• Title/Summary/Keyword: Beam-time intensity pattern

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Fabrication of a Nano Pattern Using Focused Ion Beam (집속이온빔을 이용한 나노 패턴 형성)

  • Han J.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1531-1534
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    • 2005
  • Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

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Dependence of Optical Phase Conjugation on Incident Beam Position and Intensity (입사빔의 위치 및 세기에 따른 자기펌핑 위상공액파의 특성)

  • 손동환;전병욱;이임걸;손정영;임동건
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.3
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    • pp.43-51
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    • 1993
  • Effects of incident beam position and intensity on self-pumped optical phase conjugation are presented using barium titanate as an optical phase conjugator. Depending on the position of incident beam, the crystal used consists of four major operating regions: irregular pulsing, regular pulsing, stable phase conjugation, and unstable oscillating regions. In the second region, the pulsing frequency and amplitude of phase conjugate beam are proportional to I$_{in}$ and I$_{in}^{0.85}$, respectively, where I$_{in}$ is the incident beam intensity. In the fouth region, the rising time and intensity of the first-generated pulse are proportional to I$_{in}^{0.92}$ and I$_{in}^{0.81}$, respectively. A frequency shift by beam fanning is also discussed by observing interference pattern from an interferometer.

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A Study on the Gain Control for Underwater Side Scan Sonar System (초음파를 이용한 해저면 영상화 기법에서의 Gain Control에 관한 연구)

  • 이철원;오영석;우종식
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2000.10a
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    • pp.216-221
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    • 2000
  • This paper deals with the Gain Control in the processing of the underwater acoustic image obtained from side scan sonar(SSS) system. At first, this paper describes the principles of SSS that is a surveying equipment for the underground of the rivers or dams as well as sea floor. Then this paper analyzes the cause and effects of the time varying intensity from the view point of transmission loss and beam pattern. At last, the time varying gain filter that is adopted by the towfish is introduced.

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The Parametric Influence on Focused Ion Beam Processing of Silicon (집속이온빔의 공정조건이 실리콘 가공에 미치는 영향)

  • Kim, Joon-Hyun;Song, Chun-Sam;Kim, Jong-Hyeong;Jang, Dong-Young;Kim, Joo-Hyun
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.2
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    • pp.70-77
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    • 2007
  • The application of focused ion beam(FIB) technology has been broadened in the fabrication of nanoscale regime. The extended application of FIB is dependent on complicated reciprocal relation of operating parameters. It is necessary for successful and efficient modifications on the surface of silicon substrate. The primary effect by Gaussian beam intensity is significantly shown from various aperture size, accelerating voltage, and beam current. Also, the secondary effect of other process factors - dwell time, pixel interval, scan mode, and pattern size has affected to etching results. For the process analysis, influence of the secondary factors on FIB micromilling process is examined with respect to sputtering depth during the milling process in silicon material. The results are analyzed by the ratio of signal to noise obtained using design of experiment in each parameter.

Development of Projection Scanbeam-SLA using Liquid Crystal Display and Visible Light Emitting Diode (LCD와 가시광선 LED를 사용한 전사방식의 Scanbeam-SLA 개발)

  • Yoon, Su Hyun;Park, In Baek;Kim, Min Sub;Jo, Kwang Ho;Lee, Seok Hee
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.3
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    • pp.340-348
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    • 2013
  • In Projection Stereolithography Apparatus (PSLA), Digital Micromirror Device (DMD) and Liquid Crystal Display (LCD) are used as a beam pattern generator. The DMD shows high resolution, but it is mostly applied in micro stereolithography due to high cost and fabricable area. In LCD, the size of pattern beam is freely controlled due to various panel sizes. The LCD, however, has some limitations such as short life time by the high power light source, non-uniform light intensity of pattern beam and low transmittance of UV-light. To solve these problems in LCD-based PSLA, a Scanbeam-SLA with LCD of 19 inches and visible LED-array is developed. In this system, the light module works like a scanner for uniform illumination. The system configuration, working principle and fabrication examples are addressed in this study.

The radiation pattern calculation of the electromagnetically coupled microstrip dipole array antenna using the FDTD method (FDTD 방법을 이용한 전자기결합 마이크로스트립 다이폴 배열안테나의 복사패턴 계산)

  • 손영수;윤현보
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.22 no.7
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    • pp.1459-1467
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    • 1997
  • The current on the thin planar structure as an element of the transversely fed electromagnetically coupled(EMC) microstrip dipole array antenna is obtained by using the integral forms of the finite difference time domain(FDTD) method. This method was applied to calculating the optimum current distribution (Doplh-Tchebyscheff distribution) of each dipole element on the feed line as a function of their offset positions for the narrow main beam width and the side beam level below -20 dB. The current on each dipole substitutes for the electric and magnetic current densities on the virtual surface of the FDTD calculation to express the far field intensity, the calculation time and the computer memeory can be reduced to about 80% and 1.3 Mbyte, respectively. The calculated radiation patterns are compared to the measured values and these are in good agreement.

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Fabrication of Real-Time Hologram for the Implementation of 3-D Moving Picture (3차원 동영상을 구현하기 위한 실시간 홀로그램의 제작)

  • 배장근;박세준;김수중
    • Journal of the Korean Institute of Telematics and Electronics T
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    • v.36T no.1
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    • pp.25-31
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    • 1999
  • A real-time holography system using LCD with CCD camera is proposed. In this system, the rainbow hologram is used since it can be reconstructed by white light source. And to record on CCD camera, a kind of in-line holography method is used to widen the width of the fringe pattern. The interference fringe pattern by proposed system is detected with CCD camera and transferred to the LCD. A 3-dimensional image is reconstructed when the white light source illuminates the LCD. If the position of the input image is changed, that of the reconstructed image is also changed. So it can represent 3-dimensional moving images at real-time. In this paper, to confirm the usefulness of the proposed method, the reconstructed image by holographic film is compared to the same reconstructed image by LCD. In the recording process, the optimal ratio of the reference and object beam intensity is also investigated.

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Characterization of X-ray Emitted in the Ion Implantation Process of Semiconductor Operations (반도체 제조 이온주입 공정의 이온 임플란타 장치에서 엑스레이 발생 특성)

  • Dong-Uk Park;Kyung Ehi Zoh;Soyeon Kim;Seunghee Lee;Eun Kyo Jeong
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.33 no.4
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    • pp.439-446
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    • 2023
  • Objectives: The aims of this study are to investigate how X-rays are emitted to surrounding parts during the ion implantation process, to analyze these emissions in relation to the properties of the ion implanter equipment, and to estimate the resulting exposure dose. Eight ion implanters equipped with high-voltage electrical systems were selected for this study. Methods: We monitored X-ray emissions at three locations outside of the ion implanters: the accelerator equipped with a high-voltage energy generator, the impurity ion source, and the beam line. We used a Personal Portable Dose Rate and Survey Meter to monitor real-time X-ray levels. The SX-2R probe, an X-ray Features probe designed for use with the RadiagemTM meter, was also utilized to monitor lower ranges of X-ray emissions. The counts per second (CPS) measured by the meter were estimated and then converted to a radiation dose (𝜇Sv/hr) based on a validated calibration graph between CPS and μGy/hr. Results: X-rays from seven ion implanters were consistently detected in high-voltage accelerator gaps, regardless of their proximity. X-rays specifically emanated from three ion implanters situated in the ion box gap and were also found in the beam lines of two ion implanters. The intensity of these X-rays did not show a clear pattern relative to the devices' age and electric properties, and notably, it decreased as the distance from the device increased. Conclusions: In conclusion, every gap, in which three components of the ion implanter devices were divided, was found to be insufficiently shielded against X-ray emissions, even though the exposure levels were not estimated to be higher than the threshold.

System Design and Performance Analysis of 3D Imaging Laser Radar for the Mapping Purpose (맵핑용 3차원 영상 레이저 레이다의 시스템 설계 및 성능 분석)

  • La, Jongpil;Ko, Jinsin;Lee, Changjae
    • Journal of the Korea Institute of Military Science and Technology
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    • v.17 no.1
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    • pp.90-95
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    • 2014
  • The system design and the system performance analysis of 3D imaging laser radar system for the mapping purpose is addressed in this article. For the mapping, a push-bloom scanning method is utilized. The pulsed fiber laser with high pulse energy and high pulse repetition rate is used for the light source of laser radar system. The high sensitive linear mode InGaAs avalanche photo-diode is used for the laser receiver module. The time-of-flight of laser pulse from the laser to the receiver is calculated by using high speed FPGA based signal processing board. To reduce the walk error of laser pulse regardless of the intensity differences between pulses, the time of flight is measured from peak to peak of laser pulses. To get 3D image with a single pixel detector, Risley scanner which stirs the laser beam in an ellipsoidal pattern is used. The system laser energy budget characteristics is modeled using LADAR equation, from which the system performances such as the pulse detection probability, false alarm and etc. are analyzed and predicted. The test results of the system performances are acquired and compared with the predicted system performance. According to test results, all the system requirements are satisfied. The 3D image which was acquired by using the laser radar system is also presented in this article.

Analysis of array invariant-based source-range estimation using a horizontal array (수평 배열을 이용한 배열 불변성 기반의 음원 거리 추정 성능 분석)

  • Gu, Hongju;Byun, Gihoon;Byun, Sung-Hoon;Kim, J.S.
    • The Journal of the Acoustical Society of Korea
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    • v.38 no.2
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    • pp.231-239
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    • 2019
  • In sonar systems, the passive ranging of a target is an active research area. This paper analyzed the performance of passive ranging based on an array invariant method for different environmental and sonar parameters. The array invariant developed for source range estimation in shallow water. The advantages of this method are that detailed environmental information is not required, and the real-time ranging is possible since the computational burden is very small. Simulation was performed to verify the algorithm. And this method is applied to sea-going experimental data in 2013 near Jinhae port. This study shows the performance of ranging for source orientation, transmission signal length, and length of a receiver through numerical simulation experiments. Also, the results using nested array and uniform line arrays are compared.