Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 7 Issue s1
- /
- Pages.123-133
- /
- 1998
- /
- 1225-8822(pISSN)
Metal induced crystallization of amorphous silicon using metal solution
- Yoon, Soo-Young (Department of Physics, Han Yang University) ;
- Oh, Jae-Young (Department of Physics, Kyung Hee University) ;
- Kim, Chae-Ok (Department of Physics, Han Yang University) ;
-
Jang, Jin
(Department of Physics, Kyung Hee University)
- Published : 1998.07.01
Abstract
Amorphous silicon (a-Si) was crystallized by metal induced crystallization using metal solution. The a-Si films spin coated with a 50,000 ppm Ni solution were crystallized at as low as
Keywords