• 제목/요약/키워드: Amorphous Silicon (a-Si)

검색결과 488건 처리시간 0.03초

Amorphous-$Si_xGe_y$을 seed layer로 이용한 Poly-Si TFT의 특성 (Characterization of Poly-Si TFT's using Amorphous-$Si_xGe_y$ for Seed Layer)

  • 정명호;정종완;조원주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.125-126
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    • 2007
  • Polycrystalline silicon thin-film-transistors (Poly-Si TFT's) with a amorphous-$Si_xGe_y$ seed layer have been fabricated to improve the performance of TFT. The dependence of crystal structure and electrical characteristics on the the Ge fractions in $Si_xGe_y$ seed layer were investigated. As a result, the increase of grain size and enhancement of electrical characteristics were obtained from the poly-Si TFT's with amorphous-SixGey seed layer.

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유리 기판을 이용한 비정질 실라콘 박막의 결정화 (Laser Induced Crystallizatioo of Amorphous Si Films on Glass Substrates)

  • 김필규;문승재;정성호
    • 한국레이저가공학회지
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    • 제13권1호
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    • pp.6-10
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    • 2010
  • Crystallization of 100 nm thick amorphous silicon (a-Si) films on glass substrates was carried out by using a double laser irradiation method. Depending on a-Si deposition method or glass types, the quality of crystallized silicon film varies significantly. For a-Si films deposited with high concentration of impurities, large grains or high crystallinity can not be achieved. Crystallization with different a-Si deposition methods confirmed that for the polycrystallization of a-Si films on glass substrates, controlling the impurity density during substrate preparation is critical.

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Metal induced crystallization of amorphous silicon using metal solution

  • Yoon, Soo-Young;Oh, Jae-Young;Kim, Chae-Ok;Jang, Jin
    • 한국진공학회지
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    • 제7권s1호
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    • pp.123-133
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    • 1998
  • Amorphous silicon (a-Si) was crystallized by metal induced crystallization using metal solution. The a-Si films spin coated with a 50,000 ppm Ni solution were crystallized at as low as $500^{\circ}C$. Needlelike morphology, developed as a result of the migration of $NiSi_2$, precipitates, appears in the MIC poly-Si. The growth of the needlelike crystallites proceeds to a direction parallel to (111). The crystallization temperature can be lowered to $450^{\circ}C$ by Au addition. The enhancement of crystallization results from the decrease of interfacial energy at the NiSi2/Si interface by Au addition.

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자연채광용 박막 투광형 BIPV 창호의 발전특성 분석 연구 (Performance characteristics of building-integrated transparent amorphous silicon PV system for a daylighting application)

  • 윤종호;김석기;송종화;이성진
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2007년도 춘계학술대회
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    • pp.280-283
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    • 2007
  • The first grid-connected, building-integrated transparent amorphous silicon photovoltaic installation has been operated since October 2004 in Yongin, Korea. The 2.2kWp transparent PV system was applied to the facade of entrance hall in newly constructed KOLON E&C R&D building. The PV module is a nominal 0.98m ${\times}$ 0.95m, 10% transparent, laminated, amorphous(a-Si) thin-film device rated at 44 Wp per module. To demonstrate the architectural features of thin film PV technologies for daylighting application, transparent PV modules are attached to the building envelope with the form of single glazed window and special point glazing(SPG) frames. Besides power generation, the 10% transmittance of a-Si PV module provides very smooth natural daylight to the entrance hall without any special shading devices for whole year. The installation is fully instrumented and is continuously monitored in order to allow the performance assessment of amorphous silicon PV operating at the prevailing conditions. This paper presents measured power performance data from the first 12 months of operation. For the first year, annual average system specific yield was just 486.4kWh/kWp/year which is almost half of typical amorphous silicon PV output under the best angle and orientation. It should be caused by building orientation and self-shading of adjacent mass. Besides annual power output, various statistical analysis was performed to identify the characteristics of transparent thin film PV system.

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Al과 Ni를 이용한 비정질 실리콘의 결정화 거동 (Crystallization behavior of Amorphous Silicon with Al and Ni)

  • 권순규;최균;김병익;황진하
    • 한국세라믹학회지
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    • 제43권4호
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    • pp.230-234
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    • 2006
  • Metal-Induced Crystallization (MIC) of amorphous silicon (a-Si) using aluminum and nickel as catalysts were performed with a variation of metal thickness and temperature. Raman results showed that the crystallization of a-Si depended on the thickness of aluminum while not on nickel. Nickel that forms silicide nodules during annealing simply catalyzed the formation of crystalline silicon (c-Si) while aluminum was consumed and transferred during MIC, which resulted in more complex microstructural characteristics. Crystalline silicons after NIC had elongated shape with a twin along the long axis. Morphological change after Aluminum-Induced Crystallization (AIC) showed more equiaxial grains. The nucleation and growth mechanism of AIC was discussed.

다결정 실리콘 태양전지 제조를 위한 비정절 실리콘의 알루미늄 유도 결정화 공정 및 결정특성 연구 (Investigation of aluminum-induced crystallization of amorphous silicon and crystal properties of the silicon film for polycrystalline silicon solar cell fabrication)

  • 정혜정;이종호;부성재
    • 한국결정성장학회지
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    • 제20권6호
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    • pp.254-261
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    • 2010
  • 본 연구에서는 다결정 실리콘 태양전지 응용을 위한 다결정 실리콘 씨앗층의 제조와 그의 특성에 관한 연구를 수행하였다. 다결정 실리콘 씨앗층은 glass/Al/$Al_2O_3$/a-Si 구조를 이용하여 aluminum-induced layer exchange(ALILE) 고정으로 제조하였으며, 자연산화막부터 50 nm까지 다양한 크기로 $Al_2O_3$ 막두께를 변화시켜 알루미늄 유도 결정화 공정에서 막의 두께가 결정화 특성 및 결정결함, 결정크기에 미치는 영향에 대하여 조사하였다. 연구결과, ALILE 공정으로 생성된 다결정 실리콘막의 결함은 $Al_2O_3$ 막의 두께가 증가할수록 함께 증가한 반면, 결정화 정도와 결정입자의 크기는 $Al_2O_3$막의 두께가 증가할수록 감소하였다. 본 실험에서는 16 nm 두께 이하의 앓은 $Al_2O_3$ 막의 구조에서 평균 약 $10\;{\mu}m$ 크기의 sub-grain 결정립을 얻었으며, 결정성은 <111> 방향의 우선 배향성 특성을 보였다.

Effects of Sintering Additives on the Microstructure Development in Silicon Oxynitride Ceramics

  • Kim, Joosun;Chen, I-Wei
    • The Korean Journal of Ceramics
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    • 제6권3호
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    • pp.224-228
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    • 2000
  • Using a small amount of additives and amorphous Si₂N₂O powders, O-SiAlON ceramics have been hot-pressed and its microstructure and mechanical properties were investigated. Scandium oxide was demonstrated to be an effective densification additive for O-SiAlON. Amorphous Si₂N₂O was densified at relatively low temperatures and a microstructure with acicular grains was developed. Fine grains found in materials obtained from amorphous powders suggest that nucleation and crystallization of O-SiAlOH is relatively easy compared with the Si₃N₄-SiO₂reaction.

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Thin Film Transistor (TFT) Pixel Design for AMOLED

  • Han, Min-Koo;Lee, Jae-Hoon;Nam, Woo-Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.413-418
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    • 2006
  • Highly stable thin-film transistor (TFT) pixel employing both low temperature polycrystalline silicon (LTPS) and amorphous silicon (a-Si) for active matrix organic light emitting diode (AMOLED) is discussed. ELA (excimer laser annealing) LTPS-TFT pixel should compensate $I_{OLED}$ variation caused by the non-uniformity of LTPS-TFT due to the fluctuation of excimer laser energy and amorphous silicon TFT pixel is desired to suppress the decrease of $I_{OLED}$ induced by the degradation of a-Si TFT. We discuss various compensation schemes of both LTPS and a-Si TFT employing the voltage and the current programming.

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Joule-heating induced crystallization (JIC) of amorphous silicon films

  • Hong, Won-Eui;Lee, Joo-Yeol;Kim, Bo-Kyung;Ro, Jae-Sang
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.459-462
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    • 2007
  • An electric field was applied to a conductive layer to induce Joule heating in order to carry out the crystallization of amorphous silicon. Polycrystalline silicon was produced through a solid state transformation within the range of a millisecond. Uniformly distributed grains were obtained due to enormously high heating rate.

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열화학 기상 증착법에 의한 비정질 SiOx 나노와이어의 성장 (Growth of Amorphous SiOx Nanowires by Thermal Chemical Vapor Deposition Method)

  • 김기출
    • 융합정보논문지
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    • 제7권5호
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    • pp.123-128
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    • 2017
  • 나노구조를 갖는 물질들은 나노구조물이 갖는 고유의 체적 대비 높은 표면적 비와 양자 갇힘 효과에 기인하는 독특한 전기적, 광학적, 광전기적, 자기적 특성으로 인하여 많은 주목을 받아왔다. 열화학 기상 증착 공정은 나노 구조물의 성장과정에서 다양한 구조를 갖는 나노소재의 합성 능력 때문에 더욱 주목을 받아왔다. 본 연구에서는 두 영역 열화학 기상 증착법과 소스 물질 $TiO_2$ 파우더를 이용하여 VLS 공정으로 Si\$SiO_2$(300 nm)\Pt(5~40 nm) 기판 위에 실리콘 옥사이드 나노와이어를 성장시켰다. 성장된 실리콘 옥사이드 나노와이어의 형상과 결정학적 특성을 전계방출 주사전자현미경과 투과전자현미경으로 분석하였다. 분석결과, 성장된 실리콘 옥사이드 나노와이어의 형상인 지름과 길이는 촉매 박막의 두께에 의존하여 다른 모양을 나타내었다. 또한 성장된 실리콘 옥사이드 나노와이어는 비정질 상을 갖는 것으로 분석되었다.