The Parametric Influence on Focused Ion Beam Processing of Silicon |
Kim, Joon-Hyun
(성균관대학교 기계공학부)
Song, Chun-Sam (국민대학교 대학원) Kim, Jong-Hyeong (서울산업대학교 기계설계자동화공학부) Jang, Dong-Young (서울산업대학교 산업정보시스템공학부) Kim, Joo-Hyun (국민대학교 기계자동차공학부) |
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