• Title/Summary/Keyword: Aspect Ratio

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PS-b-PDMS와 Amorphous Carbon Layer를 이용하여 Aspect-ratio와 Line-edge 개선에 대한 연구

  • O, Ji-Su;Seong, Da-In;O, Jong-Sik;Yeom, Won-Gyun;Yeom, Geun-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.142-142
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    • 2017
  • High Flory-Huggins interaction parameter (${\chi}$)를 가지는 polystyrene-block-dimethylsiloxane (PS-b-PDMS)는 초미세 패턴 제작과 우수한 defect density, 우수한 edge roughness 특성으로 향상된 패턴을 제공한다는 점에서 반도체 분야에서 많은 연구가 되고 있다. 하지만, PS와 PDMS 사이에 존재하는 큰 surface tension의 차이로 인해 PDMS는 PS와 air 사이에서 segregate되기 때문에 수직배향에 불리하여 high aspect ratio (HAR)을 가지는 cylinder, lamellar 패턴 제작에 있어 큰 어려움을 가진다. 본 연구에서는 이러한 문제를 해결하기 위해, PS-b-PDMS BCP 패턴과 하부 실리콘 기판 사이에 amorphous carbon layer (ACL)를 삽입하여 효과적으로 pattern transfer하는 공정을 연구하였다. 플라즈마를 이용하여 무한대에 가까운 etch selectivity를 가지는 식각 공정을 개발함으로써 낮은 aspect ratio를 가지는 PS-b-PDMS BCP 패턴의 한계점을 극복하였다. Large-x value를 가지는 BCPs를 이용하여도 매우 높은 aspect ratio를 가지면서 동시에 pattern quality를 향상시킬 수 있는 plasma process를 제시하였다.

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Fabrication and application of high-aspect-ratio microchannels using laser-induced etching (레이저유도 에칭을 이용한 고세장비 마이크로채널 가공 및 응용)

  • Oh Kwang-H.;Lee M.K.;Kim S.G.;Lim H.T.;Jeong S.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.659-660
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    • 2006
  • High-aspect-ratio(max. 12.5) microchannels with excellent surface quality and good shape uniformity have been realized utilizing laser-induced etching technique. Etch width and depth variations depend largely upon process variables such as laser power and etchant concentration. Etchant concentration in association with viscosity also influence on the cross-sectional profile of the channels. The optimum process conditions for the fabrication of high-aspect-ratio microchannels applicable to micro thermal devices are demonstrated.

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Numerical Investigation of the Effect of Crack Shape on Leak Flow Characteristics in Pipelines (누설 모양에 따른 파이프 누수 특성에 대한 수치 해석 연구)

  • Lee, Hyunmin;Kim, Jungwoo
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.26 no.2
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    • pp.238-242
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    • 2017
  • The effect of crack shape on the leak flow characteristics in pipelinesis investigated using computational fluid dynamics (CFD) simulations. In the present study, two different crack shapes are considered: axial crack andcircumferential crack. The present simulation results showed that under the same crack area, the aspect ratio influences the leak rate. When the aspect ratio is1, the leak rate reaches the minimum value. Moreover, the leak rate in the circumferentialcrack is slightly larger than that in the axial crack. The change in the leak rateaccording to the crack shape could be explained by the different velocitydistributions at the leak position depending on the aspect ratio.

Optimum Radial Build of a Low Aspect Ratio Tokamak Reactor

  • Hong, B.G.;Hwang, Y.S.;Kang, J.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.397-397
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    • 2011
  • In a low aspect ratio (LAR) tokamak reactor with a superconducting toroidal field (TF) coil, the radial build of TF coil and the shield play a key role in determining the size of a reactor. For self-consistent determination of the reactor components and physics parameters, a system analysis code is coupled with one-dimensional radiation transport code. Conceptual design study of a compact superconducting LAR tokamak reactor with aspect ratio less than 2.5 was conducted and the optimum radial build was identified. It is shown that the use of an improved shielding material and high temperature superconducting magnets with high critical current density opens up the possibility of a fusion power plant with compact size and small re-circulating power simultaneously at low aspect ratio, and that by using an inboard neutron reflector instead of breeding blanket, tritium self-sufficiency is possible with outboard blanket only and thus compact sized reactor is viable.

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Numerical Characteristics of Upwind Schemes for Preconditioned Compressible Navier-Stokes Equations (예조건화된 압축성유동 수치기법에서의 풍상차분법의 수치특성 검토)

  • Gill J. H.;Lee D. H.;Choi Y. H.;Kwon J. H.;Lee S. S.
    • 한국전산유체공학회:학술대회논문집
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    • 2002.10a
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    • pp.95-102
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    • 2002
  • Studies of the numerical characteristics of implicit upwind schemes, such as upwind ADI, Line Gauss-Seidel(LGS) and Point Gauss-Seidel(LU) algorithms, for preconditioned Navier-Stokes equations ate performed. All the algorithms are expressed in approximate factorization form and Von Neumann stability analysis and convergence studies are made. Preconditioning is applied for efficient convergence at low Mach numbers and low Reynolds numbers. For high aspect ratio computations, the ADI and LGS algorithms show efficient and uniform convergence up to moderate aspect ratio if we adopt viscous preconditioning based on min- CFL/max- VNN time-step definition. The LU algorithm, on the other hand, shows serious deterioration in convergence rate as the grid aspect ratio increases. Computations for practical applications also verify these results.

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Study on the Averaging Approach for Microchannel Heat Sinks for Electronics Cooling (평균 접근법을 이용한 전자 장치 냉각용 마이크로 채널 히트 싱크에 대한 연구)

  • Kim, Dong-Kwon;Kim, Sung-Jin
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1430-1435
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    • 2004
  • The present paper is devoted to the modeling based on an averaging approach for microchannel heat sinks. Firstly, analytic solutions for velocity and temperature distributions for low-aspect-ratio microchannel heat sinks are presented by using the averaging approach. When the aspect ratio of the microchannel is smaller than 1, analytic solutions accurately evaluate thermal resistances of heat sinks while the previous model cannot predict thermal resistances. Secondly, asymptotic solutions for velocity and temperature distributions at low-aspect-ratio limit and at high-aspect-ratio limit are presented by using the scale analysis. Asymptotic solutions are very simple, but shown to predict thermal resistances accurately.

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Effects of the Welding Parameters on the Weld Shape in Nd:YAG Laser Welding of STS 304L (STS 304L의 Nd:YAG 레이저 용접에서 용접조건이 용접부 형상에 미치는 영향)

  • 이형근;석한길;한현수;박울재;홍순복
    • Journal of Welding and Joining
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    • v.22 no.1
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    • pp.58-64
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    • 2004
  • The control of the weld bead shape is important in laser welding of the small parts. The effects of laser welding parameters on the weld bead shape in the pulsed Nd:YAG laser welding of STS 304L material were investigated. Shielding gas type, flow rate, pumping voltage, pulse frequency, pulse width, focal position and overlap distance were selected as laser welding parameters. Experiments were designed and conducted using the Taguchi method which was a statistical experimental method. The weld bead width, penetration, area and aspect ratio were measured and analysed as the weld bead shape properties and the welding parameters were optimized to maximize the weld aspect ratio. Weld aspect ratio were greatly affected by the pulse width, pumping voltage and pulse frequency, and somewhat by the overlap distance, and little by the shielding gas type, flow rate and focal position. A confirmation experiment were conducted using the optimized welding parameters.

Experimental study on micro-hole drilling with high aspect ratio using picosecond laser (피코초 레이저를 이용한 고세장비 미세 홀가공의 실험적 연구)

  • Oh, Bukuk;Kim, Jongki;Kim, Dooyoung;Lee, Seungkey;Jeong, Soohoa;Hong, Michael
    • Laser Solutions
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    • v.18 no.2
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    • pp.11-13
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    • 2015
  • Pressure-drop in a micro-channel is critical when a hole diameter is less then 100um with the high aspect ratio, more than 40. To minimize these pressure loss for micro-channel applications is important and there would be the best hole diameter, taper angle, and their combinations. In this work, the parametric study for laser drilling of anodized material is conducted to obtain the micro-channel hole with high aspect ratio.

Effects of Elastic Modulus Ratio on Internal Stresses in Short Fiber Composites (단섬유 복합체에서 탄성계수비가 내부응력에 미치는 영향)

  • 김홍건;노홍길
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.13 no.4
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    • pp.73-78
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    • 2004
  • The conventional SLT(Shear Lag Theory) which has been proven that it can not provide sufficiently accurate strengthening predictions in elastic regime when the fiber aspect ratio is small. This paper is an extented work to improve it by modifying the load transfer mechanism called NSLT(New Shear Lag Theory), which takes into account the stress transfer across the fiber ends and the SCF(Stress Concentration Factor) that exists in the matrix regions near the fiber ends. The key point of the model development is to determine the major controlling factor among the material and geometrical coefficients. It is found that the most affecting factor is the fiber/matrix elastic modulus ratio. It is also found that the proposed model gives a good result that has the capability to correctly predict the elastic properties such as interfacial shear stresses and local stress variations in the small fiber aspect ratio regime.

Effect of Specimen Size on Fatigue crack Growth Rate in Steels (강재의 피로균열전파율에 미치는 시험편 크기의 영향)

  • 안석화
    • Journal of Ocean Engineering and Technology
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    • v.14 no.2
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    • pp.99-105
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    • 2000
  • This paper describes the effect of specimen size on fatigue crack growth rate for the offshore structural high-tensile-strength steel BS4360 and machine structural steel SM45C. The purpose of the present study is to investigate the effect of stress ratio aspect ratio specimen width and specimen thickness of the fatigue crack growth behavior. Compact tension specimens with a LT orientation for BS4360 and SM45C steels were used, All testing was done at constant stress intensity factor range controlled fatigue crack growth condition. The investigation demonstrates that the fatigue crack growth rate is increased with increasing stress ratio and specimen thickness and is decreased with increasing specimen width. The fatigue crack growth rate is unaffected by aspect ratio until a/W=0.50 but is increased by increasing spect ratio from a/W=0.55.

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