• Title/Summary/Keyword: Borosilicate

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Boron Detection Technique in Silicon Thin Film Using Dynamic Time of Flight Secondary Ion Mass Spectrometry

  • Hossion, M. Abul;Arora, Brij M.
    • Mass Spectrometry Letters
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    • v.12 no.1
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    • pp.26-30
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    • 2021
  • The impurity concentration is a crucial parameter for semiconductor thin films. Evaluating the impurity distribution in silicon thin film is another challenge. In this study, we have investigated the doping concentration of boron in silicon thin film using time of flight secondary ion mass spectrometry in dynamic mode of operation. Boron doped silicon film was grown on i) p-type silicon wafer and ii) borosilicate glass using hot wire chemical vapor deposition technique for possible applications in optoelectronic devices. Using well-tuned SIMS measurement recipe, we have detected the boron counts 101~104 along with the silicon matrix element. The secondary ion beam sputtering area, sputtering duration and mass analyser analysing duration were used as key variables for the tuning of the recipe. The quantitative analysis of counts to concentration conversion was done following standard relative sensitivity factor. The concentration of boron in silicon was determined 1017~1021 atoms/㎤. The technique will be useful for evaluating distributions of various dopants (arsenic, phosphorous, bismuth etc.) in silicon thin film efficiently.

Low-Temperature Sintering and Phase Change of BaTi4O9-Based Ceramics Middle-k LTCC Dielectric Compositions by Glass Addition (Glass 첨가에 의한 BaTi4O9계 중유전율 LTCC 유전체의 저온소결 및 상변화 거동)

  • Choi, Young-Jin;Park, Jae-Hwan;Nahm, Sahn;Park, Jae-Gwan
    • Journal of the Korean Ceramic Society
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    • v.41 no.12 s.271
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    • pp.915-920
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    • 2004
  • The main phase of $BaTi_{4}O_9$-based ceramics was transformed to $BaTi_{5}O_{11}$ caused by the sintering with borosilicate glass, which was analyzed by using XRD and TEM. We considered that the phase change from $BaTi_{4}O_9$-based ceramics to the Ti-rich $BaTi_{5}O_{11}$ phase resulted from borosilicate glass selective absorbing of Ba ions from the $BaTi_{4}O_9$. In these results, we found a dependence on the amounts of the glass frits and the annealing temperature, and the phase change is also dependent of the main phases of $Ba_{4}Ti_{13}O_{30},\;and\;Ba_{2}Ti_{9}O_{20}$, which are involved in the $BaO-TiO_2-based$ Ti-rich region. In the case of sintering of middle- and high- permittivity material with additional glass frits for middle- and high- dielectric coefficients LTCC composition, control of weight fraction of the glass frits accompanying low-temperature sintering property with appropriate phase change is required.

The Effect of Glass Addition on the Sintering and Dielectric Properties of BaO-Nd2O3-TiO2 Microwave Ceramics (Glass첨가에 의한 BaO-Nd2O3-TiO2계 세라믹스의 저온소결과 마이크로파 유전특성)

  • Shin, Dong-Soon;Choi, Young-Jin;Park, Jae-Hwan;Nahm, Sahn;Park, Jae-Gwan
    • Journal of the Korean Ceramic Society
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    • v.40 no.1
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    • pp.98-103
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    • 2003
  • The effect of glass addition on the low-temperature sintering and microwave dielectric properties in $BaO-Nd_2O_3-TiO_2$ dielectric ceramics were studied. When 10~30 wt% of alkali lithium borosilicate glass was added, the sintering temperature decreases from $1300^{\circ}C$;to;1000^{\circ}C$ and the relative density more than 95% was obtained. When the added amount of glass increased above 10 wt%, the density as well as dielectric properties changed, which was attributed to the second phase formation. When the sample was sintered at 100$0^{\circ}C$ with l0wt% of glass, the dielectric properties of $Qxf_o{ge}2800,;{varepsilon}_r{ge}65;and;{ au_f=+55 ppm/^{\circ}C$ were obtained.

Determination of Phorate (0,0-diethyl S-ethylthiomethyl phosphorithioate) and its Metabolites in Soil and Vegetables by GLC (토양(土壤)과 채소중(菜蔬中) Phorate(0,0-diethyl S-ethylthiomethyl phosphorithioate)와 그 대사산물(代謝産物)들의 GLC분석(分析))

  • Hong, Jong-Uck;Lee, Hae-Keun
    • Applied Biological Chemistry
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    • v.26 no.2
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    • pp.104-109
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    • 1983
  • Gas chromatographic method for the analysis of phorate(0,0-diethyl S-ethyl-thiomethyl phosphorithioate) and its metabolites in soil and vegetables was studied by using a mixed phase column(10% DC-200+8% Reoplex-400+2% QF-1 on Gas Chrom Q, $1.8{\times}2mm$ i.d, borosilicate glass column). This column can separate completely phorate and its four metabolites except phoratoxon sulfoxide. Retention time of standard mixture ranged 1.8 to 16.1 minutes at column temperature programming from 130 to $200^{\circ}C$ at $5^{\circ}C/min$ and detector sensitivity was also very high(0.05 to 1.05ng). Recoveries from soil and vegetables untreated but fortified with phorate and its three major metabolites at 0.05 and 0.5ppm levels were above 90% for phorate, phorate sulfoxide and phorate sulfone while recovery of phoratoxon metabolite was about 84%.

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Effect of RF Power on SnO Thin Films Obtained by Sputtering (스퍼터링에 의해 제조된 SnO 박막의 RF 파워에 따른 특성 연구)

  • Um, Joseph;Roh, Byeong-Min;Kim, Sungdong;Kim, Sarah Eunkyung
    • Journal of the Korean Ceramic Society
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    • v.49 no.5
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    • pp.399-403
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    • 2012
  • SnO thin films were fabricated by rf reactive sputtering on borosilicate substrates with an Sn target and Ar/$O_2$ gas mixture. The effect of rf power on the structural, electrical, and optical properties of SnO thin films was investigated with XRD, AFM, SEM, Hall effect measurements, and UV-Vis spectrometer. As a plasma power increased the crystallinity with a preferred orientation of SnO thin films was improved and the grain size slightly increased. However the grains were coalesced and excessively irregular in shape. The electrical conductivity of SnO thin films demonstrated a relatively low p-type conductivity of 0.024 $(Wcm)^{-1}$ at a higher power condition. Lastly, SnO thin films had poor optical transmittance in the visible range as a plasma power increased.

A Study on Sheet Resistance and Temperature Stability of $RuO_2$-based Thick Film Resistors with Varying Glass Composition ($RuO_2$를 기본으로 한 후막 저항체의 유리질 성분에 따른 저항값과 온도 안정성에 관한 연구)

  • Choi, Dong-Wook;Kim, Jun-Chul;Kim, Geun-Young;An, Chul
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.11
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    • pp.84-90
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    • 1992
  • The dependence of electrical characteristics of RuO$_2$-based thick film resistors on the RuO$_2$ contents, glass composition variation and the firing temperatures was measured. The sheet resistance of resistors decreased as the contents of RuO$_2$ increased and at firing temperatures higher than C, the sheet resistance increased as the firing temperature increased. In case of using lead borosilicate glass-containing $Bi_{2}O_{3}$, the sheet resistance decreased as the contents of $Bi_{2}O_{3}$ increased. TCR changes from negative to positive values as RuO$_2$ contents increased and from positive to negative values as the firing temperature increased. TCR increased to positive values as $Bi_{2}O_{3}$ increased in the glass.

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Dual Nano-Electrospray and Mixing in the Taylor Cone

  • Radionova, Anna;Greenwood, David R.;Willmott, Geoff R.;Derrick, Peter J.
    • Mass Spectrometry Letters
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    • v.7 no.1
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    • pp.21-25
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    • 2016
  • Dual-channel nano-electrospray has recently become an ionization technique of great promise especially in biological mass spectrometry. This unique approach takes advantage of the mixing processes that occurs during electrospray. Understanding in more detail the fundamental principles influencing spray formation further study of the origins of the mixing processes: (1) in a Taylor cone region, (2) in charged droplets or (3) in both environments. The dual-channel emitters were made from borosilicate theta-shape glass tubes (O.D. 1.2 mm) and had a tip diameters of less than 4 μm. Electrical contact was achived by deposition of a thin film of an appropriate metal onto the surface of the emitter. The experimental investigation of the Taylor cone formation in a dual-channel electrospray emitter has been carried out by injection of polystyrene beads (diameter 3 μm) at very low concentrations into one of the channels of the non-tapered theta-glass tubes. High-speed camera experiments were set up to visualize the mixing processes in Taylor cone regions for dual-channel emitters. Mass spectra from dual nano-electrospray are presented.

Wafer-level Fabrication of Ball Lens by Cross-cut and Reflow of Wafer-bonded Glass on Silicon

  • Lee, Dong-Whan;Oh, Jin-Kyung;Choi, Jun-Seok;Lee, Hyung-Jong;Chung, Woo-Nam
    • Journal of the Optical Society of Korea
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    • v.14 no.2
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    • pp.163-169
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    • 2010
  • Novel wafer-level fabrication of a glass ball-lens is realized for optoelectronic applications. A Pyrex wafer is bonded to a silicon wafer and cross-cut into a square-tile pattern, followed by wet-etching of the underlying silicon. Cubes of Pyrex on the undercut silicon are then turned into ball shapes by thermal reflow, and separated from the wafer by further etching of the silicon support. Radial variation and surface roughness are measured to be less than ${\pm}3\;{\mu}m$ and ${\pm}1\;nm$, respectively, for ball diameter of about $500\;{\mu}m$. A surface defect on the ball that is due to the silicon support is shown to be healed by using a silicon-optical-bench. Optical power-relay of the ball lens showed the maximum efficiency of 65% between two single-mode fibers on the silicon-optical-bench.

Development of Ultrasonic Machine with Force Controlled Position Servo System (가공력 제어 위치 서보 시스템을 이용한 초음파 가공기의 개발)

  • 장인배;이승범;전병희
    • Transactions of Materials Processing
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    • v.13 no.3
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    • pp.253-261
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    • 2004
  • The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

Role of flgA for Flagellar Biosynthesis and Biofilm Formation of Campylobacter jejuni NCTC11168

  • Kim, Joo-Sung;Park, Changwon;Kim, Yun-Ji
    • Journal of Microbiology and Biotechnology
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    • v.25 no.11
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    • pp.1871-1879
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    • 2015
  • The complex roles of flagella in the pathogenesis of Campylobacter jejuni, a major cause of worldwide foodborne diarrheal disease, are important. Compared with the wild-type, an insertional mutation of the flgA gene (cj0769c) demonstrated significant decrease in the biofilm formation of C. jejuni NCTC11168 on major food contact surfaces, such as polystyrene, stainless steel, and borosilicate glass. The flgA mutant was completely devoid of flagella and non-motile whereas the wild-type displayed the full-length flagella and motility. In addition, the biofilm formation of the wild-type was inversely dependent on the viscosity of the media. These results support that flagellar-mediated motility plays a significant role in the biofilm formation of C. jejuni NCTC11168. Moreover, our adhesion assay suggests that it plays an important role during biofilm maturation after initial attachment. Furthermore, C. jejuni NCTC11168 wild-type formed biofilm with a net-like structure of extracellular fiber-like material, but such a structure was significantly reduced in the biofilm of the flgA mutant. It supports that the extracellular fiber-like material may play a significant role in the biofilm formation of C. jejuni. This study demonstrated that flgA is essential for flagellar biosynthesis and motility, and plays a significant role in the biofilm formation of C. jejuni NCTC11168.