• 제목/요약/키워드: BCB

검색결과 66건 처리시간 0.023초

BCB 수지로 본딩한 웨이퍼의 본딩 결합력에 관한 연구 (A Study on the Bond Strength of BCB-bonded Wafers)

  • 권용재;석종원
    • Korean Chemical Engineering Research
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    • 제45권5호
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    • pp.479-486
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    • 2007
  • BCB 수지를 이용하여 본딩한 웨이퍼의 BCB 두께, 본딩 촉진제의 사용여부 및 이웃하는 적층 물질의 종류에 따른 본딩 결합력에 대한 영향을 4-점 굽힘방법을 이용하여 규명한다. 실험결과 본딩 결합력은 BCB 두께에 선형 비례하는데, 이는 BCB의 소성 변형의 정도가 두께에 비례하는 반면에 BCB의 항복 강도에는 영향을 미치지 않기 때문이다. 본딩한 BCB의 두께가 각각 $2.6{\mu}m$$0.4{\mu}m$인 경우에 대하여 본딩 촉진제를 사용 했을 때, 본딩 촉진제와 본딩된 물질의 표면에서는 공유 결합이 형성되기 때문에 본딩 결합력이 증가한다. 산화 규소막이 증착된 실리콘 웨이퍼와 BCB 사이 계면에서의 본딩 결합력은 글래스 웨이퍼와 BCB 사이의 계면에서 보다 약 3배 정도 높다. 이러한 본딩 결합력의 차이는 각 계면에서 Si-O 본드의 본딩 밀도 및 본드 파단 에너지의 차이에 기인한다. PECVD 산화 규소막을 증착한 실리콘 웨이퍼와 BCB 사이 계면의 경우, 기 측정된 $18J/m^2$$22J/m^2$의 본드 파단 에너지를 얻기 위해 각각 약 $12{\sim}13bonds/nm^2$$15{\sim}16bonds/nm^2$의 Si-O 본드 밀도가 필요하다. 반면에, 글래스 웨이퍼와 BCB 사이 계면의 경우에는 기 측정된 $5J/m^2$의 본드 파단 에너지를 얻기 위해 약 $7{\sim}8bonds/nm^2$의 Si-O 본드 밀도가 필요하다.

Glutathione (GSH) Concentration and Developmental Competence of Korean Native Cow Oocytes Selected by Brilliant Cresyl Blue (BCB)

  • Lee, Hyo-Sang;Yu, Dae-Jung;Kwon, Tae-Hyeon;Cho, Su-Jin;Bang, Jae-Il;Park, Sang-Guk;Cho, Sung-Kyun;Kong, Il-Keun
    • 한국수정란이식학회지
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    • 제24권1호
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    • pp.39-45
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    • 2009
  • This study was carried out to evaluate the nuclear, cytoplasmic maturation and developmental potential of bovine oocytes selected by brilliant cresyl blue (BCB) as indirect measurement of oocytes growth phase. Cumulus-oocyte complexes (COCs) were collected from 2 to 8 mm follicles from slaughterhouse Hanwoo ovaries. The COCs were divided into stained cytoplasm to blue (BCB+) and unstained (BCB-) according to their ooplasm BCB coloration stained by $26{\mu}m$ of BCB after 90 min. Selected COCs were cultured in a TCM 199 for 18 to 26 h. Nuclear maturation and total cell number was evaluated after in vitro maturation (IVM) or in vitro culture (IVC) using $10{\mu}g/ml$ Hoechst 33342, and cytoplasmic maturation was evaluated by intracellular glutathione (GSH) assay before (0 h) and after (24 h) IVM. The oocyte diameters were not differed significantly between BCB+ ($157.4{\pm}5.8{\mu}m$) and BCB+ ($149.0{\pm}31.0{\mu}m$) groups (p>0.05). However, the proportion of metaphase II oocytes in BCB+ group was significantly higher than BCB- group after IVM (p<0.05). GSH content of BCB+ group oocytes was significantly higher than that of BCB- group just after collection ($7.3{\pm}0.6$ vs. $4.8{\pm}0.6\;pmol/oocyte$, p<0.05), but not varied after IVM($13.1{\pm}0.9$ and $12.6{\pm}2.5\;pmol/oocytes$ for BCB+ and BCB- respectively; p>0.05). The proportion of blastocyst formation and total cell number in BCB+ group (23.5% and $105.5{\pm}28.6$) was significantly higher than that in BCB- (9.8% and $72.4{\pm}26.1$; p<0.05). The results indicate that BCB+ group oocytes may provide a cellular and functional basis for the greater developmental competence in Korean Native Cow (KNC) oocytes.

Brilliant Cresyl Blue 염색방법과 극체 방출 여부에 따른 돼지 체외수정용 난포란 선별 방법이 배발달에 미치는 영향 (Different Developmental Competence of Porcine Oocytes Selected by Brilliant Cresyl Blue Staining and Polar Body Extrusion)

  • 김연수;김철욱;김인철;곽대오;정기화
    • Reproductive and Developmental Biology
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    • 제33권1호
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    • pp.29-33
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    • 2009
  • The brilliant cresyl blue (BCB) has been used to select the developmental competent oocytes in pigs, goats and cows. Growing oocytes have a higher level of active glucose-6-phosphate dehydrogenase(G6PDH) compare to mature oocytes and are rarely stained compared to mature oocytes, because G6PDH converts BCB to colorless. First polar body extrusion regard as a guideline of meoisis completion. Selection of polar body extrude oocyte is more developmental competent to blastocyst than unselected. This study was conducted to compare the BCB test to the polar body extrusion on selection of developmental competent porcine oocytes for the production of blastocyst. Cumulus-Oocytes complex were exposed to 26uM BCB stain diluted in NCSU-23 for 90 min. There was no significant difference embryo development to blastocysts between BCB treated and not treated($19.58{\pm}1.99$ vs $18.75{\pm}2.27%$), which means there was no detrimental effect of BCB exposure to oocytes. Normal fertilization is not differed among treatment groups from 70.0 to 78.4% development to blastocyst, beside polyspermy did not. To compare two different selection methods, BCB test and polar body extrusion, evaluate the developmental competent of IVP embryos. BCB+PB+(blue stained and polar body extruded, $20.71{\pm}0.45%$) and BCB-PB+(colorless and polar body extruded, $20.04{\pm}l.29%$) groups are significantly (p<0.05) higher developed than those of BCB+PB-(blue stained and no polar body, $13.24{\pm}0.73%$) and BCB-PB-(colorless and no poladbody, $7.25{\pm}0.77%$). These results showed that selection of polar body extruded oocytes method is more efficient than that of BCB test.

감광성 BCB를 이용한 절연막층에서의 비아형성 (Via Formation in Dielectric Layers Made of Photosensitive BCB)

  • 주철원;임성훈;한병성
    • 한국전기전자재료학회논문지
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    • 제14권5호
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    • pp.351-355
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    • 2001
  • Via for achieving reliable fabrication of MCM(Multichip Module) substrate was formed on photosensitive BCB layer. The MCM substrate consists of photosensitive BCB(Benzocyclobutene) interlayer dielectric and copper conductors. In order to form the vias in the photosensitive BCB layer, the process of forming the BCB layer and its via forming plasma etch using C$_2$F$\_$6//O$_2$ gas were evaluated. The thickness of the BCB layer after hard bake was shrunk down to 40% of the original. The resolution of vias formed on the BCB was 15㎛ and the slope after develop was 85 degree. AES analysis was done on two vias, one is etched in C$_2$F$\_$6/O$_2$ gas and the other isnot etched. On the via etched in C$_2$F$\_$6//O$_2$, native C was detected and the amount of native C was reduced after Ar sputter. On the via not etched in C$_2$F$\_$6//O$_2$, organic C was detected. As a result of AES, BCB residue was not removed by Ar sputter, so plasma etch is necessary for achieving reliable vias.

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감광성 BCB를 사용한 MCM-D 기판에서 C2F6 플라즈마 clcaning 이 비야형성에 미 치는 영향 (The Effects of C2F6 Plasma Cleaning on Via Formation in MCM-D Substrate using photosensitive BCB)

  • 이영민
    • 마이크로전자및패키징학회지
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    • 제5권2호
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    • pp.7-12
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    • 1998
  • 감광성 BCB를 사용한 MCM-D기판에 신뢰성있는 비아형성을 위하여 BCB의 공정 특성과 C2F6를 사용한 플라즈마 cleaning 영향을 분석하였다. 절연막, 금속배선재료로 각각 감광성 BCB, Cu를 사용하여 MCM-D 기판을 제작 분석한 결과 BCB는 soft bake 후 초기 두께의 50%정도 두께 손실이 있었으며 해상도는 15um이었다. BCB층에 비아 형성후 C2F6 가스로 플라즈마 cleaning 하고 AES로 비아표면을 분석한 결과 유기물 C는 검출되지 않은 반면 플라즈마 cleaning을 하지 않은 비아를 분석한 결과 유기물 성분의 C가 많이 검출되었 고 Ar 스퍼터에 의해서도 완전히 제거되지 않았다. 따라서 감광성 BCB를 절연막으로 사용 한 MCM-D 기판 제작공정에서 비아 형성후 C2F6를 이용한 플라즈마 cleaning의 필요성을 확인하였다.

감광성 BCB를 사용한 다층 MCM-D 기판에서 비아홀 형성에 관한 연구 (Study on Via hole formation in multi layer MCM-D substrate using photosensitive BCB)

  • 주철원;최효상;안용호;정동철;김정훈;한병성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.99-102
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    • 2000
  • Via for achieving reliable fabrication of MCM-D substrate was formed on the photosensitive BCB layer. MCM-D substrate consists of photosensitive BCB(Benzocyclobutene) interlayer dielectric and copper conductors. In order to form the vias in photosensitive BCB layer, the process of BCB and plasme etch using $C_2$F$_{6}$ gas were evaluated. The thickness of BCB after soft bake was shrunk down to 60% of the original. AES analysis was done on two vias, one is etched in $C_2$F$_{6}$ gas and the other is non etched. On via etched in $C_2$F$_{6}$, native C was detected and the amount of native C was reduced after Ar sputter. On via non etched in $C_2$F$_{6}$, organic C was detected and amount of organic C was reduced a little after Ar sputter. As a result of AES, BCB residue was not removed by Ar sputter, so plasma etch is necessary for achieving reliable via.ble via.

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BCB 평탄화를 활용한 마이크로 기둥 구조물 위의 인듐 범프 형성 공정 (Formation of Indium Bumps on Micro-pillar Structures through BCB Planarization)

  • 박민수
    • 마이크로전자및패키징학회지
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    • 제28권4호
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    • pp.57-61
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    • 2021
  • 마이크로 기둥 구조물 위에 인듐 범프 배열을 형성하는 공정을 제안한다. Benzocyclobutene (BCB) 평탄화와 etch-back 공정을 통하여 매우 협소한 마이크로 기둥 위에 인듐 범프를 형성할 수 있는 공간을 확보할 수 있다. 본 연구에서는 단파장 적외선을 감지용 320×256 포맷의 하이브리드 카메라 센서 제조에 대한 자세한 공정 과정을 소개한다. 다양한 공정을 거친 BCB 필름의 shear strength는 quartz crystal microbalance 방법으로 측정하여 추출하였다. BCB 필름의 shear strength는 인듐 범프보다 103배 더 높은 것으로 확인하였다. 제작된 SWIR 카메라 센서로부터 측정된 암전류의 분포는 제안한 인듐 범프 형성 공정이 매우 민감한 적외선 카메라 센서를 구현하는 데 유용할 수 있음을 제시한다.

꾸지나무 유래 화합물 Broussochalcone B의 HepG2 간암세포의 세포사멸에 미치는 영향 (Broussochalcone B from Broussonetia papyrifera Induce Apoptosis via Activation of a Caspase Cascade and Reactive Oxygen Species Production in Human HepG2 cells)

  • 박진량;류형원;조병옥
    • 생약학회지
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    • 제48권4호
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    • pp.273-279
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    • 2017
  • The aim of this study was to investigate the mechanisms underlying apoptosis induced by a broussochalcone B (BCB) from Broussonetia papyrifera in HepG2 cells. The results showed that BCB treatment for 24 hr significantly inhibited cell viability in a dose-dependent manner, and induced apoptosis in HepG2 cells. More so, BCB treatment triggered the cleavage of caspase-8, -9, -3, poly (ADP-ribose) polymerase (PARP), increase of Bax level, and decrease of Bcl-2 expression. A general caspase inhibitor (z-VAD-fmk) blocked BCB-induced cell death. Furthermore, BCB treatment caused reactive oxygen species (ROS) production in a dose-dependent manner. In addition, an antioxidant N-acetylcysteine (NAC) blocked BCB-induced ROS production and cell death. Therefore, these results indicate that BCB-induced apoptosis is mediated by a caspase dependent pathway and ROS production in HepG2 cells.

Subcellular Characterization of Porcine Oocytes with Different Glucose-6-phosphate Dehydrogenase Activities

  • Fu, Bo;Ren, Liang;Liu, Di;Ma, Jian-Zhang;An, Tie-Zhu;Yang, Xiu-Qin;Ma, Hong;Zhang, Dong-Jie;Guo, Zhen-Hua;Guo, Yun-Yun;Zhu, Meng;Bai, Jing
    • Asian-Australasian Journal of Animal Sciences
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    • 제28권12호
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    • pp.1703-1712
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    • 2015
  • The in vitro maturation (IVM) efficiency of porcine embryos is still low because of poor oocyte quality. Although brilliant cresyl blue positive (BCB+) oocytes with low glucose-6-phosphate dehydrogenase (G6PDH) activity have shown superior quality than BCB negative (-) oocytes with high G6PDH activity, the use of a BCB staining test before IVM is still controversial. This study aimed to shed more light on the subcellular characteristics of porcine oocytes after selection using BCB staining. We assessed germinal vesicle chromatin configuration, cortical granule (CG) migration, mitochondrial distribution, the levels of acetylated lysine 9 of histone H3 (AcH3K9) and nuclear apoptosis features to investigate the correlation between G6PDH activity and these developmentally related features. A pattern of chromatin surrounding the nucleoli was seen in 53.0% of BCB+ oocytes and 77.6% of BCB+ oocytes showed peripherally distributed CGs. After IVM, 48.7% of BCB+ oocytes had a diffused mitochondrial distribution pattern. However, there were no significant differences in the levels of AcH3K9 in the nuclei of blastocysts derived from BCB+ and BCB- oocytes; at the same time, we observed a similar incidence of apoptosis in the BCB+ and control groups. Although this study indicated that G6PDH activity in porcine oocytes was correlated with several subcellular characteristics such as germinal vesicle chromatin configuration, CG migration and mitochondrial distribution, other features such as AcH3K9 level and nuclear apoptotic features were not associated with G6PDH activity and did not validate the BCB staining test. In using this test for selecting porcine oocytes, subcellular characteristics such as the AcH3K9 level and apoptotic nuclear features should also be considered. Adding histone deacetylase inhibitors or apoptosis inhibitors into the culture medium used might improve the efficiency of IVM of BCB+ oocytes.

P(S-r-BCB-r-MMA) 게이트 절연체를 이용한 저전압 구동용 펜타센 유기박막트랜지스터 (Low-voltage Pentacene Field-Effect Transistors Based on P(S-r-BCB-r-MMA) Gate Dielectrics)

  • 구송희;;;류두열;이화성;조정호
    • 공업화학
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    • 제22권5호
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    • pp.551-554
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    • 2011
  • 유기박막트랜지스터 개발의 중요한 이슈 중 하나는 용액 공정이 가능한 저전압구동용 고분자 게이트 절연체의 개발이다. 따라서 본 연구에서는 고성능의 저전압구동이 가능한 유기박막트랜지스터를 위한 우수한 성능의 고분자 게이트 절연체 재료인 poly(styrene-r-benzocyclobutene-r-methyl methacrylate) (P(S-r-BCB-r-MMA))을 합성하였다. P(S-r-BCB-r-MMA)는 경화과정에서 부피의 변화가 거의 없기 때문에 우수한 절연특성을 가지는 매우 얇은 고분자 절연체를 제조할 수 있으며, 이는 주파수에 따른 전기용량 변화를 통해 확인할 수 있다. 펜타센 유기반도체를 기반으로 한 유기박막트랜지스터 소자를 제작하였을 경우 전계효과이동도 $0.25cm^2/Vs$, 문턱전압 -2 V, 점멸비 ${\sim}10^5$, 그리고 sub-threshold swing 400 mV/decade로 우수한 성능을 보인다. 본 연구에서 새롭게 소개된 P(S-r-BCB-r-MMA)는 유연 디스플레이와 같은 미래형 전자소자의 구현을 위한 게이트 절연체 소재로서 하나의 가능성을 제공할 것이다.