• Title/Summary/Keyword: Auger Electron Spectroscopy

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Effect of a Laser Ablation for Carbon Nitride Film Deposition (고전압 방전 플라즈마에 의한 질화탄소 박막 층착 시 레이저 애블레이션 효과)

  • 김종일
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.240-243
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    • 2002
  • Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

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The Effect of Defect Sites on the Dissociation of NO on PT(111) Surface

  • 부진효;강용철;송명철;박종윤;곽현태;이순보
    • Journal of the Korean Vacuum Society
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    • v.2 no.4
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    • pp.404-409
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    • 1993
  • Adorption of nitric oxide on the Pt(III) surface sputtered by Ar-ion has been studied using thermal desorption spectroscopy and Auger electron spectroscopy. Ar-ion sputtering creates a precursor state of ($NO\beta$ stage) adsorbe dat defect sites. The precursor state is characterized by the terminal bent species . At low coverge mos 샐 adsorbed NO dissociates . And as increasing the coverage, the fraction of dissociation remains about 80%.

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Native Oxide Formations on (Al, Ga) As and (Cd, Mn)Te surfaces ((Al, Ga)As 와 (Cd, Mn)Te의 복합화합물 반도체표면에서의 자연 산화물의 형성)

  • 최성수
    • Journal of the Korean Vacuum Society
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    • v.5 no.1
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    • pp.6-13
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    • 1996
  • The kinetics of native oxide formation on the (Al, Ga)As and (Cd, Mn)Te have been studied by X-ray photoelectron spectroscopy(XPS) and Auger electron spectroscopy(AES). The regrowth of native oxide after 3keV Ar ion sputter etch and deionized water etch has been studied. The previous report exhibited that the native oxide on CdTe and GaAs can be removed completely by deionzied(DI) water only[1]. On the other hand, the airgrown native oxide on (Al, Ga)As become nonhomogeneous and the regrown native oxide on (Cd,Mn)Te can be partially removed.

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Platinum Model Catalysts Dispersed on Alumina with Regular Pores (규칙적 세공을 가진 알루미나에 분산된 백금 모형촉매)

  • 윤천호;임헌성
    • Journal of the Korean institute of surface engineering
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    • v.33 no.4
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    • pp.261-265
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    • 2000
  • Geometrically and chemically well defined Pt/alumina model catalysts have been prepared. To this end, we fabricated electrochemically alumina supports in which pores of constant size, length and shape were regularly distributed over a wide area of the surface. Platinum particles were dispersed on the pore surfaces via organometallic chemical vapor deposition technique using (trimethyl) methylcyclopentadienylplatinum (IV) as a precursor. The chemical composition of the alumina plane surfaces was examined by Auger electron spectroscopy and the adsorption characteristics of the platinum particles were studied by thermal desorption spectroscopy. A variety of industrial catalytic problems are now open for further investigation utilizing the Pt/alumina model catalysts.

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Effects of Thermal Oxidation on Corrosion Resistance of Stainless Steels for Muffler Materials (머플러용 스테인리스강의 내식성에 미치는 열적 산화의 영향)

  • Kim, Dongwoo;Kim, Heesan
    • Korean Journal of Metals and Materials
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    • v.46 no.10
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    • pp.652-661
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    • 2008
  • Reduction of NOx in emission gas, improvement of engine efficiency, and extension of warranty period has made demands for developing materials more corrosively resistant to the inner-muffler environments or predicting the lifetime of materials used in muffler more precisely. The corrosion inside muffler has been explained with condensate corrosion mainly though thermal oxidation experiences prior to condensate corrosion. Hence, the aim of this study is to describe how the thermal oxidation affects the corrosion of stainless steel exposed to the inner-muffler environments. Auger electron spectroscopy and electrochemical tests were employed to analyze oxide scale and to evaluate corrosion resistance, respectively. Thermal oxidation has different role of condensate corrosion depending on the temperature: inhibiting condensate corrosion below $380^{\circ}C$ and enhancing condensate corrosion above $380^{\circ}C$. The low temperature oxidation causes to form compact oxide layer functioning a barrier for penetrating condensate into a matrix. Although though thermal oxidation caused chromium-depleted layer between oxide layer and matrix, the enhancement of the condensate corrosion in high temperature oxidation resulted from corrosion-induced crevice formed by oxide scale rather than corrosion in chromium-depleted layer. It was proved by aids of anodic polarization tests and measurements of pitting corrosion potentials. By the study, the role of high temperature oxidation layer affecting the condensate corrosion of stainless steels used as muffler materials was well understood.

Annealing Effect on Adhesion Between Oxide Film and Metal Film (산화막위에 증착된 금속박막과 산화막과의 계면결합에 영향 미치는 열처리 효과)

  • Kim Eung Soo
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.1
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    • pp.15-20
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    • 2004
  • The interfacial layer between the oxide film and the metal film according to RTP annealing temperature of metal film has been studied. Two types of oxides, BPSG and PETEOS, were used as a bottom layer under multi-layered metal films. We observed the interface between oxide and metal films using SEM (scanning electron microscopy), TEM (transmission electron microscopy), AES (auger electron spectroscopy). Bonding failure was occurred by interfacial reaction between the BPSG oxide and the multi-layered metal films above $650^{\circ}C$ RTP anneal. The phosphorus accumulation layer was observed at interface between BPSG oxide and metal films by AES and TEM measurements. On the other hand, bonding was always good in the sample using PETEOS oxide as a bottom layer. We have known that adhesion between BPSG and multi-layered metal films was improved when the sample was annealed below $650^{\circ}C$.

Characteristic and moisture permeability of SiOxCy thin film synthesized by Atmospheric pressure-plasma enhanced chemical vapor deposition

  • Oh, Seung-Chun;Kim, Sang-Sik;Shin, Jung-Uk
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.171-171
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    • 2011
  • Atmospheric pressure- plasma enhanced chemical vapor deposition(AP-PECVD)Processes are recognized as promising and cost effective methods for wide-area coating on sheets of steel, glass, polymeric web, etc. In this study, $SiO_xC_y$ thin films were deposited by using AP-PECVD with a dielectric barrier discharge(DBD). The characteristic of $SiO_xC_y$ thin films were investigated as afunction of the HMDSO/O2/He flow rate. And the moisture permeability of $SiO_xC_y$ thin films was studied. The $SiO_xC_y$ thin films were characterized by the Fourier-transformed Infrared(FT-IR) spectroscopy and also investigated by X-ray photo electron spectroscopy(XPS), Auger Electron Spectroscopy(AES). The moisture permeability of $SiO_xC_y$ thin films was investigated by $H_2O$ permeability tester Detailed experimental results will be demonstrated through th present work.

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Preparation and Characteristics of CIGS nanopowder (CIGS nanopowder 제조 및 특성분석)

  • Ham, Chang-Woo;Suh, Jeong-Dae;Cho, Jung-Min;Song, Ki-Bong
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.371-372
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    • 2009
  • We have prepared and characterized CIGS nanopowder for absorber layer of photovoltaic. CIGS nanopowder were obtained at $260^{\circ}C$ for 6 hours from the reaction of $CuCl_2$, $InCl_3$, $GaCl_3$ and Se powder in solvent. The CIGS nanopowder were identified to have a typical chalcopyrite tetragonal structure by using X-ray diffraction(XRD), Inductively Coupled Plasma Auger Electron Spectroscopy (AES), Scanning Electron Microscopy(SEM).

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Corrosion of Reinforcing Steel in Simulated Pore Solution with Chloride Ion (염분농도에 따른 콘크리트 모사 세공용액에서의 철근 부식특성)

  • Nam, Sang-Cheol;Cho, Won-Il;Cho, Byung-Won;Yun, Kyung-Suk;Chun, Hai-Soo
    • Applied Chemistry for Engineering
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    • v.9 no.5
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    • pp.667-673
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    • 1998
  • Rebar corrosion in a simulated pore solution (SPS) with chloride ion was analyzed by Tafel and AC impedance method and corrosion effects of surface roughness and iron oxide layer were also investigated. Corrosion estimation of rebar by electrochemical impedance spectroscopy is very useful, and the measured value can be adapted to proposed electrochemical equivalent circuit model. Corrosion potential increased to the cathodic direction as the concentration of chloride ions increased and corrosion current had the same tendency as above. Surface films were analyzed with scanning electron microscope and Auger electron spectroscopy. Thermally oxidized layer by torch flame for 15 sec was very poor at anti-corrosive property. The corrosion rate of rebar increased as the surface roughness increased. Also, higher temperatures above RT of SPS in initial stage caused a rebar to be corroded faster.

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