• 제목/요약/키워드: Ar Gas

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중적외선 영역의 DLC 코팅된 ZnS 기판의 광학 특성 (Optical Properties of DLC-coated ZnS Substrates in the Mid-infrared Region)

  • 권태형;여서영;김창일;남산;권민철;추병욱;백종후
    • 센서학회지
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    • 제28권2호
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    • pp.101-105
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    • 2019
  • ZnS substrates with excellent transmittance in the mid-infrared region ($3-5{\mu}m$) were prepared using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon(DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance. More specifically DLC was coated using CVD with an Ar and $C_2H_2$ mixed gas, and Ge was used as the bonding layer. During CVD, the bias voltage was fixed to 500 V and analyzed by Fourier transform infrared spectroscopy (FT-IR), nanoindenter, scanning electron microscope and energy dispersive spectrometry. Results of hardness analysis using the nanoindenter, showed that DLC coating increased from 5.9 to 17.7 GPa after deposition. The FT-IR spectroscopy results showed that, in the mid-infrared region ($3-5{\mu}m$), the average transmittance of the samples with DLC coating on one and both sides increased by approximately 6% and approximately 11.2% respectively. In conclusion, the DLC coating improved the durability and transmittance of the ZnS substrates.

그림자효과를 이용하여 증착한 타이타늄 박막의 미세구조 및 형상 (Microstructure and Morphology of Titanium Thin Films Deposited by Using Shadow Effect)

  • 한창석;진성윤;권혁구
    • 한국재료학회지
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    • 제29권11호
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    • pp.709-714
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    • 2019
  • In order to observe the microstructure and morphology of porous titanium -oxide thin film, deposition is performed under a higher Ar gas pressure than is used in the general titanium thin film production method. Black titanium thin film is deposited on stainless steel wire and Cu thin plate at a pressure of about 12 Pa, but lustrous thin film is deposited at lower pressure. The black titanium thin film has a larger apparent thickness than that of the glossy thin film. As a result of scanning electron microscope observation, it is seen that the black thin film has an extremely porous structure and consists of a separated column with periodic step differences on the sides. In this configuration, due to the shadowing effect, the nuclei formed on the substrate periodically grow to form a step. The surface area of the black thin film on the Cu thin plate changes with the bias potential. It has been found that the bias of the small negative is effective in increasing the surface area of the black titanium thin film. These results suggest that porous titanium-oxide thin film can be fabricated by applying the appropriate oxidation process to black titanium thin film composed of separated columns.

고 에너지 볼밀을 이용한 Blue 텅스텐산화물 나노입자의 제조와 특성 (Prepration and Properties of Blue Tungsten Oxide Nanopowders by High Energy Ball-Mill)

  • 김명재;이광석;김경남
    • 한국재료학회지
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    • 제31권1호
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    • pp.23-28
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    • 2021
  • The purpose of this study is to prepare WO3 nanopowders by high-energy milling in mixture gas (7 % H2+Ar) with various milling times (10, 30, and 60 min). The phase transformation, particle size and light absorption properties of WO3 nanopowders during reduction via high-energy milling are studied. It is found that the particle size of the WO3 decreases from about 30 ㎛ to 20 nm, and the grain size of WO3 decreases rapidly with increasing milling time. Furthermore, the surface of the particles due to the pulverization process is observed to change to an amorphous structure. UV/Vis spectrophotometry shows that WO3 powder with increasing milling times (10, 30, 60 min) effectively extends the light absorption properties to the visible region. WO3 powder changes from yellow to gray and can be seen as a phenomenon in which the progress of the color changes to blue. The characterization of WO3 is performed by high resolution X-ray diffractometry, Field emission scanning electron microscopy, Transmission electron microscopy, UV/Vis spectrophotometry and Particle size analysis.

Synthesis of Zinc Oxide Nanoparticle-(C60) Fullerene Nanowhisker Composite for Catalytic Degradation of Methyl Orange under Ultraviolet and Ultrasonic Irradiation

  • Ko, Jeong Won;Son, Yeon-A;Ko, Weon Bae
    • Elastomers and Composites
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    • 제55권4호
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    • pp.321-328
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    • 2020
  • Zinc nitrate hexahydrate (Zn(NO3)2·6H2O) and sodium hydroxide (NaOH) were dissolved in distilled water and stirred for 30 min. The resulting solution was sonicated by an ultrasonic wave for 45 min. This solution was washed with distilled water and ethanol after centrifugation; next, it was placed in an electric furnace at 200℃ for 1 h under the flow of Ar gas to obtain zinc oxide nanoparticle. A zinc oxide nanoparticle-(C60) fullerene nanowhisker composite was synthesized using the zinc oxide nanoparticle solution, C60-saturated toluene, and isopropyl alcohol via the liquid-liquid interfacial precipitation method. The zinc oxide nanoparticle and zinc oxide nanoparticle-(C60) fullerene nanowhisker composite were characterized using X-ray diffraction, scanning electron microscopy, and Raman spectroscopy, and they were used for the catalytic degradation of methyl orange (MO) under ultraviolet (at 254 and 365 nm) and ultrasonic irradiation. In addition, the catalytic degradation of MO over the zinc oxide nanoparticle and zinc oxide nanoparticle-(C60) fullerene nanowhisker composite was evaluated using ultraviolet-visible spectroscopy.

다층막 ta-C 코팅 적용을 통한 절삭공구의 내마모성 향상 (Enhanced Wear Resistance of Cutting Tools Using Multilayer ta-C Coating)

  • 김도현;강용진;장영준;김종국
    • 한국표면공학회지
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    • 제53권6호
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    • pp.360-368
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    • 2020
  • Wear resistance of cutting tools is one of the most important requirements in terms of the durability of cutting tool itself as well as the machining accuracy of the workpiece. Generally, tungsten carbide ball end mills have been processed with hard coatings for high durability and wear resistance such as diamond coating and tetrahedral amorphous carbon(ta-C) coating. In this study, we developed multilayer ta-C coatings whose wear resistance is comparable to that of diamond coating. First, we prepared single layer ta-C coatings according to the substrate bias voltage and Ar gas flow, and the surface microstructure, raman characteristics, hardness and wear characteristics were evaluated. Then, considering the hardness and wear resistance of the single layer ta-C, we fabricated multilayer coatings consisting of hard and soft layers. As a result, it was confirmed that the wear resistance of the multilayer ta-C coating with hardness of 51 GPa, and elastic recovery rate of 85% improved to 97% compared to that of the diamond coated ball end mill.

자외선 및 초음파 공정에 의한 수용액 상의 PCBs 분해 (Removal of PCBs in Aqueous Phase in Ultraviolet (UV), Ultrasonic (US), and UV/US Processes)

  • 이덕영;손영규
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제26권4호
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    • pp.1-7
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    • 2021
  • The removal of PCBs (Polychlorinated biphenyls) in aqueous phase was investigated in the ultraviolet (UV) process, ultrasonics (US) process and ultraviolet/ultrasonic (UV/US) process using PCB No.7 and Aroclor 1260. For PCB No.7 relatively high removal efficiency over 90% was obtained during 20 min in the UV process and UV/US process. On the other hand, lower removal efficiency of 50 - 70% was achieved for it consisted of individual congeners of PCBs containing 3~8 of chlorine atom. It was found that the dechlorination reaction (the photolytic cleavage of C-Cl bond) was considered as a main removal mechanism in the UV process while PCBs were removed by cavitation-induced radical reaction in the US process. No significant dechlorination occurred in the US process. Consequently, it was suggested that the UV process or UV/US process was applicable for the removal of PCBs in aqueous phase in terms of the removal efficiency and operation time. In addition, the application of saturating gas such as Ar and Air could be considered to control redox condition and enhance the severity of acoustic cavitation for the removal of PCBs.

금속분말 사출성형된 순-구리의 미세조직에 미치는 고온 소결조건의 영향 (Effect of High-Temperature Sintering Condition on Microstructure Evolution of Pure-Cu Subjected to Metal Injection Molding)

  • 한다인;수하르토노 트리;김동주;이은혜;김종하;고영건
    • 소성∙가공
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    • 제31권4호
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    • pp.240-245
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    • 2022
  • In this study, to achieve good electrical conductivity of a charging terminal component in electric vehicles, we investigated the microstructure evolution of pure-Cu subjected to metal injection molding by controlling the sintering variables, such as temperature and time. Thus, three samples were sintered at temperatures ranging from 1000 ℃ to 1050 ℃ near to the melting temperature of 1085 ℃ for 1 and 10 h after thermal evaporation of binder at 730 ℃. Both procedures were made using a unified furnace under Ar+H2 gas with high purity. The structural observation displayed that the grain size as well as the compactness (a reciprocal of porosity) increased simultaneously as temperature and time increased. This gave rise to high thermal conductivity of 90% IACS together with high density, which was mainly attributed to decrease in fractions of grain boundaries and micro-pores working as effective scattering center for electron movement.

MgO-Al2O3-SiO2계 유리 열물성 및 내플라즈마 특성에 대한 Fluorine 첨가의 영향 (Effects of Fluorine Addition on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass)

  • 윤지섭;최재호;정윤성;민경원;김형준
    • 반도체디스플레이기술학회지
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    • 제21권1호
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    • pp.119-126
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    • 2022
  • MAS-based glass, which has been studied to replace the ceramic material used in the plasma etching chamber, has problems such as forming and processing due to its high melting temperature. To solve this problem, in this study, fluoride was added to the existing MAS-based glass to increase the workability in the glass manufacturing and to improve the chemical resistance to CF4/Ar/O2 plasma gas. Through RAMAN analysis, the structural change of the glass according to the addition of fluoride was observed. In addition, it was confirmed that high-temperature viscosity and thermal properties decreased as the fluoride content increased and plasma resistance was maintained, it showed an excellent etching rate of up to 11 times compared to quartz glass.

Influence of Deposition Parameters on Film Hardness for Newly Synthesized BON Thin Film by Low Frequency R.F. PEMOCVD

  • G.C. Chen;J.-H. Boo;Kim, Y.J.;J.G. Han
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2001년도 춘계학술발표회 초록집
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    • pp.73-73
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    • 2001
  • Boron-containing materials have several excellent properties, such as superlnardness, insulation and non-Rinear optical property. Recently, oxynitride compounds, such as Si(ON), Ti(ON), became the promising materials applied in diffusion barrier layer and solar cell. With the expectation of obtaining the hybrid property, we have firstly grown the BON thin film by radio frequency (R.F.) plasma enhanced metalorganic chemical vapm deposition (PEMOCVD) with 100 kHz frequency and trimethyl borate precursor. The plasma source gases used in this study were Ar and $H_2$, and two kinds of nhmgen source gases, $N_2$ and <$NH_3$, were also employed. The as-grown films were characterized by XPS, IR, SEM and Knoop microlhardness tester. The relationship between the films hardness and the growth rate indicated that the hardness of the film was dependent on several factors such as nitrogen source gas, substrate temperature and film thickness due to the variation of the composition and the structure of the film. Both nitrogen and carbon content could raise the film hardness, on which nitrogen content did stronger effect than carbon. The smooth morphology and continuous structure was benefit of obtaining high hardness. The maximum hardness of BON film was about 10 GPa.

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TFA-MOD공정에서 $BaCeO_3$ 첨가에 의한 $YBa_2Cu_3O_{7-\delta}$ 박막의 임계전류밀도 증가 (Enhancement of critical current density in $BaCeO_3$ doped $YBa_2Cu_3O_{7-\delta}$ thin Films deposited by TFA-MOD process)

  • 이종범;김병주;이희균;홍계원
    • 한국초전도ㆍ저온공학회논문지
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    • 제10권1호
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    • pp.1-5
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    • 2008
  • The effect of $BaCeO_3$ doping on the critical current density of YBCO film by TFA-MOD method was studied. $BaCeO_3$ doping was made by two method; one is direct addition of $BaCeO_3$ nano-sized powder prepared by citrate process followed by grinding with planetary ball mill for 10 hours. Another is addition of Ba-Ce precursor solution prepared with Ba-acetate and Ce acetate dissolved in TFA to the YBCO-TFA precursor solution. The film was made by standard dip coating and heat treatment process with conversion temperature of $790^{\circ}C$ in 1000 ppm oxygen containing moisturized Ar gas atmosphere. The direct addition of $BaCeO_3$ powder resulted in YBCO film with good epitaxial growth and no evidence of second phase formation. The addition through precursor solution resulted in the increase of critical current density upto 30 at% doping and uniform dispersion of $BaCeO_3$ fine inclusion was confirmed by SEM-EDX.