• 제목/요약/키워드: Beam-time intensity pattern

검색결과 15건 처리시간 0.031초

집속이온빔을 이용한 나노 패턴 형성 (Fabrication of a Nano Pattern Using Focused Ion Beam)

  • 한진;민병권;이상조;박철우;이종항
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1531-1534
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    • 2005
  • Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

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입사빔의 위치 및 세기에 따른 자기펌핑 위상공액파의 특성 (Dependence of Optical Phase Conjugation on Incident Beam Position and Intensity)

  • 손동환;전병욱;이임걸;손정영;임동건
    • 전자공학회논문지A
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    • 제30A권3호
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    • pp.43-51
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    • 1993
  • Effects of incident beam position and intensity on self-pumped optical phase conjugation are presented using barium titanate as an optical phase conjugator. Depending on the position of incident beam, the crystal used consists of four major operating regions: irregular pulsing, regular pulsing, stable phase conjugation, and unstable oscillating regions. In the second region, the pulsing frequency and amplitude of phase conjugate beam are proportional to I$_{in}$ and I$_{in}^{0.85}$, respectively, where I$_{in}$ is the incident beam intensity. In the fouth region, the rising time and intensity of the first-generated pulse are proportional to I$_{in}^{0.92}$ and I$_{in}^{0.81}$, respectively. A frequency shift by beam fanning is also discussed by observing interference pattern from an interferometer.

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초음파를 이용한 해저면 영상화 기법에서의 Gain Control에 관한 연구 (A Study on the Gain Control for Underwater Side Scan Sonar System)

  • 이철원;오영석;우종식
    • 한국해양공학회:학술대회논문집
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    • 한국해양공학회 2000년도 추계학술대회 논문집
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    • pp.216-221
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    • 2000
  • This paper deals with the Gain Control in the processing of the underwater acoustic image obtained from side scan sonar(SSS) system. At first, this paper describes the principles of SSS that is a surveying equipment for the underground of the rivers or dams as well as sea floor. Then this paper analyzes the cause and effects of the time varying intensity from the view point of transmission loss and beam pattern. At last, the time varying gain filter that is adopted by the towfish is introduced.

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집속이온빔의 공정조건이 실리콘 가공에 미치는 영향 (The Parametric Influence on Focused Ion Beam Processing of Silicon)

  • 김준현;송춘삼;김종형;장동영;김주현
    • 한국공작기계학회논문집
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    • 제16권2호
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    • pp.70-77
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    • 2007
  • The application of focused ion beam(FIB) technology has been broadened in the fabrication of nanoscale regime. The extended application of FIB is dependent on complicated reciprocal relation of operating parameters. It is necessary for successful and efficient modifications on the surface of silicon substrate. The primary effect by Gaussian beam intensity is significantly shown from various aperture size, accelerating voltage, and beam current. Also, the secondary effect of other process factors - dwell time, pixel interval, scan mode, and pattern size has affected to etching results. For the process analysis, influence of the secondary factors on FIB micromilling process is examined with respect to sputtering depth during the milling process in silicon material. The results are analyzed by the ratio of signal to noise obtained using design of experiment in each parameter.

LCD와 가시광선 LED를 사용한 전사방식의 Scanbeam-SLA 개발 (Development of Projection Scanbeam-SLA using Liquid Crystal Display and Visible Light Emitting Diode)

  • 윤수현;박인백;김민섭;조광호;이석희
    • 한국정밀공학회지
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    • 제30권3호
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    • pp.340-348
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    • 2013
  • In Projection Stereolithography Apparatus (PSLA), Digital Micromirror Device (DMD) and Liquid Crystal Display (LCD) are used as a beam pattern generator. The DMD shows high resolution, but it is mostly applied in micro stereolithography due to high cost and fabricable area. In LCD, the size of pattern beam is freely controlled due to various panel sizes. The LCD, however, has some limitations such as short life time by the high power light source, non-uniform light intensity of pattern beam and low transmittance of UV-light. To solve these problems in LCD-based PSLA, a Scanbeam-SLA with LCD of 19 inches and visible LED-array is developed. In this system, the light module works like a scanner for uniform illumination. The system configuration, working principle and fabrication examples are addressed in this study.

FDTD 방법을 이용한 전자기결합 마이크로스트립 다이폴 배열안테나의 복사패턴 계산 (The radiation pattern calculation of the electromagnetically coupled microstrip dipole array antenna using the FDTD method)

  • 손영수;윤현보
    • 한국통신학회논문지
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    • 제22권7호
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    • pp.1459-1467
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    • 1997
  • The current on the thin planar structure as an element of the transversely fed electromagnetically coupled(EMC) microstrip dipole array antenna is obtained by using the integral forms of the finite difference time domain(FDTD) method. This method was applied to calculating the optimum current distribution (Doplh-Tchebyscheff distribution) of each dipole element on the feed line as a function of their offset positions for the narrow main beam width and the side beam level below -20 dB. The current on each dipole substitutes for the electric and magnetic current densities on the virtual surface of the FDTD calculation to express the far field intensity, the calculation time and the computer memeory can be reduced to about 80% and 1.3 Mbyte, respectively. The calculated radiation patterns are compared to the measured values and these are in good agreement.

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3차원 동영상을 구현하기 위한 실시간 홀로그램의 제작 (Fabrication of Real-Time Hologram for the Implementation of 3-D Moving Picture)

  • 배장근;박세준;김수중
    • 전자공학회논문지T
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    • 제36T권1호
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    • pp.25-31
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    • 1999
  • CCD 카메라와 LCD를 사용하여 실시간 홀로그램 제작방법을 제안하였다. 본 시스템은 백색광을 사용하여 3차원 영상을 재생하기 위한 무지개 홀로그램 방법을 사용하였으며, CCD카메라의 낮은 해상도를 감안하여 간섭패턴의 간격을 크게 할 수 있는 in-line 홀로그램 제작방법을 사용하였다. 제안한 구성도로 간섭된 간섭패턴은 CCD카메라에 감지되고 비디오신호로 변환되어 LCD에 입력된다. 간섭패턴이 입력된 LCD에 백색광을 조사하여 영상을 재생하면 입체영상을 볼 수 있으며, 입력영상의 위치를 변화하면 재생영상도 같이 움직이는 실시간 홀로그램이 된다. 본 논문에서 제안된 방법이 백색광을 사용한 실시간 홀로그램 제작에 유용함을 확인하기 위하여 해상도가 높은 홀로그래픽 필름에 먼저 기록하여 재생해보고, 이를 다시 LCD에 기록하고 재생한 후 그 결과를 비교하였다. 또 기록시 기준파와 물체파의 세기비를 변화시켜 최적의 간섭조건을 도출하였다.

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반도체 제조 이온주입 공정의 이온 임플란타 장치에서 엑스레이 발생 특성 (Characterization of X-ray Emitted in the Ion Implantation Process of Semiconductor Operations)

  • 박동욱;조경이;김소연;이승희;정은교
    • 한국산업보건학회지
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    • 제33권4호
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    • pp.439-446
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    • 2023
  • Objectives: The aims of this study are to investigate how X-rays are emitted to surrounding parts during the ion implantation process, to analyze these emissions in relation to the properties of the ion implanter equipment, and to estimate the resulting exposure dose. Eight ion implanters equipped with high-voltage electrical systems were selected for this study. Methods: We monitored X-ray emissions at three locations outside of the ion implanters: the accelerator equipped with a high-voltage energy generator, the impurity ion source, and the beam line. We used a Personal Portable Dose Rate and Survey Meter to monitor real-time X-ray levels. The SX-2R probe, an X-ray Features probe designed for use with the RadiagemTM meter, was also utilized to monitor lower ranges of X-ray emissions. The counts per second (CPS) measured by the meter were estimated and then converted to a radiation dose (𝜇Sv/hr) based on a validated calibration graph between CPS and μGy/hr. Results: X-rays from seven ion implanters were consistently detected in high-voltage accelerator gaps, regardless of their proximity. X-rays specifically emanated from three ion implanters situated in the ion box gap and were also found in the beam lines of two ion implanters. The intensity of these X-rays did not show a clear pattern relative to the devices' age and electric properties, and notably, it decreased as the distance from the device increased. Conclusions: In conclusion, every gap, in which three components of the ion implanter devices were divided, was found to be insufficiently shielded against X-ray emissions, even though the exposure levels were not estimated to be higher than the threshold.

맵핑용 3차원 영상 레이저 레이다의 시스템 설계 및 성능 분석 (System Design and Performance Analysis of 3D Imaging Laser Radar for the Mapping Purpose)

  • 라종필;고진신;이창재
    • 한국군사과학기술학회지
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    • 제17권1호
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    • pp.90-95
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    • 2014
  • The system design and the system performance analysis of 3D imaging laser radar system for the mapping purpose is addressed in this article. For the mapping, a push-bloom scanning method is utilized. The pulsed fiber laser with high pulse energy and high pulse repetition rate is used for the light source of laser radar system. The high sensitive linear mode InGaAs avalanche photo-diode is used for the laser receiver module. The time-of-flight of laser pulse from the laser to the receiver is calculated by using high speed FPGA based signal processing board. To reduce the walk error of laser pulse regardless of the intensity differences between pulses, the time of flight is measured from peak to peak of laser pulses. To get 3D image with a single pixel detector, Risley scanner which stirs the laser beam in an ellipsoidal pattern is used. The system laser energy budget characteristics is modeled using LADAR equation, from which the system performances such as the pulse detection probability, false alarm and etc. are analyzed and predicted. The test results of the system performances are acquired and compared with the predicted system performance. According to test results, all the system requirements are satisfied. The 3D image which was acquired by using the laser radar system is also presented in this article.

수평 배열을 이용한 배열 불변성 기반의 음원 거리 추정 성능 분석 (Analysis of array invariant-based source-range estimation using a horizontal array)

  • 구홍주;변기훈;변성훈;김재수
    • 한국음향학회지
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    • 제38권2호
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    • pp.231-239
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    • 2019
  • 소나 체계에서 표적의 거리를 수동으로 추정하는 방법은 활발히 연구되고 있는 분야이다. 본 논문은 배열 불변성을 기반으로 여러 환경과 소나 매개변수에 따른 거리 추정 성능을 제시한다. 배열 불변성은 천해에서의 음원 거리 추정 기법으로서, 상세한 환경 정보가 불필요하며 연산 량이 적어 실시간 거리 추정이 가능하다는 장점을 가진다. 본 논문에서는 기법의 성능을 확인하기 위해서 모의실험을 수행하였고, 2013년 진해항 인근에서 수행된 해상실험 데이터에 본 알고리듬을 적용하였다. 본 연구는 모의 실험을 통하여 음원의 방위각, 송신 신호의 길이, 그리고 수신 배열의 길이에 따른 거리 추정 성능을 보여준다. 또한, 네스티드 배열과 균일 선배열에 대한 거리 추정 결과를 비교하였다.