Browse > Article

Nanohole Fabrication using FIB, EB and AFM for Biomedical Applications  

Zhou, Jack (Department of Mechanical Engineering and Mechanics, Drexel University)
Yang, Guoliang (Department of Physics, Drexel University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.7, no.4, 2006 , pp. 18-22 More about this Journal
Abstract
Although many efforts have been made in making nanometer-sized holes, there is still a major challenge in fabricating individual single-digit nanometer holes in a more controllable way for different materials, size distribution and hole shapes. In this paper we describe our efforts to use a top down approach in nanofabrication method to make single-digit nanoholes. There are three major steps towards the fabrication of a single-digit nanohole. 1) Preparing the freestanding thin film by epitaxial deposition and electrochemical etching. 2) Making sub-micro holes ($0.2{\mu}\;to\;0.02{\mu}$) by focused ion beam (FIB), electron beam (EB), atomic force microscope (AFM), and others methods. 3) Reducing the hole size to less than 10 nm by epitaxial deposition, FIB or EB induced deposition and micro coating. Preliminary work has been done on thin films (30 nm in thickness) preparation, sub-micron hole fabrication, and E-beam induced deposition. The results are very promising.
Keywords
Nanohole fabrication; Epitaxial deposition; Electrochemical etching; Focused ion beam; Electron beam; Atomic force microscope;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Sauer-Budge, A. F., Nyamwanda, J. A., Lubensky, D. K. and Branton, D., 'Unzipping Kinetics of double-stranded DNA in a nanopore,' Phys Rev Let, 90, 238101-1 to 238101-4, 2003   DOI   ScienceOn
2 Yong, C. and Pepin, A., 'Nanofabrication: Conventional and nonconventional methods,' Electrophoresis, 22, 187-207, 2001   DOI   ScienceOn
3 Smith, H. I. and Craighead, H. G., 'Nanofabrication,' Phys. Today 43, 24-30, 1990
4 Bhatia, S. and Nicholson, D., 'Molecular transport in nanopores,' J Chem. Phys., 119. 1719-1730, 2003   DOI   ScienceOn
5 Hafner, J. H., Cheung, C. L., Oosterkamp, T. H. and Lieber, C. M., 'High-Yield Assembly of Individual Single-Walled Carbon Nanotube Tips for Scanning Probe Microscopes,' J. Phys. Chem. B 105, 743-747, 2001   DOI   ScienceOn
6 Sze, S. M., 'Semiconductor Devices: Physics and Technology,' John Wiley, New York, 1985
7 Pores Help Nanogate Deliver, MEDICAL MATERIALS UPDATE, http://www.buscom.com/letters/mmupromo/mmu/mmu.html
8 Siwy, Z. and Fulinski, A., 'Fabrication of a Synthetic nanopore ion pump,' Phys. Rev. Lett., 89, 198103-1 to 198103-198104, 2002   DOI   ScienceOn
9 Johnson, R. E. and Shou, J., 'Sputtering of inorganic insulators,' K. Danske Vidensk. Selsk. Mat.-fys. Meddr., 43, 403-494, 1993
10 Gommans, H. H., Alldredge, J. W., Tashiro, H., Park, J., Magnuson, J. and Rinzler, A. G., 'Fibers of aligned singlewalled carbon nanotubes: Polarized Raman spectroscopy,' J. Appl. Phys. 88, 2509, 2000   DOI   ScienceOn
11 Li, J., Stein, D., McMullan, C., Branton, D., Aziz, M. J. and Golovchenko, J. A., 'Ion-beam sculpting at nanometer length scales,' Nature 412: 166-169, 2001   DOI   ScienceOn
12 Deamer, D. W. and Branton, D., 'Characterizing of nucleic acids by nanopore analysis,' Acc. Chem. Res. 35, 817-825, 2002   DOI   ScienceOn
13 Nakao, M., Oku, S., Tamamura, T., Yasui, K. and Masuda, H., 'GaAs and InP Nanohole arrays fabricated by reactive beam etching using highly ordered alumna membranes,' Japanese J. of Apply. Phys., 38, 1052-1055, 1999   DOI
14 Pronko, P. P., Dutta, S. K., Squier, R. J. V., Du, D. and Mourou, G., 'Machining of sub-micron holes using a femtosecond laser at 800 nm,' Optics Commun., 114, 106-110, 1995   DOI   ScienceOn
15 Keller, D. and Chou, C., 'Imaging Steep, High Structures by Scanning Force Microscopy with Electron Beam Deposited Tip,' Surf. Sci., 268, 333-339, 1992   DOI   ScienceOn
16 Li, J., Gershow1, M., Stein, D., Brandin, E. and Golovchenko, J. A., 'DNA molecules and configurations in a solid-state nanopore microscope,' Nature Materials 2, 611-615, 2003   DOI   ScienceOn
17 Dai, H. J., Hafner, J. H., Rinzler, A. G., Colbert, D. T. and Smalley, R. E., 'Nanotubes as nanoprobes in scanning probe microscopy,' Nature, 384, 147-150, 1996   DOI   ScienceOn
18 Hafner, J. H., Cheung, C. L. and Lieber, C. M., 'Direct growth of single-walled carbon nanotube scanning probe microscopy tips,' J. Amer Chem Soci, 121, 9750-9751, 1999   DOI   ScienceOn