Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.125-126
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- 2007
Characterization of Poly-Si TFT's using Amorphous-$Si_xGe_y$ for Seed Layer
Amorphous-$Si_xGe_y$ 을 seed layer로 이용한 Poly-Si TFT의 특성
- Jung, Myung-Ho (Department of Electronic materials engineering, Kwangwoon Univ.) ;
- Jung, Jong-Wan (Dept. of Nano-Sci. & Tech.) ;
- Cho, Won-Ju (Department of Electronic materials engineering, Kwangwoon Univ.)
- Published : 2007.06.21
Abstract
Polycrystalline silicon thin-film-transistors (Poly-Si TFT's) with a amorphous-