Effects of Fluorine Addition on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass |
Yoon, Ji Sob
(Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
Choi, Jae Ho (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Jung, YoonSung (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Min, Kyung Won (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Kim, Hyeong-Jun (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) |
1 | Zhao, M., Cao, J., Geng, X., Song, W., & Wang, Z. (2020). Structural origin of CaO-MgO-Al2O3-SiO2-Fe2O3 glass crystallization: Iron-containing clusters. Journal of Non-Crystalline Solids, 547, 120295. doi: 10.1016/j.jnoncrysol.2020.120295 DOI |
2 | Baldwin, C. M., Almeida, R. M., & Mackenzie, J. D. (1981). Halide glasses. Journal of Non-Crystalline Solids, 43(3), 309-344. doi:10.1016/0022-3093(81)90101-0 DOI |
3 | Neuville, D. R., Cormier, L., Montouillout, V., Florian, P., Millot, F., Rifflet, J.-C., & Massiot, D. (2008). Amorphous materials: Properties, structure, and durability: Structure of Mg- and Mg/Ca aluminosilicate glasses: 27Al NMR and Raman spectroscopy investigations. American Mineralogist, 93(11-12), 1721-1731. doi:10.2138/am.2008.2867 DOI |
4 | Parker JJARoMS. Fluoride glasses. 1989;19(1):21-41. |
5 | Deng, L., Zhang, X., Zhang, M., & Jia, X. (2018). Effect of CaF2 on viscosity, structure and properties of CaO-Al2O3-MgO-SiO2 slag glass ceramics.JournalofNon-Crystalline Solid. doi: 10.1016/j. jnoncrysol.2018.08.018 DOI |
6 | KALAMPOUNIAS, A. G. (2011). IR and Raman spectroscopic studies of sol-gel derived alkaline-earth silicate glasses. Bulletin of Materials Science, 34(2), 299-303. doi:10.1007/s12034-011-0064-x DOI |
7 | Weyl WJGI. Replacement of Oxygen in Glass and Its Effect on Adherence. 1942;23(4):135-37. |
8 | Choi JH, Yoon J, Jung Y, Min KW, Im WB, Kim H-J. Analysis of plasma etching resistance for commercial quartz glasses used in semiconductor apparatus in fluorocarbon plasma. Materials Chemistry and Physics. 2021;272. doi: 10.1016/j.matchemphys.2021.125015. DOI |
9 | Park, J., Choi, J. H., Na, H., & Kim, H.-J. (2020). Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses. Journal of Asian Ceramic Societies, 9(1), 334-340. doi: 10.1080/21870764.2020.1868079 DOI |
10 | Yoon, J. S., Jung, Y. S., Min, K. W., Choi, J. H., Im, W. B.,& Kim H. -J. (2021). Study on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass. 2021;20(2):61-6. Journal of the Semiconductor & Display Technology. |
11 | Yadav, A. K., & Singh, P. (2015). A review of the structures of oxide glasses by Raman spectroscopy. RSC Advances, 5(83), 67583-67609. doi:10.1039/c5ra13043c DOI |
12 | Na, H., Park, J., Choi, S.-C., & Kim, H.-J. (2019). The effect of composition of plasma resistance of CaO-Al2O3-SiO2 glasses under Fluorocarbon Plasma with Ar+. Applied Surface Science, 476, 663-667. doi: 10.1016/j.apsusc.2019.01.133 DOI |
13 | Choi, J. H., Park, H. B., Na, H., & Kim, H.-J. (2019). Plasma corrosion resistance of RO-Al2O3-SiO2 (R: Alkaline earth) under fluorocarbon plasma with Ar+: II. Plasma resistant glass. Corrosion Science, 146, 247-253. doi: 10.1016/j.corsci.2018.10.015 DOI |
14 | Choi, J. H., Han, Y. S., Lee, S. M., Park, H. B., Choi, S. C,& Kim, H. -J. (2016). Characteristics of carbon tetrafluoride plasma resistance of various glasses. Journal of the Korean Ceramic Society 2016;53(6):700-6. doi: http://dx.doi.org/10.4191/kcers.2016.53.6.700 DOI |
15 | Jung, Y. S., Min, K. W., Choi, J. H., Yoon, J. S., Im, W. B.,& Kim H. -J. (2021). Plasma-resistant characteristics according to sintering conditions of CaO-Al2O3-SiO2 glass coating layer. Journal of the Korean Ceramic Society 2022;59(1):86-93. doi: 10.1007/s43207-021-001449-x DOI |
16 | Na H, Park J, Park J-H, Kim D-G, Choi S-C, Kim H-J. (2020). Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching. Journal of the Korean Crystal Growth and Crystal Technology. 2020;30(2):66-72. doi: 10.6111/JKCGCT.2020.30.20.066 DOI |
17 | Choi, J. H., Na, H., Park, J.,& Kim, H. -J. (2019). Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar+. Journal of Non-Crystalline Solids. 521:119498. doi: 10.1016/j.jnoncrysol.2019.1194 DOI |
18 | Park, J., Na, H., Park, J.-H., Kim, D.-G., Choi, S.-C., & Kim, H.-J. (2020). Divalent ion mixed effect of calcium aluminosilicate glasses (CAS) on thermal properties and fluorocarbon plasma resistance. Journal of Non-Crystalline Solids, 533, 119897. doi:10.1016/j.jnoncrysol.2020.119897 DOI |
19 | Volf MBJGs, technology. Chemical approach to glass. 1984;7:465-9. |
20 | Han, C., Chen, M., Rasch, R., Yu, Y., & Zhao, B. (2016). Structure Studies of Silicate Glasses by Raman Spectroscopy. Advances in Molten Slags, Fluxes, and Salts: Proceedings of the 10th International Conference on Molten Slags, Fluxes and Salts 2016, 175-182. doi:10.1007/978-3-319-48769-4_18 DOI |
21 | Tsunawaki, Y., Iwamoto, N., Hattori, T., & Mitsuishi, A. (1981). Analysis of CaO-SiO2 and CaO-SiO2-CaF2 glasses by Raman spectroscopy. Journal of Non-Crystalline Solids, 44(2-3), 369-378. doi:10.1016/0022-3093(81)90039-9 DOI |