energy Loss Spectroscopy (REELS). The modification of glass substrates was carried out by varying the time of the plasma surface treatment in an oxygen atmosphere. The focus of this research was to examine how the optical and electronic properties of ITO thin films change with the plasma treatment time. The surface energy increased since the carbon bonds were removed from the surface after the glass substrate received the surface treatment. The ITO thin films produced on the glass substrate with surface treatment showed that the high optical transmittance was approximately 85%. The measured band gap energy was as high as 3.23 eV when the plasma treatment time was 60 s and the work function after the treatment was increased by 0.5 eV in comparison to that before the treatment of 60 s. The ITO thin film exhibited an excellent sheet resistance of $2.79{\Omega}/{\Box}$. We found that the optical and electronic properties of ITO thin films can be improved by RF-plasma surface treatment.

• 한국광학회지
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• 제22권3호
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• pp.117-121
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• 2011

본 논문에서는 도파모드공진을 이용한 포화흡수체 반사기를 제안하였다. 포화흡수체로는 탄소나노튜브(CNT)를 사용하였다. 제안된 반사기는 CNT의 두께 변화 없이 modulation depth를 키울 수 있다는 장점이 있다. 제안하는 반사기의 fill factor(F)와 CNT의 두께변화에 따른 modulation depth, 대역폭, 포화되었을 때의 최대 반사율의 특징을 알아보았다. 제안된 반사기는 포화에너지를 줄일 수 있다는 장점이 있고, 100~200nm 얇은 CNT박막에서 50배정도 줄어드는 것을 확인 하였다.

• 반도체디스플레이기술학회지
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• 제18권2호
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• pp.44-47
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• 2019

Amorphous carbon layer (ACL) is actively used as an etch mask. Recent advances in patterning ACL requires the next level of durability of hard mask in high aspect ratio etch in near future semiconductor manufacturing, and it is worthwhile to know the surface property of ACL thin film to enhance the property of etch hard mask. In this research, ACL are deposited by 6 inch plasma enhanced chemical vapor deposition system with $C_3H_6$ and $N_2$ gas mixture. Surface properties of deposited ACL are investigated depending on gas flow, pressure, RF power. Fourier transform infrared is used for the analysis of surface chemistry, and X-ray photoemission spectra is used for the structural analysis with the consideration of the contents of $sp^2$ and $sp^3$ through fitting of C1s. Also mechanical properties of deposited ACL are measured in order to evaluate hardness.

• Corrosion Science and Technology
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• 제19권6호
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• pp.326-336
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• 2020

Galvalume steel (GL) is widely used in marine and industrial environments. It is characterized by better corrosion resistance than carbon steel. However, corrosion and economic losses may occur as the usage time is increased. Therefore, in this study, an outdoor exposure test of GL for 36 months was conducted across six regions of Korea. Parameters such as corrosion rate, chrominance (color, chroma, and brightness), glossiness, and surface appearance were analyzed. The results showed no significant change in appearance, and the initial corrosion rate was large, but a tendency to decrease with time was observed. Increased outdoor exposure time led to increase in the level of corrosion products. In the case of coastal areas where S, Cl, and other elements were detected, a relatively high decrease in Zn content was observed. Al forms a protective oxide film and exists in the coating layer, but Zn dissolves due to its chemical activity and low potential.