• Title/Summary/Keyword: Beam Size

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The Parametric Influence on Focused Ion Beam Processing of Silicon (집속이온빔의 공정조건이 실리콘 가공에 미치는 영향)

  • Kim, Joon-Hyun;Song, Chun-Sam;Kim, Jong-Hyeong;Jang, Dong-Young;Kim, Joo-Hyun
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.2
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    • pp.70-77
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    • 2007
  • The application of focused ion beam(FIB) technology has been broadened in the fabrication of nanoscale regime. The extended application of FIB is dependent on complicated reciprocal relation of operating parameters. It is necessary for successful and efficient modifications on the surface of silicon substrate. The primary effect by Gaussian beam intensity is significantly shown from various aperture size, accelerating voltage, and beam current. Also, the secondary effect of other process factors - dwell time, pixel interval, scan mode, and pattern size has affected to etching results. For the process analysis, influence of the secondary factors on FIB micromilling process is examined with respect to sputtering depth during the milling process in silicon material. The results are analyzed by the ratio of signal to noise obtained using design of experiment in each parameter.

Nanohole Fabrication using FIB, EB and AFM for Biomedical Applications

  • Zhou, Jack;Yang, Guoliang
    • International Journal of Precision Engineering and Manufacturing
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    • v.7 no.4
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    • pp.18-22
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    • 2006
  • Although many efforts have been made in making nanometer-sized holes, there is still a major challenge in fabricating individual single-digit nanometer holes in a more controllable way for different materials, size distribution and hole shapes. In this paper we describe our efforts to use a top down approach in nanofabrication method to make single-digit nanoholes. There are three major steps towards the fabrication of a single-digit nanohole. 1) Preparing the freestanding thin film by epitaxial deposition and electrochemical etching. 2) Making sub-micro holes ($0.2{\mu}\;to\;0.02{\mu}$) by focused ion beam (FIB), electron beam (EB), atomic force microscope (AFM), and others methods. 3) Reducing the hole size to less than 10 nm by epitaxial deposition, FIB or EB induced deposition and micro coating. Preliminary work has been done on thin films (30 nm in thickness) preparation, sub-micron hole fabrication, and E-beam induced deposition. The results are very promising.

Study on the Influence of Applied Forces Acting on Small Scale Cantilever Beams (미소 외팔보의 동적해석 시 작용하는 힘들의 영향도에 관한 연구)

  • Kim, Kwan-Yong;Yoo, Hong-hee
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2005.11a
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    • pp.702-707
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    • 2005
  • The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.

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Computation of stress-deformation of deep beam with openings using finite element method

  • Senthil, K.;Gupta, A.;Singh, S.P.
    • Advances in concrete construction
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    • v.6 no.3
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    • pp.245-268
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    • 2018
  • The numerical investigations have been carried out on deep beam with opening subjected to static monotonic loading to demonstrate the accuracy and effectiveness of the finite element based numerical models. The simulations were carried out through finite element program ABAQUS/CAE and the results thus obtained were validated with the experiments available in literature. Six simply supported beams were modelled with two square openings of 200 and 250 mm sides considered as opening at centre, top and bottom of the beam. In order to define the material behaviour of concrete and reinforcing steel bar the Concrete Damaged Plasticity model and Johnson-Cook material parameters available in literature were employed. The numerical results were compared with the experiments in terms of ultimate failure load, displacement and von-Mises stresses. In addition to that, seventeen beams were simulated under static loading for studying the effect of opening location, size and shape of the opening and depth, span and shear span to depth ratio of the deep beam. In general, the numerical results accurately predicted the pattern of deformation and displacement and found in good agreement with the experiments. It was concluded that the structural response of deep beam was primarily dependent on the degree of interruption of the natural load path. An increase in opening size from 200 to 250 mm size resulted in an average shear strength reduction of 35%. The deep beams having circular openings undergo lesser deflection and thus they are preferable than square openings. An increase in depth from 500 mm to 550 mm resulted in 78% reduced deflection.

Experimental study on seismic behavior of exterior composite beam-to-column joints with large size stiffened angles

  • Wang, Peng;Wang, Zhan;Pan, Jianrong;Li, Bin;Wang, Bo
    • Steel and Composite Structures
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    • v.37 no.1
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    • pp.15-26
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    • 2020
  • The top-and-seat angles with double web angles are commonly used in the design of beam-to-column joints in Asian and North American countries. The seismic behavior analysis of these joints with large cross-section size of beam and column (often connected by four or more bolts) is a challenge due to the effects from the relatively larger size of stiffened angles and the composite action from the adjacent concrete slab. This paper presents an experimental investigation on the seismic performance of exterior composite beam-to-column joints with stiffened angles under cyclic loading. Four full-scale composite joints with different configuration (only one specimen contain top angle in concrete slab) were designed and tested. The joint specimens were designed by considering the effects of top angles, longitudinal reinforcement bars and arrangement of bolts. The behavior of the joints was carefully investigated, in terms of the failure modes, slippage, backbone curves, strength degradation, and energy dissipation abilities. It was found that the slippage between top-and-seat angles and beam flange, web angle and beam web led to a notable pinching effect, in addition, the ability of the energy dissipation was significantly reduced. The effect of anchored beams on the behavior of the joints was limited due to premature failure in concrete, the concrete slab that closes to the column flange and upper flange of beam plays an significant role when the joint subjected to the sagging moment. It is demonstrated that the ductility of the joints was significantly improved by the staggered bolts and welded longitudinal reinforcement bars.

Design of Spot - Size Converter for optical network (광 네트워크 용 Spot - Size Converter 설계 최적화 설계)

  • Seok, Jae-Hyuk;Kim, Eung-Soo
    • The Journal of the Korea institute of electronic communication sciences
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    • v.7 no.3
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    • pp.573-578
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    • 2012
  • The simplified spot-size convert for optical network has been suggested. We have analyzed the mode field distribution and optimized the spot-size converter using beam propagation method. The designed structure was consisted of straight waveguide and taper waveguide using polymer. The efficiency of the designed spot-size converter was over 99%.

The Influence of Poly-Si Morphology with Excimer Laser Optics System

  • Peng, Yao;Chen, C.N.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.679-683
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    • 2005
  • In this study, we investigate the characteristic of the poly-Si grain and morphology influenced by XeCl excimer laser system. The stable laser beam source is basic requested; the irradiation beam through optical lens module is more important which limit the grain size smaller than $0.5{\mu}m$. The homogenization lens designs control the poly-Si grain size; so we hardly get enlarge grain size by one laser irradiation scan.

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A Calculation of the Propagation for Focused Beams Using BPM (BPM을 이용한 안테나 배열의 집속 빔 전파 해석)

  • Kim Jaeheung;Cho Choon Sik;Lee Jae W.
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.16 no.5 s.96
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    • pp.465-471
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    • 2005
  • A method of calculation fur propagating and focusing of focused beams generated in antenna arrays, using BPM(Beam Propagation Method), is presented in this paper. Based on the diffraction theory, the beam focusing and Propagation is studied specially for the case of the antenna way fed by the Rotman lens that is able to focus microwave power on its focal arc or generate multiple beams. There are difficulties in performing a full-wave simulation using a commercial EM simulation tool for propagating and focusing of beams because of the structural complexity and the feeding assignment of the antenna array. Therefore, as an alternative solution, the BPM is presented to calculate the beam propagation from the aperture-type antennas. From the point of view of optics, the propagations of the lens have been simplified from the Fresnel diffraction integral to the Fourier transform. Using Fourier Transform, a beam propagation method is developed to show improvement of the resolution by controlling the wavefront of wave Propagating from an aperture-type antenna array. The beam width(or spot size) and the intensity are calculated for a focused beam propagating from an array having $10\lambda$ of its size. For the beams with $20\lambda,\;30\lambda$, and $50\lambda$ of geometrical focal length, the half-power beam widths(or spot size) are about 1.1\lambda,\;1.3\lambda,\;and\;1.9\lambda$ respectively.

Size Effect on Flexural Stress-Strain Relationship of Reinforced-Concrete Beams (철근콘크리트 보의 휨압축강도 및 변형률에 대한 크기효과)

  • 김민수;김진근;김장호
    • Proceedings of the Korea Concrete Institute Conference
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    • 2002.05a
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    • pp.911-916
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    • 2002
  • It is important to consider the effect of depth when estimating the ultimate strength of a concrete flexural member because the strength always decreases with an increase of member size. In this study, the size effect of reinforced concrete beam was experimentally investigated. For this purpose, a series of beam specimens subjected to 2-point bending load were tested. More specifically, three different depth (d=15, 30, and 60 cm) of reinforced concrete beams were tested to investigate the size effect. The shear-span to depth ratio (a/d=3) and thickness (20 cm) of the specimens were kept constant where the size effect in out-of-plan direction is not considered. The test results are fitted using least square method (LSM) to obtain parameters for modified size effect law (MSEL). The analysis results indicate that the flexural compression strength and ultimate strain decreases as the specimen size increases. Finally, more general parameters for MSEL are suggested.

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An experimental study for bending behavior of RC beams strengthened with glass fiber sheet (유리 섬유시트로 보강된 실제크기 철근 콘크리트 보의 휨 거동에 대한 실험적 연구)

  • Kim, Seong-Do;Seong, Jin-Wook
    • Proceedings of the KSR Conference
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    • 2008.06a
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    • pp.274-280
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    • 2008
  • To investigate the flexural behavior of real size RC beams strengthened with glass fiber sheets, 9 strengthened beams of real size are experimented and the results are compared with those of existing experimental studies. Experiments are considered glass fiber sheets, the number of fiber sheets, and the existence of U-wrap. By the results of experiments, the failure behavior and crack types of real size RC beams are almost equal to those of the small size RC beams, and the debonding and not the concrete cover delamination are occurred. It can be found from the load-deflection curves that as the number of fiber sheets is increased, the ductility of real size RC beam is more decreased than that of the small size RC beam. For the strengthening method with glass fiber sheets of the real size RC beams, it can be confirmed that the finding a solution to the bonding problem is required

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