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http://dx.doi.org/10.5369/JSST.2019.28.2.101

Optical Properties of DLC-coated ZnS Substrates in the Mid-infrared Region  

Kwon, Tae-Hyeong (Electronic Material & Center, Korea Institute of Ceramic Engineering & Technology)
Yeo, Seo-Yeong (Electronic Material & Center, Korea Institute of Ceramic Engineering & Technology)
Kim, Chang-Il (Electronic Material & Center, Korea Institute of Ceramic Engineering & Technology)
Nahm, Sahn (Department of Materials Science and Engineering, Korea University)
Kwon, Min-Chul (UNIVAC LTD.)
Chu, Byoung-Uck (AVAS Co.)
Paik, Jong-Hoo (Electronic Material & Center, Korea Institute of Ceramic Engineering & Technology)
Publication Information
Journal of Sensor Science and Technology / v.28, no.2, 2019 , pp. 101-105 More about this Journal
Abstract
ZnS substrates with excellent transmittance in the mid-infrared region ($3-5{\mu}m$) were prepared using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon(DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance. More specifically DLC was coated using CVD with an Ar and $C_2H_2$ mixed gas, and Ge was used as the bonding layer. During CVD, the bias voltage was fixed to 500 V and analyzed by Fourier transform infrared spectroscopy (FT-IR), nanoindenter, scanning electron microscope and energy dispersive spectrometry. Results of hardness analysis using the nanoindenter, showed that DLC coating increased from 5.9 to 17.7 GPa after deposition. The FT-IR spectroscopy results showed that, in the mid-infrared region ($3-5{\mu}m$), the average transmittance of the samples with DLC coating on one and both sides increased by approximately 6% and approximately 11.2% respectively. In conclusion, the DLC coating improved the durability and transmittance of the ZnS substrates.
Keywords
Hot press; ZnS substrate; Germanium; Diamond like carbon(DLC) coating; optical properties;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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